JPS57160038A - Semiconductor pressure sensor - Google Patents

Semiconductor pressure sensor

Info

Publication number
JPS57160038A
JPS57160038A JP4552981A JP4552981A JPS57160038A JP S57160038 A JPS57160038 A JP S57160038A JP 4552981 A JP4552981 A JP 4552981A JP 4552981 A JP4552981 A JP 4552981A JP S57160038 A JPS57160038 A JP S57160038A
Authority
JP
Japan
Prior art keywords
base
glass
gauge
attached
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4552981A
Other languages
Japanese (ja)
Inventor
Hitoshi Ishikawa
Terumi Nakazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Automotive Systems Engineering Co Ltd
Original Assignee
Hitachi Automotive Engineering Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Automotive Engineering Co Ltd, Hitachi Ltd filed Critical Hitachi Automotive Engineering Co Ltd
Priority to JP4552981A priority Critical patent/JPS57160038A/en
Publication of JPS57160038A publication Critical patent/JPS57160038A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/141—Monolithic housings, e.g. molded or one-piece housings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To eliminate pressure leakage between the glass receiver and the base and raise productivity of semiconductor pressure sensors of high reliability by molding as one body the glass receiver, casing and base. CONSTITUTION:A gauge 4 that converts pressure into electric signal is attached to a glass die 3 with an adhesive. The glass die 3 is attached with an adhesive 5 to a base molded as one body with a glass receiver that receives the glass die 3, casing section, and a base 30 that has a pressure introduction section 10. A control substrate 9 is attached on the base 30 and electric signal of the gauge 4 is sent from the lead frame 6 through a wire. The housing 40 to which an output terminal to output signal to outside from control circuit substrate 9 is molded and the housing 1 and the base 30 can be molded together as one body. With this arrangement pressure leakage to the gauge 4 is eliminated and because of a smaller number of attaching sections mass productivity can be raised.
JP4552981A 1981-03-30 1981-03-30 Semiconductor pressure sensor Pending JPS57160038A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4552981A JPS57160038A (en) 1981-03-30 1981-03-30 Semiconductor pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4552981A JPS57160038A (en) 1981-03-30 1981-03-30 Semiconductor pressure sensor

Publications (1)

Publication Number Publication Date
JPS57160038A true JPS57160038A (en) 1982-10-02

Family

ID=12721930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4552981A Pending JPS57160038A (en) 1981-03-30 1981-03-30 Semiconductor pressure sensor

Country Status (1)

Country Link
JP (1) JPS57160038A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59113731U (en) * 1983-01-22 1984-08-01 株式会社山武 semiconductor pressure transducer
JPS59180339A (en) * 1983-03-30 1984-10-13 Shimadzu Corp Differential pressure transmitter
JPS60207030A (en) * 1984-03-09 1985-10-18 シーメンス、アクチエンゲゼルシヤフト Pressure or differential pressure measuring device
JPS6288930A (en) * 1985-10-07 1987-04-23 モトロ−ラ・イカコ−ポレ−テツド Integral type pressure transducer package and pressure transducer using said package
US5763787A (en) * 1996-09-05 1998-06-09 Rosemont Inc. Carrier assembly for fluid sensor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59113731U (en) * 1983-01-22 1984-08-01 株式会社山武 semiconductor pressure transducer
JPS59180339A (en) * 1983-03-30 1984-10-13 Shimadzu Corp Differential pressure transmitter
JPH0579931B2 (en) * 1983-03-30 1993-11-05 Shimadzu Corp
JPS60207030A (en) * 1984-03-09 1985-10-18 シーメンス、アクチエンゲゼルシヤフト Pressure or differential pressure measuring device
JPH0580610B2 (en) * 1984-03-09 1993-11-09 Siemens Ag
JPS6288930A (en) * 1985-10-07 1987-04-23 モトロ−ラ・イカコ−ポレ−テツド Integral type pressure transducer package and pressure transducer using said package
US5763787A (en) * 1996-09-05 1998-06-09 Rosemont Inc. Carrier assembly for fluid sensor

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