JPS5774649A - Inspecting method for insulating layer - Google Patents

Inspecting method for insulating layer

Info

Publication number
JPS5774649A
JPS5774649A JP15125580A JP15125580A JPS5774649A JP S5774649 A JPS5774649 A JP S5774649A JP 15125580 A JP15125580 A JP 15125580A JP 15125580 A JP15125580 A JP 15125580A JP S5774649 A JPS5774649 A JP S5774649A
Authority
JP
Japan
Prior art keywords
insulating layer
aluminum
electrode
color
oxidized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15125580A
Other languages
English (en)
Japanese (ja)
Other versions
JPS632342B2 (de
Inventor
Tomoyuki Tsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15125580A priority Critical patent/JPS5774649A/ja
Publication of JPS5774649A publication Critical patent/JPS5774649A/ja
Publication of JPS632342B2 publication Critical patent/JPS632342B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15125580A 1980-10-28 1980-10-28 Inspecting method for insulating layer Granted JPS5774649A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15125580A JPS5774649A (en) 1980-10-28 1980-10-28 Inspecting method for insulating layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15125580A JPS5774649A (en) 1980-10-28 1980-10-28 Inspecting method for insulating layer

Publications (2)

Publication Number Publication Date
JPS5774649A true JPS5774649A (en) 1982-05-10
JPS632342B2 JPS632342B2 (de) 1988-01-18

Family

ID=15514659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15125580A Granted JPS5774649A (en) 1980-10-28 1980-10-28 Inspecting method for insulating layer

Country Status (1)

Country Link
JP (1) JPS5774649A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103822948A (zh) * 2014-03-06 2014-05-28 上海华虹宏力半导体制造有限公司 半导体器件的测试方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0232614U (de) * 1988-08-24 1990-02-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103822948A (zh) * 2014-03-06 2014-05-28 上海华虹宏力半导体制造有限公司 半导体器件的测试方法

Also Published As

Publication number Publication date
JPS632342B2 (de) 1988-01-18

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