JPS52154688A - Detection of faults on surface of metal plate moving at high speed - Google Patents
Detection of faults on surface of metal plate moving at high speedInfo
- Publication number
- JPS52154688A JPS52154688A JP7101576A JP7101576A JPS52154688A JP S52154688 A JPS52154688 A JP S52154688A JP 7101576 A JP7101576 A JP 7101576A JP 7101576 A JP7101576 A JP 7101576A JP S52154688 A JPS52154688 A JP S52154688A
- Authority
- JP
- Japan
- Prior art keywords
- high speed
- faults
- detection
- metal plate
- plate moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE:To detect surface faults at high speed and with high precision by minimizing the scan pitch with the use of plural sets of laser beams varying in wave length and polarization characteristic.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7101576A JPS52154688A (en) | 1976-06-18 | 1976-06-18 | Detection of faults on surface of metal plate moving at high speed |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7101576A JPS52154688A (en) | 1976-06-18 | 1976-06-18 | Detection of faults on surface of metal plate moving at high speed |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52154688A true JPS52154688A (en) | 1977-12-22 |
Family
ID=13448249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7101576A Pending JPS52154688A (en) | 1976-06-18 | 1976-06-18 | Detection of faults on surface of metal plate moving at high speed |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52154688A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55149829A (en) * | 1979-05-11 | 1980-11-21 | Hitachi Ltd | Detector for foreign matter in wafer |
JPS5684535A (en) * | 1979-12-14 | 1981-07-09 | Hitachi Ltd | Automatic detecting device for alien substance |
JPS6475946A (en) * | 1987-09-18 | 1989-03-22 | Fuji Photo Film Co Ltd | Surface inspecting apparatus |
JP2010218926A (en) * | 2009-03-17 | 2010-09-30 | Jst Mfg Co Ltd | Electric connector with caulking shell, and shield cable harness |
-
1976
- 1976-06-18 JP JP7101576A patent/JPS52154688A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55149829A (en) * | 1979-05-11 | 1980-11-21 | Hitachi Ltd | Detector for foreign matter in wafer |
JPH0159522B2 (en) * | 1979-05-11 | 1989-12-18 | Hitachi Ltd | |
JPS5684535A (en) * | 1979-12-14 | 1981-07-09 | Hitachi Ltd | Automatic detecting device for alien substance |
JPS6475946A (en) * | 1987-09-18 | 1989-03-22 | Fuji Photo Film Co Ltd | Surface inspecting apparatus |
JP2010218926A (en) * | 2009-03-17 | 2010-09-30 | Jst Mfg Co Ltd | Electric connector with caulking shell, and shield cable harness |
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