JPH0579931B2 - - Google Patents
Info
- Publication number
- JPH0579931B2 JPH0579931B2 JP58055887A JP5588783A JPH0579931B2 JP H0579931 B2 JPH0579931 B2 JP H0579931B2 JP 58055887 A JP58055887 A JP 58055887A JP 5588783 A JP5588783 A JP 5588783A JP H0579931 B2 JPH0579931 B2 JP H0579931B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- cassette
- pressure side
- introduction part
- low
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 32
- 239000007788 liquid Substances 0.000 claims description 16
- 238000007789 sealing Methods 0.000 claims description 15
- 238000001514 detection method Methods 0.000 description 7
- 239000012530 fluid Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000002265 prevention Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000037237 body shape Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Description
【発明の詳細な説明】
(イ) 産業上の利用分野
この発明は、各種プロセスにおける差圧を検出
する差圧伝送器に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application This invention relates to a differential pressure transmitter that detects differential pressure in various processes.
(ロ) 従来技術
従来、差圧伝送器は、第1図に示すように、プ
ライマリ部aとセカンダリ部bとより成り、この
プライマリ部aは、検出室cを備えたメインボデ
イdの両側にサイドフランジeが取付けられて成
り、検出室cに固定電極fと可動電極gとが設け
られて圧力センサとなつている。そして、メイン
ボデイdとサイドフランジe間に圧力室hが形成
され、この圧力室hにダイヤフラムiが設けられ
て外部より導入されるプロセス圧がダイヤフラム
iを介してシール液jに伝達され、検出室cに作
用するようになつている。(b) Prior Art Conventionally, as shown in Fig. 1, a differential pressure transmitter consists of a primary part a and a secondary part b. A side flange e is attached, and a fixed electrode f and a movable electrode g are provided in a detection chamber c to form a pressure sensor. A pressure chamber h is formed between the main body d and the side flange e, and a diaphragm i is provided in this pressure chamber h, so that the process pressure introduced from the outside is transmitted to the sealing liquid j via the diaphragm i, and is detected. It is designed to act on chamber c.
一方、セカンダリ部bは増幅器kが設けられ、
前記各電極g,fにリード線lを介して接続さ
れ、電源導入部mより電圧が印加されるようにな
つている。 On the other hand, the secondary section b is provided with an amplifier k,
It is connected to each of the electrodes g and f via a lead wire l, and a voltage is applied from a power introduction part m.
従つて、両圧力室h,hに作用するプロセス圧
力はダイヤフラムi,iを介してシール液j,j
に伝達され、検出室cにおいて可動電極gに作用
する。そして、両プロセス圧の差圧によつて可動
電極gが変位し、固定電極fとのギヤツプが変化
し、このギヤツプ変化による静電容量変化を検知
信号として導出し、増幅器kで増幅して外部に伝
達する。 Therefore, the process pressure acting on both pressure chambers h, h flows through the diaphragms i, i to the sealing liquid j, j
and acts on the movable electrode g in the detection chamber c. Then, the movable electrode g is displaced by the differential pressure between both process pressures, and the gap with the fixed electrode f changes, and the capacitance change due to this gap change is derived as a detection signal, amplified by an amplifier k, and externally to communicate.
この差圧伝送器においては、圧力センサをプラ
イマリ部aに一体形成しているため、測定範囲を
変更する場合(レンジ変更)、プライマリ部aを
全て交換しなければならず、変更を要しない部分
まで効果することにより、極めて不経済であつ
た。また、セカンダリ部bとの着脱作業も極めて
煩雑であつた。 In this differential pressure transmitter, the pressure sensor is integrally formed in the primary part a, so when changing the measurement range (range change), the entire primary part a must be replaced, and the parts that do not need to be changed This made it extremely uneconomical. Further, the work of attaching and detaching the secondary part b was extremely complicated.
また、プライマリ部aの一部に故障が生じる
と、セカンダリ部bも含めて全て交換しなければ
ならず、無駄が多く、作業も複雑であつた。 Further, if a failure occurs in a part of the primary part a, the entire part including the secondary part b must be replaced, resulting in a lot of waste and complicated work.
更にまた、プライマリ部aとセカンダリ部bと
をそれぞれケース等で構成しているので、形状が
大型化し、しかも、受圧面積の大きいダイヤフラ
ムiを設けているため、より形状が大型化ならざ
るを得なかつた。また、各ボデイd,フランジe
も大きくなるので、歪も生じ易く。シール液jも
多量となるので、温度変化の影響を受け易いとい
う問題があつた。 Furthermore, since the primary part a and the secondary part b are each made up of a case or the like, the shape becomes large, and since the diaphragm i with a large pressure-receiving area is provided, the shape has to become even larger. Nakatsuta. Also, each body d, flange e
Since the diameter also increases, distortion is likely to occur. Since the amount of sealing liquid j is also large, there is a problem that it is easily affected by temperature changes.
(ハ) 目的
この発明は、斯かる点に鑑み、近年の圧力セン
サ等の小型化及び過大な片圧作用が極めて少ない
という点に着目し、圧力センサや増幅器等をカセ
ツト化してボデイ内に着脱自在に収納することに
より、小型化を図ると共に、保守点検等を容易に
行えるようにした差圧伝送器を提供することを目
的とするものである。(c) Purpose In view of the above, this invention focuses on the miniaturization of pressure sensors in recent years and the fact that excessive single-pressure action is extremely rare, and the present invention has been developed by making a pressure sensor, an amplifier, etc. into a cassette and attaching and detaching it within the body. It is an object of the present invention to provide a differential pressure transmitter that can be housed freely to achieve miniaturization and to facilitate maintenance and inspection.
(ニ) 構成
この発明は、上記の目的を達成するために、ボ
デイに高圧側及び低圧側のプロセス圧導入部と電
源導入部とが形成されると共に、カセツト収納部
が形成され、この収納部を閉鎖する蓋体が前記ボ
デイに着脱自在に取付けられる一方、前記収納部
にカセツトが取り出し自在に収納され、このカセ
ツトに、圧力センサと、この圧力センサに接続さ
れ且つシール液が設けられた高圧側及び低圧側の
導圧管と、前記圧力センサに接続され且つ増幅器
等を備えた電気回路部とが収納され、前記高圧側
のプロセス圧導入部に高圧側の導圧管が、前記低
圧側のプロセス圧導入部に低圧側の導圧管が、前
記電源導入部に電気回路部がそれぞれ着脱自在に
設けられて構成されている。(D) Structure In order to achieve the above object, the present invention has a body formed with a process pressure introduction part and a power supply introduction part on a high pressure side and a low pressure side, and a cassette storage part. A lid body is detachably attached to the body, and a cassette is removably housed in the housing section, and the cassette includes a pressure sensor and a high pressure sensor connected to the pressure sensor and provided with sealing liquid. A pressure impulse pipe on the high pressure side and a low pressure side, and an electric circuit section connected to the pressure sensor and equipped with an amplifier, etc. are housed, and the pressure impulse pipe on the high pressure side is connected to the process pressure introduction part on the high pressure side, and the pressure impulse pipe on the high pressure side is connected to the process pressure introduction part on the high pressure side, A pressure guide pipe on the low pressure side is provided in the pressure introduction part, and an electric circuit part is provided in the power supply introduction part in a detachable manner.
(ホ) 実施例
以下、この発明の実施例を図面に基づいて詳細
に説明する。(e) Embodiments Examples of the present invention will be described in detail below with reference to the drawings.
〈実施例 1〉
この実施例は第2図及び第3図に示し、1は差
動伝送器であつて、各種プロセスにおいてプロセ
ス圧の差圧を検出して伝送するもので、ボデイ2
にカセツト3が着脱自在に収納されて構成されて
いる。<Example 1> This example is shown in Figs. 2 and 3, in which 1 is a differential transmitter, which detects and transmits the differential pressure of process pressure in various processes, and body 2
A cassette 3 is detachably housed in the cassette 3.
ボデイ2は、ほぼ箱型に形成されており、右側
にカセツト収納部2aが端面に開口して形成さ
れ、左側が厚肉部2bとなつている。そして、収
納部2aの開口を閉鎖する蓋体2cがボデイ2に
ボルト4によつて着脱自在に取付けられている。 The body 2 is formed into a substantially box shape, and has a cassette storage section 2a on the right side with an opening at the end surface, and a thick wall section 2b on the left side. A lid 2c for closing the opening of the storage portion 2a is detachably attached to the body 2 with bolts 4.
厚肉部2bには高圧側及び低圧側のプロセス圧
導入部5,6と電源導入部7とが形成されてい
る。この両プロセス圧導入部5,6は各種プロセ
スにおける高圧プロセス流体と低圧プロセス流体
とが流入するようになつており、上下方向に貫通
する主路5a,6aと、この主路5a,6aより
分岐して収納部2aに開口する副路5b,6bと
より構成されている。電源導入部7はカセツト3
に供給する電圧を導入すると同時にカセツト3か
らの各種検知信号を導出するようになつており、
上下方向の縦穴7aと、この縦穴7aより収納部
2aに開口する横穴7bとが形成され、リード線
等が設けられている。 Process pressure introduction parts 5 and 6 on the high-pressure side and low-pressure side and a power supply introduction part 7 are formed in the thick part 2b. Both process pressure introduction parts 5 and 6 are designed to receive high-pressure process fluids and low-pressure process fluids in various processes, and are divided into main passages 5a and 6a penetrating in the vertical direction, and branches from these main passages 5a and 6a. It is comprised of sub-paths 5b and 6b which open into the storage section 2a. The power introduction part 7 is connected to the cassette 3
At the same time as introducing the voltage to be supplied to the cassette 3, various detection signals are derived from the cassette 3.
A vertical hole 7a in the vertical direction and a horizontal hole 7b opening from the vertical hole 7a into the storage portion 2a are formed, and lead wires and the like are provided.
一方、前記カセツト3は、収納部2aに取り出
し自在に収納され、圧力センサ8と、2本の導圧
管9a,9bと電気回路部10とが収納されてい
る。圧力センサ8は、拡散型の圧力センサであつ
て、プロセス圧が両導圧管9a,9bを介して作
用すると、抵抗値が変化して、電気回路部10に
このプロセス圧に比例した電気信号を導出するよ
うになつている。 On the other hand, the cassette 3 is removably stored in the storage section 2a, and contains a pressure sensor 8, two pressure impulse tubes 9a and 9b, and an electric circuit section 10. The pressure sensor 8 is a diffusion type pressure sensor, and when a process pressure acts through both pressure impulse pipes 9a and 9b, the resistance value changes and an electric signal proportional to the process pressure is sent to the electric circuit section 10. It is beginning to be derived.
2本の導圧管9a,9bは、それぞれ一端が圧
力センサ8に接続され、他端がカセツト側面に開
口しており、この開口端がプロセス圧導入部5,
6の副路5b,6bに着脱自在に接続されるよう
に構成されている。つまり、ボデイ2の厚肉部2
bと、カセツト3は、別体に構成されており、厚
肉部2bの副路5b,6bと、カセツト3の導圧
管9a,9bはあらかじめ完全に一致するように
位置決めされており、カセツト3をボデイ2のカ
セツト収納部2aに差し込み、蓋体2cで蓋を
し、ボルト4で締めると、副路5b,6bの口と
導圧管9a,9bの口が完全に一致するようにな
つている。そして、両導圧管9a,9bは上下に
蛇行してシール液11が設けられ、高圧と低圧の
プロセス圧を圧力センサ8に導いている。 One end of each of the two pressure impulse pipes 9a and 9b is connected to the pressure sensor 8, and the other end is opened to the side surface of the cassette, and this open end is connected to the process pressure introduction part 5,
It is configured to be detachably connected to the sub-paths 5b and 6b of No.6. In other words, the thick part 2 of the body 2
b and the cassette 3 are constructed separately, and the secondary passages 5b and 6b of the thick walled portion 2b and the pressure impulse pipes 9a and 9b of the cassette 3 are positioned in advance so as to completely coincide with each other, and the cassette 3 is inserted into the cassette storage part 2a of the body 2, covered with the lid body 2c, and tightened with the bolt 4, so that the openings of the secondary channels 5b and 6b and the openings of the impulse tubes 9a and 9b are completely aligned. . Both pressure impulse pipes 9a and 9b meander up and down and are provided with a sealing liquid 11 to guide high and low process pressures to the pressure sensor 8.
電気回路部10は、増幅器10aを備えてお
り、この増幅器10aが圧力センサ8にリード線
10bを介して接続されると共に、カセツト3の
側面に取付けられたコネクタ12にリード線10
cを介して接続されている。そして、このコネク
タ12が電源導入部7の横穴7bに着脱自在に接
続されるように構成され、電源導入部7からの電
圧を増幅器10aに導くと共に、増幅器10aは
圧力センサ8の検出信号を受けて増幅し、電源導
入部7を介して外部に導出するようになつてい
る。 The electric circuit section 10 includes an amplifier 10a, which is connected to the pressure sensor 8 via a lead wire 10b, and which is connected to a connector 12 attached to the side surface of the cassette 3.
connected via c. This connector 12 is configured to be detachably connected to the side hole 7b of the power supply introduction part 7, and leads the voltage from the power supply introduction part 7 to the amplifier 10a, and the amplifier 10a receives the detection signal of the pressure sensor 8. The signal is then amplified and output to the outside via the power supply introduction section 7.
尚、13は各プロセス圧導入部5,6に取付け
られたエア抜きである。 Note that 13 is an air vent attached to each process pressure introduction section 5, 6.
次に、差圧検出動作について説明する。 Next, the differential pressure detection operation will be explained.
先ず、カセツト3をボデイ2に取付けた状態に
おいては、各プロセス圧導入部5,6と導圧管9
a,9bが、電源導入部7と電気回路部10とが
それぞれ接続されており、各プロセス圧導入部
5,6に高圧及び低圧のプロセス流体を導くと、
このプロセス流体は直接シール液11に接し、各
プロセス圧が各導圧管9a,9bのシール液11
を介して圧力センサ8に作用する。 First, when the cassette 3 is attached to the body 2, each process pressure introducing section 5, 6 and the pressure guiding pipe 9 are connected to each other.
a, 9b are respectively connected to the power introduction part 7 and the electric circuit part 10, and when high pressure and low pressure process fluids are introduced to each process pressure introduction part 5, 6,
This process fluid is in direct contact with the sealing liquid 11, and each process pressure is applied to the sealing liquid 11 of each impulse pipe 9a, 9b.
It acts on the pressure sensor 8 via.
そして、この圧力センサ8において、高圧と低
圧のプロセス圧の差圧に伴う電気抵抗値の変化を
検出し、この検出信号を増幅器10aで増幅した
後、外部に導出し、伝送する。 The pressure sensor 8 detects a change in electrical resistance due to the pressure difference between the high and low process pressures, and after amplifying this detection signal with an amplifier 10a, it is output and transmitted to the outside.
次に、差圧の測定範囲を変更する場合(レンジ
変更)、導圧管9a,9b等の故障時の場合など
においては蓋体2cをボデイ2より取外し、カセ
ツト3のみを取り出して交換する。なお、カセツ
ト3の交換時に、カセツト3をボデイ2の厚肉部
2bより取り外しても、導圧管9a,9bより、
シール液11がこぼれることはない。これは、製
造過程で、導圧管9a,9bを真空に引き、シー
ル液を封入するため、カセツト3の取り外し時
に、導圧管9a,9bの開口部が大気圧に押され
るのと、導圧管9a,9bが細管であるためシー
ル液11が外部に出てこないためである。このカ
セツト3は工場等で生産調整されており、上記交
換を簡易に行えるようになつている。 Next, when changing the measurement range of the differential pressure (range change) or when the impulse tubes 9a, 9b, etc. are out of order, the lid 2c is removed from the body 2, and only the cassette 3 is taken out and replaced. Note that even if the cassette 3 is removed from the thick wall portion 2b of the body 2 when replacing the cassette 3, the
The sealing liquid 11 will not spill. This is because during the manufacturing process, the impulse tubes 9a and 9b are evacuated and sealed with sealing liquid, so when the cassette 3 is removed, the openings of the impulse tubes 9a and 9b are pushed by atmospheric pressure, and the , 9b are thin tubes, so the sealing liquid 11 does not come out. The production of the cassette 3 is adjusted at a factory or the like, so that the above-mentioned replacement can be easily performed.
また、シール液11によりプロセス流体が圧力
センサ8に直接流入しないので、圧力センサ8は
プロセス液に腐食されることはない。 Further, since the process fluid does not directly flow into the pressure sensor 8 due to the sealing liquid 11, the pressure sensor 8 is not corroded by the process liquid.
〈実施例 2〉
この実施例は、第4図及び第5図に示すよう
に、両導圧管9a,9bが片圧防止手段14によ
つて互に接続されて構成されている。<Embodiment 2> In this embodiment, as shown in FIGS. 4 and 5, both impulse pipes 9a and 9b are connected to each other by a one-sided pressure prevention means 14.
この片圧防止手段14は、図示しないが、ケー
ス内に薄膜等が設けられて成り、高圧と低圧のプ
ロセス圧がこの薄膜等を介して互いに作用してお
り、差圧が所定以上に大きくなると、この薄膜等
が破損し、高圧が低圧側へ逃げて圧力センサ8に
過大な圧力が作用しないようになつている。 Although not shown, this one-sided pressure prevention means 14 is made up of a thin film or the like provided inside the case, and high and low process pressures act on each other via this thin film, etc., and when the differential pressure becomes larger than a predetermined value, When this thin film or the like is damaged, high pressure escapes to the low pressure side, so that excessive pressure does not act on the pressure sensor 8.
その他の構成・作用は実施例1と同様である。 The other configurations and operations are the same as in the first embodiment.
尚、各実施例における圧力センサ8及び電気回
路部10はこの実施例に限定されるものではな
い。 Note that the pressure sensor 8 and electric circuit section 10 in each embodiment are not limited to this embodiment.
また、導圧管9a,9bの蛇行形状も実施例に
限定されない。 Further, the meandering shape of the pressure impulse pipes 9a, 9b is not limited to the embodiment.
(ヘ) 効果
以上のようにこの発明によれば、従来のように
受圧面積の大きいダイヤフラムを設けていないの
で、全体形状を小さくでき、構造を簡易にかつ小
型化を図ることができる。(F) Effects As described above, according to the present invention, since a diaphragm with a large pressure-receiving area is not provided as in the conventional case, the overall shape can be reduced, and the structure can be simplified and miniaturized.
更に、ダイヤフラムの取付フランジ等を省略で
き、且つシール液等も少なくすることができるの
で、機器形状を極めて小さくすることができる。 Furthermore, the mounting flange of the diaphragm, etc. can be omitted, and the amount of sealing liquid etc. can also be reduced, so the shape of the device can be made extremely small.
また、測定範囲の変更時に交換を要する部品や
故障し易い部品はカセツトに収納しているので、
交換が容易であり、且つカセツトのみのワンタツ
チ作業で迅速に行うことができる。 In addition, parts that need to be replaced when changing the measurement range or parts that are prone to failure are stored in cassettes.
Replacement is easy and can be done quickly with a one-touch operation using only the cassette.
また、測定範囲とは無関係にボデイ形状を一定
にすることができるので、ボデイの汎用性が向上
する。 Furthermore, since the body shape can be made constant regardless of the measurement range, the versatility of the body is improved.
また、ボデイ等を小型にできるので、歪が少な
く、その上、シール液が少量にできるから、温度
変化の影響を受け難く、測定精度が向上する。 Furthermore, since the body etc. can be made smaller, there is less distortion, and since a smaller amount of sealing liquid can be used, it is less susceptible to temperature changes and measurement accuracy is improved.
第1図は従来の差圧伝送器の縦断面図、第2図
及び第3図はこの発明の実施例1を示し、第2図
は差圧伝送器の断面平面図、第3図は同断面側面
図、第4図及び第5図はこの発明の実施例2を示
し、第4図はカセツトの概略平面図、第5図は同
概略側面図である。
1……差圧伝送器、2……ボデイ、2a……カ
セツト収納部、2b……厚肉部、2c……蓋体、
3……カセツト、4……ボルト、5,6……プロ
セス圧導入部、5a,6a……主路、5b,6b
……副路、7……電源導入部、7a……縦穴、7
b……横穴、8……圧力センサ、9a,9b……
導圧管、10……電気回路部、10a……増幅
器、11……シール液、12……コネクタ、14
……片圧防止手段。
FIG. 1 is a vertical sectional view of a conventional differential pressure transmitter, FIGS. 2 and 3 show a first embodiment of the present invention, FIG. 2 is a sectional plan view of the differential pressure transmitter, and FIG. 3 is the same. The sectional side view, FIGS. 4 and 5 show a second embodiment of the present invention, FIG. 4 is a schematic plan view of the cassette, and FIG. 5 is a schematic side view thereof. DESCRIPTION OF SYMBOLS 1...Differential pressure transmitter, 2...Body, 2a...Cassette storage part, 2b...Thick wall part, 2c...Lid body,
3...Cassette, 4...Bolt, 5, 6...Process pressure introduction part, 5a, 6a...Main path, 5b, 6b
...Subway, 7...Power introduction part, 7a...Vertical hole, 7
b...Side hole, 8...Pressure sensor, 9a, 9b...
Impulse tube, 10...Electric circuit section, 10a...Amplifier, 11...Sealing liquid, 12...Connector, 14
...Unilateral pressure prevention means.
Claims (1)
部と電源導入部とが形成されると共に、カセツト
収納部が形成され、この収納部を閉鎖する蓋体が
前記ボデイに着脱自在に取付けられる一方、前記
収納部にカセツトが取り出し自在に収納され、こ
のカセツトに、圧力センサと、この圧力センサに
接続され且つシール液が設けられた高圧側及び低
圧側の導圧管と、前記圧力センサに接続され且つ
増幅器等を備えた電気回路部とが収納され、前記
高圧側のプロセス圧導入部に高圧側の導圧管が、
前記低圧側のプロセス圧導入部に低圧側の導圧管
が、前記電源導入部に電気回路部がそれぞれ着脱
自在に設けられていることを特徴とする差圧伝送
器。 2 前記両導圧管は、片圧防止手段によつて接続
されていることを特徴とする特許請求の範囲第1
項記載の差圧伝送器。[Scope of Claims] 1 A body is formed with a process pressure introduction part on a high pressure side and a low pressure side, and a power supply introduction part, and a cassette storage part is formed, and a lid body for closing this storage part is attached to and detached from the body. A cassette is removably stored in the storage part, and the cassette includes a pressure sensor, high-pressure side and low-pressure side impulse pipes connected to the pressure sensor and provided with sealing liquid, and the above-mentioned cassette. An electric circuit unit connected to the pressure sensor and equipped with an amplifier, etc. is housed, and a high-pressure side pressure impulse pipe is connected to the high-pressure side process pressure introduction part,
A differential pressure transmitter, characterized in that a low-pressure side pressure guiding pipe is removably provided in the low-pressure side process pressure introduction part, and an electric circuit part is provided in the power supply introduction part. 2. Claim 1, characterized in that both the impulse pipes are connected by means for preventing one-sided pressure.
Differential pressure transmitter described in section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5588783A JPS59180339A (en) | 1983-03-30 | 1983-03-30 | Differential pressure transmitter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5588783A JPS59180339A (en) | 1983-03-30 | 1983-03-30 | Differential pressure transmitter |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59180339A JPS59180339A (en) | 1984-10-13 |
JPH0579931B2 true JPH0579931B2 (en) | 1993-11-05 |
Family
ID=13011611
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5588783A Granted JPS59180339A (en) | 1983-03-30 | 1983-03-30 | Differential pressure transmitter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59180339A (en) |
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JPS57160038A (en) * | 1981-03-30 | 1982-10-02 | Hitachi Ltd | Semiconductor pressure sensor |
JPS5838442B2 (en) * | 1972-08-16 | 1983-08-23 | インペリアル ケミカル インダストリ−ズ ピ−エルシ− | Method for producing vinyl chloride paste-forming polymer |
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---|---|---|---|---|
JPS5838442U (en) * | 1981-09-09 | 1983-03-12 | 株式会社小森コーポレーション | Rotary printing press detector |
-
1983
- 1983-03-30 JP JP5588783A patent/JPS59180339A/en active Granted
Patent Citations (3)
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---|---|---|---|---|
JPS5838442B2 (en) * | 1972-08-16 | 1983-08-23 | インペリアル ケミカル インダストリ−ズ ピ−エルシ− | Method for producing vinyl chloride paste-forming polymer |
JPS55104042A (en) * | 1979-01-31 | 1980-08-09 | Matsushita Electric Works Ltd | Circuit breaker |
JPS57160038A (en) * | 1981-03-30 | 1982-10-02 | Hitachi Ltd | Semiconductor pressure sensor |
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Also Published As
Publication number | Publication date |
---|---|
JPS59180339A (en) | 1984-10-13 |
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