JPS644041A - Discrimination of quality of semiconductor device - Google Patents

Abstract

PURPOSE:To prevent a good product from being influenced badly by dust particles, cracks or stains by a method wherein a coded character of symbol is marked on an identical wafer in accordance with an arrangement of a semiconductor device to become a good product and another semiconductor device to be a defective product on the wafer. CONSTITUTION:Two or more semiconductor devices 2 are formed on an upper face of a wafer 1; during an electrical characteristic test a good product P and a defective product F of the individual semiconductor devices 2 are discriminated. Then, a prescribed coding operation is executed in accordance with an arrangement of the good product P and the defective product F for each row which is parallel with an orientation flat of the wafer 1. That is to say, if the arrangement in a first row is 'F, P, F, P', this arrangement is coded as A; if the arrangement in a second row is 'F, F, P, P, P, F', this arrangement is coded as X; if the arrangement in a third row is 'F, P, P, P, P, F', this arrangement is coded as B; in this manner, each row is coded. An indication 3 of each row of coded characters and symbols is marked by using a laser marker in a part outside a region where the semiconductor devices are formed at the upper part of the orientation flat of the wafer.