JPS5772052A - Measuring method for heat transmission factor of thin film - Google Patents

Measuring method for heat transmission factor of thin film

Info

Publication number
JPS5772052A
JPS5772052A JP14820980A JP14820980A JPS5772052A JP S5772052 A JPS5772052 A JP S5772052A JP 14820980 A JP14820980 A JP 14820980A JP 14820980 A JP14820980 A JP 14820980A JP S5772052 A JPS5772052 A JP S5772052A
Authority
JP
Japan
Prior art keywords
thin film
heat transmission
film
laser light
transmission factor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14820980A
Other languages
Japanese (ja)
Other versions
JPS637618B2 (en
Inventor
Susumu Fujimori
Koji Takei
Sakae Maebotoke
Kazutoshi Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP14820980A priority Critical patent/JPS5772052A/en
Publication of JPS5772052A publication Critical patent/JPS5772052A/en
Publication of JPS637618B2 publication Critical patent/JPS637618B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity

Abstract

PURPOSE:To reliably measure a heat transmission factor of a thin film element on a substrate, by a method wherein a known material, being low in a melting point and absorbing a laser light, is formed in a filmy manner on a surface of an object to be measured, and the work is irradiated with a pulse laser light. CONSTITUTION:In an optimum design of an integrated circuit element and other film electronic element and a design of a radiating heat transmission object, a film 3 of a known material, e.g., Sn, Pb, being low in a melting point and absorbing a pulse laser light, is formed in about 500Angstrom thickness on a thin film 2 to be measured on a substrate 1 by a vacuum evaporation method. The heat transmission factor of the thin film 2 is found by computing it by a given heat diffusion equation from an energy value obtained until the film 3 is molten for the deformation through the irradiation with a pulse laser light 4 from the location above the film 3. This causes to perform a reliable measurement of the heat transmission factor of the thin film 2, being in the thickness of 1mu or less, with a minimum of the influence affected by the substrate.
JP14820980A 1980-10-24 1980-10-24 Measuring method for heat transmission factor of thin film Granted JPS5772052A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14820980A JPS5772052A (en) 1980-10-24 1980-10-24 Measuring method for heat transmission factor of thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14820980A JPS5772052A (en) 1980-10-24 1980-10-24 Measuring method for heat transmission factor of thin film

Publications (2)

Publication Number Publication Date
JPS5772052A true JPS5772052A (en) 1982-05-06
JPS637618B2 JPS637618B2 (en) 1988-02-17

Family

ID=15447700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14820980A Granted JPS5772052A (en) 1980-10-24 1980-10-24 Measuring method for heat transmission factor of thin film

Country Status (1)

Country Link
JP (1) JPS5772052A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59210352A (en) * 1983-05-16 1984-11-29 Nippon Telegr & Teleph Corp <Ntt> Method and device for measuring thermal conductivity
JPS6110752A (en) * 1984-06-26 1986-01-18 Ichiro Hatta Measurement for diffusitivity of heat by intermittent heating
US4668114A (en) * 1985-03-08 1987-05-26 Brother Kogyo Kabushiki Kaisha Printer with a device for preventing print head from interfering with temporary binder portions of multiple-sheet recording medium

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5060271A (en) * 1973-09-26 1975-05-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5060271A (en) * 1973-09-26 1975-05-24

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59210352A (en) * 1983-05-16 1984-11-29 Nippon Telegr & Teleph Corp <Ntt> Method and device for measuring thermal conductivity
JPH0333221B2 (en) * 1983-05-16 1991-05-16 Nippon Telegraph & Telephone
JPS6110752A (en) * 1984-06-26 1986-01-18 Ichiro Hatta Measurement for diffusitivity of heat by intermittent heating
JPH0479535B2 (en) * 1984-06-26 1992-12-16 Ichiro Hatsuta
US4668114A (en) * 1985-03-08 1987-05-26 Brother Kogyo Kabushiki Kaisha Printer with a device for preventing print head from interfering with temporary binder portions of multiple-sheet recording medium

Also Published As

Publication number Publication date
JPS637618B2 (en) 1988-02-17

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