GB2004375A - Measuring hardness of deposited films - Google Patents

Measuring hardness of deposited films

Info

Publication number
GB2004375A
GB2004375A GB7832449A GB7832449A GB2004375A GB 2004375 A GB2004375 A GB 2004375A GB 7832449 A GB7832449 A GB 7832449A GB 7832449 A GB7832449 A GB 7832449A GB 2004375 A GB2004375 A GB 2004375A
Authority
GB
United Kingdom
Prior art keywords
hardness
deposited films
substrates
measuring hardness
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB7832449A
Other versions
GB2004375B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WC Heraus GmbH and Co KG
Original Assignee
WC Heraus GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WC Heraus GmbH and Co KG filed Critical WC Heraus GmbH and Co KG
Publication of GB2004375A publication Critical patent/GB2004375A/en
Application granted granted Critical
Publication of GB2004375B publication Critical patent/GB2004375B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40—Investigating hardness or rebound hardness
    • G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Laminated Bodies (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

A method of measuring the Vickers, Knoop or Rockwell hardness of thin films deposited on substrates, wherein a thin film of the desired thickness is deposited on substrates of known hardness and preferably indicated, the actual measurement of hardness is then performed using a body which makes an indentation into the surface, and the known hardness of the substrates is then compared with the composite hardness measured.
GB7832449A 1977-08-05 1978-08-04 Method of measuring the hardness of thin films Expired GB2004375B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19772735340 DE2735340C2 (en) 1977-08-05 1977-08-05 Method for measuring the hardness (mixed hardness) of thin layers

Publications (2)

Publication Number Publication Date
GB2004375A true GB2004375A (en) 1979-03-28
GB2004375B GB2004375B (en) 1982-07-21

Family

ID=6015716

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7832449A Expired GB2004375B (en) 1977-08-05 1978-08-04 Method of measuring the hardness of thin films

Country Status (4)

Country Link
DE (1) DE2735340C2 (en)
FR (1) FR2399654A1 (en)
GB (1) GB2004375B (en)
NL (1) NL7808139A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001041133A1 (en) * 1999-12-02 2001-06-07 Storage Technology Corporation Protective film for minimization of shield and pole tip recession in thin film shielded read heads and write heads
RU2222801C1 (en) * 2002-11-05 2004-01-27 Быков Юрий Александрович Technique establishing hardness of coat
RU2284499C1 (en) * 2005-04-15 2006-09-27 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Method of determining rigidity of wedge-shaped tool

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2672197B2 (en) * 1991-04-24 1997-11-05 シャープ株式会社 Metal wiring film performance evaluation method
DE19502936C2 (en) * 1995-01-31 1998-04-09 Horst Toberer Hardness measuring method and device for determining the hardness of a test specimen
RU2229697C2 (en) * 2002-06-28 2004-05-27 Федеральное государственное унитарное предприятие Комбинат "Электрохимприбор" Technique establishing stamping capability of molybdenum sheets without surface rupture

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE448600C (en) * 1925-05-26 1927-08-23 Hermann Steinrueck Device for testing the hardness of workpieces or the like.
GB1148114A (en) * 1965-12-02 1969-04-10 Uniroyal Inc Durometer
DE1904520A1 (en) * 1969-01-30 1970-08-06 Licentia Gmbh Determination of hardness of elastic - materials

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001041133A1 (en) * 1999-12-02 2001-06-07 Storage Technology Corporation Protective film for minimization of shield and pole tip recession in thin film shielded read heads and write heads
US6788497B1 (en) 1999-12-02 2004-09-07 Storage Technology Corporation Protective film for minimization of shield and pole tip recession in thin film shielded read heads and write heads
RU2222801C1 (en) * 2002-11-05 2004-01-27 Быков Юрий Александрович Technique establishing hardness of coat
RU2284499C1 (en) * 2005-04-15 2006-09-27 Государственное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Method of determining rigidity of wedge-shaped tool

Also Published As

Publication number Publication date
FR2399654A1 (en) 1979-03-02
GB2004375B (en) 1982-07-21
DE2735340A1 (en) 1979-02-08
DE2735340C2 (en) 1982-06-03
NL7808139A (en) 1979-02-07

Similar Documents

Publication Publication Date Title
ATE143731T1 (en) DIAGNOSTIC DEVICE USING A METALLIC THIN FILM
DE3367460D1 (en) Evaluating the thickness of a layer or determining change in thermal characteristics with depth by thermal wave detection
DE69225117D1 (en) Apparatus for measuring the thickness of thin films
DE69017947D1 (en) Method and device for measuring the thickness of thin films.
GB2004375A (en) Measuring hardness of deposited films
DE68908920D1 (en) Apparatus for ellipsometric examination, method for the ellipsometric examination of a sample, use for measuring the change in thickness of thin layers.
IT7825024A0 (en) LEAKS ON TEST PIECES SUCH AS DRUMS PROCEDURE FOR THE DETECTION OF CONTAINERS OR SIMILAR AND RELATED DETECTION DEVICE
JPS538165A (en) Thickness measuring method of thin film material and thin film material thickness measuring apparatus
DE3170524D1 (en) Procedure and sample for determining the adhesion of the layers of a glass laminate in the pull shear test
DK143125C (en) DAASE OF THIN, COVERED METAL PLATE WITH A COVER AND A DRAW BODY FOR USE IN MANUFACTURING THIS
AT382963B (en) MEASUREMENT METHOD FOR DETERMINING THE THICKNESS OF THIN LAYERS
JPS5432183A (en) Dial plate for watch
SU746255A1 (en) Apparatus for shift testing of coating-and-support adhesion
JPS6488336A (en) Indentation hardness testing method
JPS54127877A (en) Preparation of thin film
Vedel et al. Hardness Measurement of Surface Layers
GB2257520B (en) Method and probe for measuring the thickness of a thin layer
DE68907119D1 (en) METHOD FOR MEASURING THE THICKNESS OF A FILM.
IT7969132A0 (en) PROCEDURE AND DEVICE FOR MEASURING THE DEPTH OF A SUPERFICIAL LAYER OF A METALLIC PIECE HAVING PHYSICAL CHARACTERISTICS DIFFERENT FROM THOSE OF THE REMAINING PART
SU653547A1 (en) Method of investigating adhesion properties of liquid coatings
JPS53115694A (en) Method for producing beta-alumina film
JPS53135274A (en) Vapour phase growth method
IL90372A0 (en) Method and apparatus for accurate coulometric measuring of the thickness and composition of a thin metal layer on a substrate
JPS52105887A (en) Measurement of adhesion strength of metal powders
Roget The Use of Acoustic Emission to Measure the Ductility of Hardened Surface Layers

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee