GB2257520B - Method and probe for measuring the thickness of a thin layer - Google Patents
Method and probe for measuring the thickness of a thin layerInfo
- Publication number
- GB2257520B GB2257520B GB9113639A GB9113639A GB2257520B GB 2257520 B GB2257520 B GB 2257520B GB 9113639 A GB9113639 A GB 9113639A GB 9113639 A GB9113639 A GB 9113639A GB 2257520 B GB2257520 B GB 2257520B
- Authority
- GB
- United Kingdom
- Prior art keywords
- probe
- measuring
- thickness
- thin layer
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
- G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9107720A FR2678061A1 (en) | 1991-06-25 | 1991-06-24 | Method and device for measuring thin films (layers) |
GB9113639A GB2257520B (en) | 1991-06-25 | 1991-06-25 | Method and probe for measuring the thickness of a thin layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9113639A GB2257520B (en) | 1991-06-25 | 1991-06-25 | Method and probe for measuring the thickness of a thin layer |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9113639D0 GB9113639D0 (en) | 1991-08-14 |
GB2257520A GB2257520A (en) | 1993-01-13 |
GB2257520B true GB2257520B (en) | 1995-05-10 |
Family
ID=10697246
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9113639A Expired - Lifetime GB2257520B (en) | 1991-06-25 | 1991-06-25 | Method and probe for measuring the thickness of a thin layer |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR2678061A1 (en) |
GB (1) | GB2257520B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2306009B (en) * | 1995-10-05 | 1999-06-16 | Elcometer Instr Ltd | A coating thickness measuring probe |
GB9605843D0 (en) * | 1996-03-20 | 1996-05-22 | Ormiston Peter T | A device for measuring the thickness of a coating |
DE19820546C1 (en) * | 1998-05-08 | 1999-11-04 | Bosch Gmbh Robert | Eliminating measurement errors when determining thickness of electrically conducting film applied to ferromagnetic body enables accurate measurement in presence of relatively large base material quality fluctuations |
DE10014348B4 (en) * | 2000-03-24 | 2009-03-12 | Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg | Device for nondestructive measurement of the thickness of thin layers |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3878457A (en) * | 1973-11-16 | 1975-04-15 | Wayne E Rodgers | Thin film thickness measuring apparatus using an unbalanced inductive bridge |
GB1410301A (en) * | 1973-09-12 | 1975-10-15 | Nix Steingroeve Elektro Physik | Electro-magnetic thickness gauge |
GB2145827A (en) * | 1983-08-31 | 1985-04-03 | Fischer Gmbh & Co Inst Fur Ele | An electromagnetic measuring probe |
GB2165648A (en) * | 1984-10-11 | 1986-04-16 | Fischer Gmbh & Co Inst Fur Ele | Electro-magnetic measuring probe |
WO1988001383A1 (en) * | 1986-08-12 | 1988-02-25 | Grumman Aerospace Corporation | Probe for composite analyzer tester |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3407352A (en) * | 1965-06-07 | 1968-10-22 | Western Electric Co | Method of and apparatus for monitoring the thickness of a non-conductive coating on a conductive base |
US3441840A (en) * | 1967-03-31 | 1969-04-29 | Martin Marietta Corp | Electronic thickness meter having direct readout of coating thickness |
DE2410047A1 (en) * | 1974-03-02 | 1975-09-11 | Nix Steingroeve Elektro Physik | ELECTROMAGNETIC THICKNESS GAUGE WITH SWITCHABLE MEASURING FREQUENCY |
DE3437253A1 (en) * | 1983-08-31 | 1986-04-17 | Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen | Electromagnetic measurement probe |
US4791367A (en) * | 1987-07-15 | 1988-12-13 | Impact Systems, Inc. | Contacting thickness gauge for moving sheet material |
-
1991
- 1991-06-24 FR FR9107720A patent/FR2678061A1/en active Granted
- 1991-06-25 GB GB9113639A patent/GB2257520B/en not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1410301A (en) * | 1973-09-12 | 1975-10-15 | Nix Steingroeve Elektro Physik | Electro-magnetic thickness gauge |
US3878457A (en) * | 1973-11-16 | 1975-04-15 | Wayne E Rodgers | Thin film thickness measuring apparatus using an unbalanced inductive bridge |
GB2145827A (en) * | 1983-08-31 | 1985-04-03 | Fischer Gmbh & Co Inst Fur Ele | An electromagnetic measuring probe |
GB2165648A (en) * | 1984-10-11 | 1986-04-16 | Fischer Gmbh & Co Inst Fur Ele | Electro-magnetic measuring probe |
WO1988001383A1 (en) * | 1986-08-12 | 1988-02-25 | Grumman Aerospace Corporation | Probe for composite analyzer tester |
Also Published As
Publication number | Publication date |
---|---|
FR2678061B1 (en) | 1997-02-07 |
FR2678061A1 (en) | 1992-12-24 |
GB2257520A (en) | 1993-01-13 |
GB9113639D0 (en) | 1991-08-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PE20 | Patent expired after termination of 20 years |
Expiry date: 20110624 |