JPS56111481A - Measuring device for electron beam diameter - Google Patents

Measuring device for electron beam diameter

Info

Publication number
JPS56111481A
JPS56111481A JP642980A JP642980A JPS56111481A JP S56111481 A JPS56111481 A JP S56111481A JP 642980 A JP642980 A JP 642980A JP 642980 A JP642980 A JP 642980A JP S56111481 A JPS56111481 A JP S56111481A
Authority
JP
Japan
Prior art keywords
electron beam
reflection coefficient
beam diameter
beryllium
constitution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP642980A
Other languages
Japanese (ja)
Inventor
Katsuhiro Kawabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP642980A priority Critical patent/JPS56111481A/en
Publication of JPS56111481A publication Critical patent/JPS56111481A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To enable to measure an electron beam diameter in safety and with high precision and excellent reproducibility by coating a beryllium substrate having a low electron beam reflection coefficient and by laminating a part of a thin aluminum layer with a heavy metal. CONSTITUTION:Circular beryllium substrate 1 low in electron beam reflection coefficient is coated with thin aluminum layer 2 having the same reflection coefficient. On part of this layer 2, heavy metal 52 high in electron beam reflection coefficient providing knife-edge action upon a moving electron beam in a measurement is laminated. In this constitution, beryllium which is a harmful substance is controlled in safety and the measurement is made posible for the electron beam diameter with high precision caused by a great difference in reflection coefficient and with excellent reproducibility by a knife edge having no flank change.
JP642980A 1980-01-23 1980-01-23 Measuring device for electron beam diameter Pending JPS56111481A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP642980A JPS56111481A (en) 1980-01-23 1980-01-23 Measuring device for electron beam diameter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP642980A JPS56111481A (en) 1980-01-23 1980-01-23 Measuring device for electron beam diameter

Publications (1)

Publication Number Publication Date
JPS56111481A true JPS56111481A (en) 1981-09-03

Family

ID=11638141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP642980A Pending JPS56111481A (en) 1980-01-23 1980-01-23 Measuring device for electron beam diameter

Country Status (1)

Country Link
JP (1) JPS56111481A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821581A (en) * 1981-07-31 1983-02-08 Toshiba Corp Measurement of electron beam diameter
CN104267426A (en) * 2014-09-04 2015-01-07 北京大学 Electronic beam spot measuring method and device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821581A (en) * 1981-07-31 1983-02-08 Toshiba Corp Measurement of electron beam diameter
CN104267426A (en) * 2014-09-04 2015-01-07 北京大学 Electronic beam spot measuring method and device

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