JPS6475946A - Surface inspecting apparatus - Google Patents
Surface inspecting apparatusInfo
- Publication number
- JPS6475946A JPS6475946A JP23379487A JP23379487A JPS6475946A JP S6475946 A JPS6475946 A JP S6475946A JP 23379487 A JP23379487 A JP 23379487A JP 23379487 A JP23379487 A JP 23379487A JP S6475946 A JPS6475946 A JP S6475946A
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- oscillator
- wavelengths
- scanner
- receiver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE:To certainly inspect a surface to be inspected without receiving the effect of the color or light interference of the flaw part of the surface to be inspected, by using an oscillator oscillated by two or more different wavelengths as a laser oscillator. CONSTITUTION:A scanner part 1, an object to be inspected and a receiver 3 are provided to the title apparatus and an argon ion laser oscillator 7 oscillated simultaneously by a plurality of wavelengths multimode oscillation is provided to the scanner part 1. The beam 11 containing a plurality of wavelengths from the oscillator 7 is throttled by a lens 12a to become laser beam 11a which is, in turn, incident to a rotary polyhedral mirror 8 to become scanner beam 5 on the back surface side of the object 2 to be inspected. When a flaw part 4 comes to a locus 5a, the beam 5 is absorbed and reflected and, therefore, the receiving quantity of beam of the receiver 3 changes and this change is inputted to a signal processing apparatus 13 as the change of an electric signal to be printed out through a printer 14.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23379487A JPS6475946A (en) | 1987-09-18 | 1987-09-18 | Surface inspecting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23379487A JPS6475946A (en) | 1987-09-18 | 1987-09-18 | Surface inspecting apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6475946A true JPS6475946A (en) | 1989-03-22 |
Family
ID=16960673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23379487A Pending JPS6475946A (en) | 1987-09-18 | 1987-09-18 | Surface inspecting apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6475946A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007205873A (en) * | 2006-02-01 | 2007-08-16 | Dainippon Printing Co Ltd | Apparatus for inspecting irregularity in coating film formation |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5099387A (en) * | 1973-12-28 | 1975-08-07 | ||
| JPS52154688A (en) * | 1976-06-18 | 1977-12-22 | Nippon Steel Corp | Detection of faults on surface of metal plate moving at high speed |
-
1987
- 1987-09-18 JP JP23379487A patent/JPS6475946A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5099387A (en) * | 1973-12-28 | 1975-08-07 | ||
| JPS52154688A (en) * | 1976-06-18 | 1977-12-22 | Nippon Steel Corp | Detection of faults on surface of metal plate moving at high speed |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007205873A (en) * | 2006-02-01 | 2007-08-16 | Dainippon Printing Co Ltd | Apparatus for inspecting irregularity in coating film formation |
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