JPS5782731A - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
JPS5782731A
JPS5782731A JP15972580A JP15972580A JPS5782731A JP S5782731 A JPS5782731 A JP S5782731A JP 15972580 A JP15972580 A JP 15972580A JP 15972580 A JP15972580 A JP 15972580A JP S5782731 A JPS5782731 A JP S5782731A
Authority
JP
Japan
Prior art keywords
resin film
pressure sensor
protective
protective resin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15972580A
Other languages
Japanese (ja)
Inventor
Yasuhisa Koike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15972580A priority Critical patent/JPS5782731A/en
Publication of JPS5782731A publication Critical patent/JPS5782731A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To obtain a high-sensitivity, superior-linearity pressure sensor whose decrease in reliability is suppressed while the evil influence of a protective resin film is reduced, by covering a semiconductor pellet for the sensor with the prescribed thin protective resin film. CONSTITUTION:A pellet 2 made of a semiconductor of hollow structure mounted on a package substrate 1 and positioned inside of a sealer cap 5 is protected from the outside air by a thin protective film 14 of silicone resin which has <=100mum thickness. The influence upon the strain rate of a diaphragm is nearly disregarded because of the thickness of the protective resin film. Further, the sufficient operation of the protective film on the outside is maintained. Therefore, the decreases in sensitivity and linearity of the protective resin film 14 are evaded and the reliability of a pressure sensor is improved sufficiently.
JP15972580A 1980-11-13 1980-11-13 Pressure sensor Pending JPS5782731A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15972580A JPS5782731A (en) 1980-11-13 1980-11-13 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15972580A JPS5782731A (en) 1980-11-13 1980-11-13 Pressure sensor

Publications (1)

Publication Number Publication Date
JPS5782731A true JPS5782731A (en) 1982-05-24

Family

ID=15699907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15972580A Pending JPS5782731A (en) 1980-11-13 1980-11-13 Pressure sensor

Country Status (1)

Country Link
JP (1) JPS5782731A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1083412A1 (en) * 1999-09-07 2001-03-14 Endress + Hauser Gmbh + Co. Device for determining a physical quantity of a fluid or a solid material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1083412A1 (en) * 1999-09-07 2001-03-14 Endress + Hauser Gmbh + Co. Device for determining a physical quantity of a fluid or a solid material
US6435025B1 (en) 1999-09-07 2002-08-20 Endress + Hauser Gmbh + Co. Apparatus for determining a physical variable of a liquid or solid medium

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