JPS59180339A - Differential pressure transmitter - Google Patents

Differential pressure transmitter

Info

Publication number
JPS59180339A
JPS59180339A JP5588783A JP5588783A JPS59180339A JP S59180339 A JPS59180339 A JP S59180339A JP 5588783 A JP5588783 A JP 5588783A JP 5588783 A JP5588783 A JP 5588783A JP S59180339 A JPS59180339 A JP S59180339A
Authority
JP
Japan
Prior art keywords
pressure
cassette
section
differential
pressure side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5588783A
Other languages
Japanese (ja)
Other versions
JPH0579931B2 (en
Inventor
Takao Someyama
染山 孝雄
Yoshiyasu Watanabe
渡辺 賀靖
Chiaki Iwasa
岩佐 千秋
Shinjiro Tomioka
富岡 真二郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP5588783A priority Critical patent/JPS59180339A/en
Publication of JPS59180339A publication Critical patent/JPS59180339A/en
Publication of JPH0579931B2 publication Critical patent/JPH0579931B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To reduce the overall shape of a differential transmitter and obtain a simple, small-sized structure by providing a body with a high-pressure side and a low-pressure side process pressure introduction part and an electric power source lead-in part, and also forming a cassette storage part. CONSTITUTION:The differential pressure transmitter detects and transmits differential pressure of process pressure in various processes. Then, a cassette 3 is stored detachably in the body 2. The body 2 is formed nearly in a box shape; the cassette storage part 2a is open in the end surface of the right-hand side and a thick part 2b is formed on the left-hand side. The thick part 2b has the high-pressure side and low-pressure side process pressure introduction parts 5 and 6 and power source lead-in part 7. Consequently, the overall shape is reduced to obtain simple, small-sized structure.

Description

【発明の詳細な説明】 (イ)産業上の利用分野 この発明は、各種プロセスにおける差′圧を構台Aする
差圧伝送器に関する。
DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application This invention relates to a differential pressure transmitter for transmitting differential pressures in various processes.

(0)従来技術 従来、差圧伝送器は、第1図に示すように、フ。(0) Conventional technology Conventionally, a differential pressure transmitter has a flat type as shown in FIG.

ライマリ部aとセカンダリ部すとより成り、この−プラ
イマリ部aは、検出室Cを備えたメインボテ゛イdノ両
111111にサイドフランジ′eが取付けられて成島
検出室GK固定電極fと可動電極gとか設けられて圧力
センサとなっている−0そして、メインカッチ゛イdと
サイドフランジe間に圧力室11が形成され。
It consists of a primary part a and a secondary part, and this primary part a is a main body equipped with a detection chamber C, with side flanges 'e attached to both sides 111111, and a fixed electrode f and a movable electrode g of the Narushima detection chamber GK. A pressure chamber 11 is formed between the main coupling d and the side flange e.

この圧力室りにダイヤフラムiが設けられて外部より導
入されるグロセ7圧がダイヤプラムiを介してシール液
jK伝達され、検出室Cに作用するようになっている。
A diaphragm i is provided in this pressure chamber so that Grosse7 pressure introduced from the outside is transmitted to the sealing liquid jK via the diaphragm i and acts on the detection chamber C.

一方、セカンダリ部すは増幅器kが設けられ。On the other hand, the secondary section is provided with an amplifier k.

前記各電極g、fにリード線1’c介して接続され。It is connected to each of the electrodes g and f via a lead wire 1'c.

電源導入部mよp電圧が印加されるようになっている。A p voltage is applied to the power supply introduction part m.

従って9両圧力室り、hに作用するプロセス圧はダイヤ
フラムit  ik介してシール液J、jに伝達され、
検出室Cにおいて可動型figに作用する。そして1両
プロセス圧の差圧によって可動型J71p gが変位し
、固定電(萌fとのギャップがン化し。
Therefore, there are 9 pressure chambers, and the process pressure acting on h is transmitted to the sealing fluids J and j via the diaphragm it ik.
It acts on the movable fig in the detection chamber C. Then, the movable type J71pg is displaced due to the differential pressure between the two process pressures, and the gap with the fixed voltage (moef) is closed.

このギャップ変化による静電容量変化全検知信号として
導出し、増幅器にで増幅して外部に伝達する。
The total capacitance change due to this gap change is derived as a detection signal, amplified by an amplifier, and transmitted to the outside.

この差圧伝送器においては、圧カセンザをプライマリ部
aに一体形成しているため、測定範囲をv更する場合(
レンジ変更〕、プライマリ部aを全て交換しなければな
らず、変更を要しない部分寸て交換することになり、極
めて不経済であった。
In this differential pressure transmitter, the pressure sensor is integrally formed in the primary part a, so when changing the measurement range (
[range change], the entire primary part a had to be replaced, and all the parts that did not require modification had to be replaced, which was extremely uneconomical.

また、セカンダリ部すとの着脱作果も極めて煩雑であっ
た。
In addition, attaching and detaching the secondary section to produce crops was extremely complicated.

甘だ、プライマリ部aの一部に故障が生じると。That's too lenient, if a failure occurs in part of the primary part a.

セカンダリ部すも含めて全て交換しなけ扛ばならず、無
駄が多く9作業も複雑であった。
Everything, including the secondary parts, had to be replaced, resulting in a lot of waste and 9 complex operations.

更に寸だ、プライマリ部aとセカンダリ部すとをそれぞ
れケース等で構成しているので、形状が大型化し、しか
も、受圧面積の大きいダイヤフラムiを設けているため
、より形状が大型化ならざフランジ′ るを得なかった。また、各ボディY/でも大きくなるの
で、歪も生じ易く。シール液jも多量となるので、 l
Fn度変化の影響を受は易いという問題かあった。
Furthermore, since the primary part a and the secondary part are each made up of a case, etc., the shape becomes large, and since the diaphragm i with a large pressure-receiving area is provided, if the shape becomes larger, the flange ' I had no choice. Moreover, since each body Y/ also becomes large, distortion is likely to occur. Since the amount of sealing liquid j is also large, l
There was a problem that it was easily affected by changes in Fn degree.

(ハ)目的 この発明は、斯かる点に鑑み、近年の圧力センサ等の小
型化及び過大な片圧作用が極めて少ないという点に着目
し、圧力センサや増幅器等をカセット化してボディ内に
着脱自在に収納することにより、小型化を図ると共に、
保守点検等を容易に行えるようにした差圧伝送器を提供
することを目的とするものである。
(c) Purpose In view of the above, this invention focuses on the recent miniaturization of pressure sensors, etc. and the fact that excessive single pressure action is extremely rare, and the pressure sensor, amplifier, etc. are made into a cassette and can be attached and removed within the body. By storing it freely, it can be made smaller and
The object of the present invention is to provide a differential pressure transmitter that allows easy maintenance and inspection.

に)構成 この発明は、上記の目的を達成するために、ボディに高
圧側及び低圧側のプロセス圧導入部と電源導入部とが形
成されると共に、カセット収納部が形成され、この収納
部を閉鎖する蓋体が前記ボディに着脱自在に取付けられ
る一方、前記収納部にカセットが取り出し自在に収納さ
れ、このカセットに、圧力センサと、この圧力センサに
接続され且つシール液が設けられた高圧側及び低圧側の
i4圧堪と、前記圧力センサに接続され且つ増幅器等を
(Iffiえた電気回路部とが収納され、前記プロセス
圧導入部に導圧管が、前記電源導入部に電気回路部がそ
れぞれ着脱自在に設けられて構成されている。
B) Structure In order to achieve the above object, the present invention has a body formed with a process pressure introduction part and a power supply introduction part on a high pressure side and a low pressure side, and a cassette storage part. A closing lid is removably attached to the body, and a cassette is removably housed in the housing, and the cassette includes a pressure sensor and a high pressure side connected to the pressure sensor and provided with a sealing liquid. and an i4 pressure tank on the low pressure side, and an electric circuit section connected to the pressure sensor and containing an amplifier, etc., are housed, a pressure impulse tube is installed in the process pressure introduction section, and an electric circuit section is installed in the power supply introduction section, respectively. It is configured to be detachably installed.

(ホ)実施例 以下、この発明の実施例を図面に基づいて詳細に説明す
る。
(E) Embodiments Hereinafter, embodiments of the present invention will be described in detail based on the drawings.

〈実施例1〉 この実施例は第2図及び第5図に示し、1は差圧伝送器
であって、各種プロセスにおいてプロセス圧の差圧を検
出して伝送するもので、ボディ2にカセツ)3が着脱自
在に収納されて構成されている。
<Embodiment 1> This embodiment is shown in Figs. 2 and 5, and 1 is a differential pressure transmitter, which detects and transmits the differential pressure of process pressure in various processes. ) 3 is removably housed.

ボディ2は、はぼ箱型に形成されておシ、右側にカセッ
ト収納部2aが端面に開口して形成され。
The body 2 is formed into a box shape, and a cassette storage section 2a is formed on the right side with an opening at the end surface.

左側が1?゛肉部2,1)となっている。そして、収納
部2aの上置を閉鎖する蓋体2Cがボディ2にポル+−
4によって着脱自在に取付けられている。
1 on the left?゛Meat part 2, 1). Then, the lid body 2C that closes the upper part of the storage section 2a is attached to the body 2.
4, it is detachably attached.

厚肉部2bには高圧側及び低圧側のプロセス圧導入部5
,6と電源導入部7とが形成されている。
Process pressure introducing portions 5 on the high pressure side and low pressure side are provided in the thick wall portion 2b.
, 6 and a power supply introduction section 7 are formed.

この両プロセス圧導入部5,6は各種プロセスにおける
高圧プロセス流体と低圧プロセス流体とが流入するよう
になっており、上下方向に貫通する主路5a+6aと、
この主路5a、6aより分岐して収納部2aに開口する
副路5b、6bとより、構成されている。電源導入部7
はカセットろに供給する電圧を導入すると同時にカセッ
トろからの各種検知信号を導出するようになっており、
」二下方向の縦穴7aと、この縦穴7aより収納部2a
に開口する横穴7bとが形成され、リード線等が設けら
れている。
Both process pressure introduction parts 5 and 6 are adapted to receive high-pressure process fluids and low-pressure process fluids in various processes, and have main passages 5a+6a penetrating in the vertical direction.
It is composed of sub-paths 5b and 6b that branch from the main paths 5a and 6a and open into the storage portion 2a. Power supply introduction part 7
The system introduces voltage to be supplied to the cassette filter and at the same time derives various detection signals from the cassette filter.
” Two vertical holes 7a in the downward direction, and the storage part 2a from this vertical hole 7a.
A lateral hole 7b opening to the side is formed, and a lead wire or the like is provided therein.

一方、前記カセット6は、収納部2aに取り出し自在に
収納され、圧カセンザ8と、2本の導圧管9a、9bと
電気回路部10とが収納されている。圧力センサ8は、
拡散型の圧力センサであって、プロセス圧が両溝圧管9
a、9bを介して作用すると、抵抗値が変化して、電気
回路部10にこのプロセス圧に比例した電気信号を導出
するようになっている。
On the other hand, the cassette 6 is removably stored in the storage section 2a, and contains a pressure sensor 8, two pressure impulse tubes 9a and 9b, and an electric circuit section 10. The pressure sensor 8 is
It is a diffusion type pressure sensor, and the process pressure is transmitted through the double groove pressure pipe 9.
When acting through a and 9b, the resistance value changes, and an electrical signal proportional to this process pressure is derived to the electrical circuit section 10.

2本の導圧管9a、9bは、それぞれ一端が圧カセンザ
8に接続され、他端がカセット側面に開口しており、こ
の開口端がプロセス圧導入部5゜乙の副路5b、/、b
に着脱自在に接続されるように構成されている。そして
5両導圧管9a、9bは上下に蛇行してシール液11が
設けられ、高圧と低圧のプロセス圧を圧力センサ8に導
いている。
One end of each of the two pressure impulse pipes 9a and 9b is connected to the pressure sensor 8, and the other end is opened to the side surface of the cassette, and this open end is connected to the sub-paths 5b, /, b of the process pressure introduction part 5°B.
It is configured to be detachably connected to. The five pressure impulse pipes 9a and 9b meander up and down and are provided with a sealing liquid 11 to guide high and low process pressures to the pressure sensor 8.

電気回路部10ば、増幅器10aを備えており。The electric circuit section 10b includes an amplifier 10a.

この増幅器10aが圧カセンザ8にリード%’110b
を介して接続されると共に、カセット乙の側面に取付け
られたコネクタ12にリード線10Cを介して接続され
ている。そして、このコネクタ12が電源導入部7の横
穴7bに着脱自在に接続されるように(?4代され、電
源導入部7からの電圧を増幅器ioaに導くと共に、増
幅器10aは圧カセンザ8の検出信号を受けて増幅し、
電源導入部7を介して外部に導出するようになっている
This amplifier 10a leads to the pressure sensor 8 by %'110b.
It is connected to the connector 12 attached to the side surface of the cassette B via a lead wire 10C. Then, this connector 12 is connected detachably to the side hole 7b of the power supply introduction part 7 (?4), and the voltage from the power supply introduction part 7 is guided to the amplifier ioa, and the amplifier 10a is used to detect the pressure sensor 8. Receive and amplify the signal,
The power is led out to the outside via the power introduction section 7.

尚、16は各プロセス圧導入部5,6に取付けられたエ
ア抜きである。
Note that 16 is an air vent attached to each process pressure introduction section 5, 6.

次に、差圧検出動作について説明する。Next, the differential pressure detection operation will be explained.

先ス、カセットろをボテ゛イ2に取付けた状態において
は、各プロセス圧導入部5,6と導圧管9a 。
First, when the cassette filter is attached to the body 2, each process pressure introducing section 5, 6 and the pressure guiding pipe 9a.

9bが、電源導入部7と電気回路部10とがそれぞれ接
続されており、各プロセス圧導入部5.乙に高圧及び低
圧のプロセス流体を導くと、との)。
9b is connected to the power introduction section 7 and the electric circuit section 10, respectively, and each process pressure introduction section 5. (b) to lead high-pressure and low-pressure process fluids to (b).

ロセヌ流体は直接シール液11に接し、各プロセフ、圧
が各導圧管9a、9bのシール液11i介しテ圧カセン
ザ8に作用する。
The roseine fluid is in direct contact with the sealing liquid 11, and each pressure acts on the pressure sensor 8 through the sealing liquid 11i of each pressure guiding pipe 9a, 9b.

し、この検出信号全増幅器10aで増幅した後。After this detection signal is amplified by the full amplifier 10a.

外部に導出し、伝送する。Derived and transmitted to the outside.

次に、差圧の測定範囲を変更する場合(レンジ変更)、
導圧管9a、9b等の故障時の場合などにおいては蓋体
2Cをボディ2よ゛ジ取外し、カセット3のみを取り呂
して交換する。このカセット3は工場等で生産調整され
ており、上記交換を簡易に行えるようになっている。
Next, when changing the measurement range of differential pressure (range change),
In the event of a failure of the impulse tubes 9a, 9b, etc., the lid 2C is removed from the body 2, and only the cassette 3 is removed and replaced. The production of this cassette 3 is adjusted at a factory or the like, so that the above-mentioned replacement can be easily performed.

また、シール液11によりプロセス流体が圧力センサ8
に直接流入しないので、圧力センサ8はプロセス液に1
編食されることはない。
In addition, the sealing liquid 11 causes the process fluid to flow into the pressure sensor 8.
Since the pressure sensor 8 does not flow directly into the process liquid, the pressure sensor 8
It will never be edited.

〈実施例2〉 この実施例は、第4図及び第5図に示すように。<Example 2> This embodiment is shown in FIGS. 4 and 5.

両溝圧管9a、9bが片圧防止手段14によって互に接
続されて構成されている。
Both groove pressure pipes 9a and 9b are connected to each other by a single pressure prevention means 14.

この片圧防止手段14は9図示しないが、ケース内に薄
膜等が設けられて成り、高圧と低圧のプロセス圧がこの
薄膜等全弁して互いに作用しており、差圧が所定以北に
大きくなると、この薄膜等が破損し、高圧が低圧側へ逃
げて圧カセンザ8に過大な圧力が作用しないようになっ
ている。
This one-sided pressure prevention means 14 consists of a thin film, etc. (not shown) provided inside the case, and high and low process pressures interact with each other through this thin film, so that the differential pressure increases north of a predetermined value. If it becomes large, this thin film etc. will be damaged and the high pressure will escape to the low pressure side, preventing excessive pressure from acting on the pressure sensor 8.

その他の構成・作用は実施例1と同様である。The other configurations and operations are the same as in the first embodiment.

尚、各実施例における圧力センサ8及び電気回路部10
はこの実施例に限定されるものではない。
In addition, the pressure sensor 8 and the electric circuit section 10 in each embodiment
is not limited to this example.

また、導圧管9a、9bの蛇行形状も実施例に  4・
限定されない。
In addition, the meandering shape of the impulse pipes 9a and 9b is also included in the embodiment. 4.
Not limited.

(へ)効果 以上のようにこの発明によれば、従来のように受圧面積
の大きいダイヤフラムを設けていないので、全体形状を
小さくでき、構造を簡易にかつ小型化を図ることができ
る。
(f) Effects As described above, according to the present invention, since a diaphragm with a large pressure-receiving area is not provided as in the conventional case, the overall shape can be reduced, and the structure can be simplified and miniaturized.

更に、ダイヤフラムの取付フランジ等を省略でき、且つ
シール液等も少なくすることかで@ゐので1機器形状を
極めて小さくすることができる。
Furthermore, the mounting flange of the diaphragm, etc. can be omitted, and the amount of sealing liquid etc. can be reduced, so that the shape of one device can be made extremely small.

また、測定範囲の変更時に交換を要する部品や故障し易
い部品はカセットに収納しているので。
In addition, parts that need to be replaced when changing the measurement range and parts that are prone to failure are stored in cassettes.

交換が容易であり、且つカセットのみのワンタッチ作業
で迅速に行うことができる。
Replacement is easy and can be done quickly with a one-touch operation using only the cassette.

捷だ、 (I!:+定範囲とは無関係にボディ形状を一
定にすることができるので、ボディの汎用性が向上する
(I!: + Since the body shape can be made constant regardless of the fixed range, the versatility of the body is improved.

また2ボデイ等を小型にできるので、歪が少なく、その
上、シール液が少量にできるから、温度変化の影響を受
は難く、測定稿度が向上する。
In addition, since the two bodies can be made smaller, there is less distortion, and since a small amount of sealing liquid can be used, it is less susceptible to temperature changes and the measurement accuracy is improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の差圧伝送器の縦断面図、第2図及び第3
図はこの発明の実施例1を示し、第2図は差圧伝送器の
断面平面図、第5図は同断面側面図、第4図及び第5図
はこの発明の実施例2を示し、第4図はカセットの慨略
平面図、第5図は同概略側面図である。 1:差圧伝送器、 2:ボデイ、 2a:カセット収納
部、 2b:厚肉部、 2C:蓋体。 3=カセツト、  4:ボルト、  5・6:グロセス
圧導入部、   5a・6a:主路。 5b・6b:副路、  7:電源導入部。 7a:縦穴、  7b:横穴、  8:圧カセンザ。 9a・9b:導圧管、   ID:電気回路部。 ioa:増幅器、  11:シール液。 12:コネクタ、 14:片圧防止手段。 特許出願人     株式会社島津製作所代理人  弁
理士  中 村 茂 信 第1図 −208− 第2図 第5図 91)8
Figure 1 is a vertical cross-sectional view of a conventional differential pressure transmitter, Figures 2 and 3 are
The figure shows Embodiment 1 of the present invention, FIG. 2 is a cross-sectional plan view of a differential pressure transmitter, FIG. 5 is a side view of the same cross-section, and FIGS. 4 and 5 show Embodiment 2 of the present invention. FIG. 4 is a schematic plan view of the cassette, and FIG. 5 is a schematic side view thereof. 1: Differential pressure transmitter, 2: Body, 2a: Cassette storage section, 2b: Thick wall section, 2C: Lid body. 3 = cassette, 4: bolt, 5 and 6: gross pressure introduction section, 5a and 6a: main path. 5b/6b: Side path, 7: Power supply introduction part. 7a: vertical hole, 7b: horizontal hole, 8: pressure sensor. 9a/9b: Impulse tube, ID: Electric circuit section. ioa: amplifier, 11: seal liquid. 12: Connector, 14: Unilateral pressure prevention means. Patent Applicant Shimadzu Corporation Agent Patent Attorney Shigeru Nakamura Figure 1-208- Figure 2 Figure 5 91) 8

Claims (2)

【特許請求の範囲】[Claims] (1)ボディに高圧側及び低圧側のプロセス圧導入部と
電源導入部とが形成されると共に、カセット収納部が形
成され、この収納部を閉鎖する蓋体が前記ボディに着脱
自在に取付けられる一方。 前記収納部にカセットが取り出し自在に収納され、この
カセットに、圧力センサと、この圧力センサに接続され
且つシール液が設けられた高圧側及び低圧側の導圧管と
、前記圧力センサに接続され且つ増幅器等全備えた電気
回路部とが収納され、前記プロセス圧導入部に導圧管が
。 前記電源導入部に電気回路部がそれぞれ着脱自在に設け
られていることを特徴とする差圧伝送器。
(1) A process pressure introduction part and a power supply introduction part on the high-pressure side and low-pressure side are formed in the body, and a cassette storage part is formed, and a lid for closing this storage part is removably attached to the body. on the other hand. A cassette is removably stored in the storage section, and the cassette includes a pressure sensor, high-pressure side and low-pressure side impulse pipes connected to the pressure sensor and provided with a sealing liquid, and connected to the pressure sensor. An electric circuit section including an amplifier and the like is housed therein, and a pressure guiding tube is provided in the process pressure introduction section. A differential pressure transmitter, characterized in that electric circuit sections are detachably provided in the power introduction section.
(2)前記両温圧管は5片圧防止手段によって接続され
ていることを特徴とする特許請求の範囲第1項記載の差
圧伝送器。
(2) The differential pressure transmitter according to claim 1, wherein both the temperature and pressure pipes are connected by a five-sided pressure prevention means.
JP5588783A 1983-03-30 1983-03-30 Differential pressure transmitter Granted JPS59180339A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5588783A JPS59180339A (en) 1983-03-30 1983-03-30 Differential pressure transmitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5588783A JPS59180339A (en) 1983-03-30 1983-03-30 Differential pressure transmitter

Publications (2)

Publication Number Publication Date
JPS59180339A true JPS59180339A (en) 1984-10-13
JPH0579931B2 JPH0579931B2 (en) 1993-11-05

Family

ID=13011611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5588783A Granted JPS59180339A (en) 1983-03-30 1983-03-30 Differential pressure transmitter

Country Status (1)

Country Link
JP (1) JPS59180339A (en)

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JPS55104042A (en) * 1979-01-31 1980-08-09 Matsushita Electric Works Ltd Circuit breaker
JPS57160038A (en) * 1981-03-30 1982-10-02 Hitachi Ltd Semiconductor pressure sensor
JPS5838442U (en) * 1981-09-09 1983-03-12 株式会社小森コーポレーション Rotary printing press detector

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JPS55104042A (en) * 1979-01-31 1980-08-09 Matsushita Electric Works Ltd Circuit breaker
JPS57160038A (en) * 1981-03-30 1982-10-02 Hitachi Ltd Semiconductor pressure sensor
JPS5838442U (en) * 1981-09-09 1983-03-12 株式会社小森コーポレーション Rotary printing press detector

Also Published As

Publication number Publication date
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