JPS5799784A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5799784A
JPS5799784A JP17672580A JP17672580A JPS5799784A JP S5799784 A JPS5799784 A JP S5799784A JP 17672580 A JP17672580 A JP 17672580A JP 17672580 A JP17672580 A JP 17672580A JP S5799784 A JPS5799784 A JP S5799784A
Authority
JP
Japan
Prior art keywords
electrode
attaching
rough surface
semiconductor substrate
contact resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17672580A
Other languages
Japanese (ja)
Inventor
Yoshinobu Kadowaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP17672580A priority Critical patent/JPS5799784A/en
Publication of JPS5799784A publication Critical patent/JPS5799784A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/80Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE:To decrease contact resistance and increase attaching strength, by giving a rough surface selectively on an electrode attaching surface of a semiconductor substrate, increasing an area, and having ohmic contact with an electrode metal. CONSTITUTION:An electrode-attaching portion is selectively etched on a semiconductor substrate 1. A rough surface 1a like rectangular wave is given and an electrode 3 is attached. An electrode area increases with the formation of rough surface, the contact resistance decreases, and the attaching strength increases. The performance of device can be improved with a simple construction.
JP17672580A 1980-12-11 1980-12-11 Semiconductor device Pending JPS5799784A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17672580A JPS5799784A (en) 1980-12-11 1980-12-11 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17672580A JPS5799784A (en) 1980-12-11 1980-12-11 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5799784A true JPS5799784A (en) 1982-06-21

Family

ID=16018682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17672580A Pending JPS5799784A (en) 1980-12-11 1980-12-11 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5799784A (en)

Similar Documents

Publication Publication Date Title
JPS5799784A (en) Semiconductor device
JPS5254369A (en) Schottky barrier semiconductor device
JPS55124278A (en) Avalanche photodiode
JPS5691477A (en) Semiconductor
JPS57201062A (en) Semiconductor device
JPS523383A (en) Manufacturing method of semiconductor device electrode
JPS57181160A (en) Transistor
JPS5793559A (en) Semiconductor device
JPS5533075A (en) Mesa semiconductor device
JPS5662376A (en) Schottky diode
JPS5661175A (en) Thin-film solar cell
JPS55150265A (en) Flat type diode with pressing force strengthening mechanism
JPS5721114A (en) Electrode construction of quartz oscillator and its manufacture
JPS5649576A (en) Schottky diode
JPS572567A (en) Semiconductor device
JPS5717188A (en) Semiconductor light-emitting element
JPS52139368A (en) Semiconductor device
JPS6449263A (en) Semiconductor device
JPS57124471A (en) Transistor
JPS5676543A (en) Semiconductor element
JPS6490585A (en) Semiconductor device
JPS5726450A (en) Back surface electrode structure for semiconductor integrated circuit device
JPS6446933A (en) Manufacture of semicondutor device
JPS56160075A (en) Semiconductor pressure sensor
JPS5617061A (en) Semiconductor device