JPS6446933A - Manufacture of semicondutor device - Google Patents
Manufacture of semicondutor deviceInfo
- Publication number
- JPS6446933A JPS6446933A JP20376987A JP20376987A JPS6446933A JP S6446933 A JPS6446933 A JP S6446933A JP 20376987 A JP20376987 A JP 20376987A JP 20376987 A JP20376987 A JP 20376987A JP S6446933 A JPS6446933 A JP S6446933A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- film
- naturally oxidized
- ohmic resistance
- adhesion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To form a metallic film having strong adhesion, and to inhibit ohmic resistance at a small value by etching the surface of a semiconductor substrate before the metallic film is shaped. CONSTITUTION:The quantity of etching of a naturally oxidized film formed onto the surface of a semiconductor substrate is optimized. That is, the naturally oxidized film shaped onto the surface of the semiconductor substrate has a large effect on the adhesion of the semiconductor substrate and a metallic film, and the naturally oxidized film is not removed completely and a trace quantity of the natural oxide film is left in an extent that the naturally oxidized film does not have much effect on ohmic resistance. Accordingly, the adhesion of the semiconductor substrate and the metallic film can be increased while ohmic resistance can be inhibited at a small value.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62203769A JP2580612B2 (en) | 1987-08-17 | 1987-08-17 | Method for manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62203769A JP2580612B2 (en) | 1987-08-17 | 1987-08-17 | Method for manufacturing semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6446933A true JPS6446933A (en) | 1989-02-21 |
JP2580612B2 JP2580612B2 (en) | 1997-02-12 |
Family
ID=16479509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62203769A Expired - Fee Related JP2580612B2 (en) | 1987-08-17 | 1987-08-17 | Method for manufacturing semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2580612B2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61267365A (en) * | 1985-05-22 | 1986-11-26 | Hitachi Ltd | Semiconductor device |
-
1987
- 1987-08-17 JP JP62203769A patent/JP2580612B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61267365A (en) * | 1985-05-22 | 1986-11-26 | Hitachi Ltd | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JP2580612B2 (en) | 1997-02-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |