JPS56142432A - Electrostatic capacitance type pressure sensor - Google Patents
Electrostatic capacitance type pressure sensorInfo
- Publication number
- JPS56142432A JPS56142432A JP4565180A JP4565180A JPS56142432A JP S56142432 A JPS56142432 A JP S56142432A JP 4565180 A JP4565180 A JP 4565180A JP 4565180 A JP4565180 A JP 4565180A JP S56142432 A JPS56142432 A JP S56142432A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- fixing part
- substrate
- diaphragm
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
Abstract
PURPOSE:To make possible to simplify construction and reduce size by forming a diaphragm with a film-shaped flexible part and a fixing part around it of a semiconductor material, fixing the diaphragm to a substrate provided with an electrode and leading out the electrode through a groove made in the fixing part. CONSTITUTION:A diaphragm 52 with a film-shaped flexible part 58 and a fixing part 60 around it is made of a semiconductor material such as silicone, while an electrode 62 opposing said flexible part 58 is formed on a substrate 54 made of borosilicate glass, etc. Said fixing part 60 is sticked to said substrate 54 to oppose said flexible part 58 and said electrode 62 at a specified distance, while said electrode 62 is lead out through a tunnel-shaped groove 63 formed in a part of said fixing part 60 so that the electrostatic capacitance between said disphargm 52 and said electrode 62 can be detected. Further, said groove 63 is filled airtightly with low melting point glass, etc., and said substrate 54 is fixed in a case 68 with a pressure introducing port 86, while lead wires 74 and 76 are bonded to terminals 78 and 80 and a cover 84 is sticked to the upper surface of said case 68 airtightly.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4565180A JPS56142432A (en) | 1980-04-09 | 1980-04-09 | Electrostatic capacitance type pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4565180A JPS56142432A (en) | 1980-04-09 | 1980-04-09 | Electrostatic capacitance type pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56142432A true JPS56142432A (en) | 1981-11-06 |
Family
ID=12725271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4565180A Pending JPS56142432A (en) | 1980-04-09 | 1980-04-09 | Electrostatic capacitance type pressure sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56142432A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6073425A (en) * | 1983-09-16 | 1985-04-25 | メトラー トレド アーゲー | Force measuring instrument |
FR2559898A1 (en) * | 1984-02-21 | 1985-08-23 | Vaisala Oy | ABSOLUTE PRESSURE CAPACITIVE DETECTOR |
WO2016203694A1 (en) * | 2015-06-18 | 2016-12-22 | 株式会社鷺宮製作所 | Pressure switch, pressure sensor, and module for these |
US11493396B2 (en) | 2018-05-22 | 2022-11-08 | Murata Manufacturing Co., Ltd. | Pressure detection element and pressure detection apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS503385A (en) * | 1973-04-16 | 1975-01-14 | ||
JPS53139586A (en) * | 1977-05-10 | 1978-12-05 | Setra Systems Inc | Capacitor transducer |
-
1980
- 1980-04-09 JP JP4565180A patent/JPS56142432A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS503385A (en) * | 1973-04-16 | 1975-01-14 | ||
JPS53139586A (en) * | 1977-05-10 | 1978-12-05 | Setra Systems Inc | Capacitor transducer |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6073425A (en) * | 1983-09-16 | 1985-04-25 | メトラー トレド アーゲー | Force measuring instrument |
FR2559898A1 (en) * | 1984-02-21 | 1985-08-23 | Vaisala Oy | ABSOLUTE PRESSURE CAPACITIVE DETECTOR |
JPS60195829A (en) * | 1984-02-21 | 1985-10-04 | バイサラ・オーワイ | Electrostatic capacity type insulated pressure detector |
WO2016203694A1 (en) * | 2015-06-18 | 2016-12-22 | 株式会社鷺宮製作所 | Pressure switch, pressure sensor, and module for these |
JPWO2016203694A1 (en) * | 2015-06-18 | 2017-11-24 | 株式会社鷺宮製作所 | Pressure switch, pressure sensor, and modules thereof |
US11493396B2 (en) | 2018-05-22 | 2022-11-08 | Murata Manufacturing Co., Ltd. | Pressure detection element and pressure detection apparatus |
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