GB2257520B - Method and probe for measuring the thickness of a thin layer - Google Patents

Method and probe for measuring the thickness of a thin layer

Info

Publication number
GB2257520B
GB2257520B GB9113639A GB9113639A GB2257520B GB 2257520 B GB2257520 B GB 2257520B GB 9113639 A GB9113639 A GB 9113639A GB 9113639 A GB9113639 A GB 9113639A GB 2257520 B GB2257520 B GB 2257520B
Authority
GB
United Kingdom
Prior art keywords
probe
measuring
thickness
thin layer
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB9113639A
Other versions
GB9113639D0 (en
GB2257520A (en
Inventor
Helmut Fischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Helmut Fischer GmbH and Co
Original Assignee
Helmut Fischer GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9107720A priority Critical patent/FR2678061A1/en
Application filed by Helmut Fischer GmbH and Co filed Critical Helmut Fischer GmbH and Co
Priority to GB9113639A priority patent/GB2257520B/en
Publication of GB9113639D0 publication Critical patent/GB9113639D0/en
Publication of GB2257520A publication Critical patent/GB2257520A/en
Application granted granted Critical
Publication of GB2257520B publication Critical patent/GB2257520B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
GB9113639A 1991-06-25 1991-06-25 Method and probe for measuring the thickness of a thin layer Expired - Lifetime GB2257520B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9107720A FR2678061A1 (en) 1991-06-25 1991-06-24 Method and device for measuring thin films (layers)
GB9113639A GB2257520B (en) 1991-06-25 1991-06-25 Method and probe for measuring the thickness of a thin layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9113639A GB2257520B (en) 1991-06-25 1991-06-25 Method and probe for measuring the thickness of a thin layer

Publications (3)

Publication Number Publication Date
GB9113639D0 GB9113639D0 (en) 1991-08-14
GB2257520A GB2257520A (en) 1993-01-13
GB2257520B true GB2257520B (en) 1995-05-10

Family

ID=10697246

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9113639A Expired - Lifetime GB2257520B (en) 1991-06-25 1991-06-25 Method and probe for measuring the thickness of a thin layer

Country Status (2)

Country Link
FR (1) FR2678061A1 (en)
GB (1) GB2257520B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2306009B (en) * 1995-10-05 1999-06-16 Elcometer Instr Ltd A coating thickness measuring probe
GB9605843D0 (en) * 1996-03-20 1996-05-22 Ormiston Peter T A device for measuring the thickness of a coating
DE19820546C1 (en) * 1998-05-08 1999-11-04 Bosch Gmbh Robert Eliminating measurement errors when determining thickness of electrically conducting film applied to ferromagnetic body enables accurate measurement in presence of relatively large base material quality fluctuations
DE10014348B4 (en) * 2000-03-24 2009-03-12 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Device for nondestructive measurement of the thickness of thin layers

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3878457A (en) * 1973-11-16 1975-04-15 Wayne E Rodgers Thin film thickness measuring apparatus using an unbalanced inductive bridge
GB1410301A (en) * 1973-09-12 1975-10-15 Nix Steingroeve Elektro Physik Electro-magnetic thickness gauge
GB2145827A (en) * 1983-08-31 1985-04-03 Fischer Gmbh & Co Inst Fur Ele An electromagnetic measuring probe
GB2165648A (en) * 1984-10-11 1986-04-16 Fischer Gmbh & Co Inst Fur Ele Electro-magnetic measuring probe
WO1988001383A1 (en) * 1986-08-12 1988-02-25 Grumman Aerospace Corporation Probe for composite analyzer tester

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3407352A (en) * 1965-06-07 1968-10-22 Western Electric Co Method of and apparatus for monitoring the thickness of a non-conductive coating on a conductive base
US3441840A (en) * 1967-03-31 1969-04-29 Martin Marietta Corp Electronic thickness meter having direct readout of coating thickness
DE2410047A1 (en) * 1974-03-02 1975-09-11 Nix Steingroeve Elektro Physik ELECTROMAGNETIC THICKNESS GAUGE WITH SWITCHABLE MEASURING FREQUENCY
DE3437253A1 (en) * 1983-08-31 1986-04-17 Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen Electromagnetic measurement probe
US4791367A (en) * 1987-07-15 1988-12-13 Impact Systems, Inc. Contacting thickness gauge for moving sheet material

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1410301A (en) * 1973-09-12 1975-10-15 Nix Steingroeve Elektro Physik Electro-magnetic thickness gauge
US3878457A (en) * 1973-11-16 1975-04-15 Wayne E Rodgers Thin film thickness measuring apparatus using an unbalanced inductive bridge
GB2145827A (en) * 1983-08-31 1985-04-03 Fischer Gmbh & Co Inst Fur Ele An electromagnetic measuring probe
GB2165648A (en) * 1984-10-11 1986-04-16 Fischer Gmbh & Co Inst Fur Ele Electro-magnetic measuring probe
WO1988001383A1 (en) * 1986-08-12 1988-02-25 Grumman Aerospace Corporation Probe for composite analyzer tester

Also Published As

Publication number Publication date
GB9113639D0 (en) 1991-08-14
GB2257520A (en) 1993-01-13
FR2678061B1 (en) 1997-02-07
FR2678061A1 (en) 1992-12-24

Similar Documents

Publication Publication Date Title
GB2156526B (en) A method of and apparatus for measuring the thickness of a layer
IL104001A0 (en) Apparatus and method for measuring the thickness of thin films
EP0411359A3 (en) Device for measuring the thickness of thin layers
EP0408015A3 (en) Method of measuring thickness of film
IL107901A0 (en) Apparatus and method for measuring the thickness of thin films
EP0443322A3 (en) Method and apparatus for measuring the thickness of a coating
IL107549A0 (en) A device for measuring the thickness of thin films
EP0549166A3 (en) Method and apparatus for evaluating the thickness of thin films
ZA854523B (en) Method and apparatus for checking the wall thickness of a layer
NO931912D0 (en) PROCEDURE AND DEVICE FOR AA MEASURING THE THICKNESS OF A MATERIAL LAYER
HK1002047A1 (en) Method of and apparatus for determining the position of a transducer
DE3278860D1 (en) Method and device for checking or measuring the thickness of material layers
AU3826489A (en) Method of measuring a profile of an object and an apparatus for carrying out the method
AU7983591A (en) An apparatus and method for nondestructively determining the dimensional changes of an object as a function of temperature
DE3571692D1 (en) Method for the continuous and contactless measurement of film thickness as well as an arrangement for the realization of the method
EP0762079A3 (en) Method and apparatus for measuring the thickness of a film
GB2189882B (en) Apparatus for measuring the thickness of a surface layer
GB2162948B (en) A method of and apparatus for ultrasonically measuring the thickness of articles
EP0250764A3 (en) Film thickness measuring method and device therefor
GB2217859B (en) Apparatus and process for the non-contact measurement of the ohmic resistance of thin layers
GB8909485D0 (en) Apparatus for the non-destructive measurement of the ohmic resistance of thin layers
EP0348574A3 (en) Method of simultaneously measuring thickness and composition of film and apparatus therefor
GB2222886B (en) Method and device for measuring surface roughness
GB8902289D0 (en) Method and apparatus for determining the thickness of a coating on a metal substrate
GB9215819D0 (en) Thin layer thickness measuring apparatus

Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Expiry date: 20110624