AU6324094A - A method and apparatus for measuring the surface temperature of a semiconductor - Google Patents
A method and apparatus for measuring the surface temperature of a semiconductorInfo
- Publication number
- AU6324094A AU6324094A AU63240/94A AU6324094A AU6324094A AU 6324094 A AU6324094 A AU 6324094A AU 63240/94 A AU63240/94 A AU 63240/94A AU 6324094 A AU6324094 A AU 6324094A AU 6324094 A AU6324094 A AU 6324094A
- Authority
- AU
- Australia
- Prior art keywords
- semiconductor
- measuring
- surface temperature
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
- G01J5/0007—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/80—Calibration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J2005/0074—Radiation pyrometry, e.g. infrared or optical thermometry having separate detection of emissivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J2005/0077—Imaging
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2-247946 | 1990-09-18 | ||
JP2247946A JPH04125433A (en) | 1990-09-18 | 1990-09-18 | Method for measuring temperature by means of infrared rays |
JP2-401629 | 1990-12-12 | ||
JP2401629A JPH04214651A (en) | 1990-12-12 | 1990-12-12 | Temperature measuring method by means of infrared rays |
JP3000970A JPH04251952A (en) | 1991-01-09 | 1991-01-09 | Thermometry with infrared ray |
JP3-974 | 1991-01-09 | ||
JP3-970 | 1991-01-09 | ||
JP97491A JPH04251953A (en) | 1991-01-09 | 1991-01-09 | Thermometry with infrared ray |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU84543/91A Division AU650674B2 (en) | 1990-09-18 | 1991-09-18 | Method for measuring temperature based on infrared light and apparatus for measuring temperature based on infrared light |
Publications (2)
Publication Number | Publication Date |
---|---|
AU6324094A true AU6324094A (en) | 1994-07-21 |
AU665714B2 AU665714B2 (en) | 1996-01-11 |
Family
ID=27453292
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU84543/91A Ceased AU650674B2 (en) | 1990-09-18 | 1991-09-18 | Method for measuring temperature based on infrared light and apparatus for measuring temperature based on infrared light |
AU63240/94A Ceased AU665714B2 (en) | 1990-09-18 | 1994-05-23 | A method and apparatus for measuring the surface temperature of a semiconductor |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU84543/91A Ceased AU650674B2 (en) | 1990-09-18 | 1991-09-18 | Method for measuring temperature based on infrared light and apparatus for measuring temperature based on infrared light |
Country Status (4)
Country | Link |
---|---|
US (1) | US5165791A (en) |
EP (1) | EP0476611A3 (en) |
AU (2) | AU650674B2 (en) |
CA (1) | CA2051530A1 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4238084A1 (en) | 1991-11-15 | 1993-05-19 | Hewlett Packard Co | Analogue measurement value converter for real=time transformation into engineering unit - uses high value binary number bits to address stored coefficients, and lower value bits to perform correction using coefficients |
US5864776A (en) * | 1997-08-27 | 1999-01-26 | Mitsubishi Electric America, Inc. | Apparatus and method for detecting an error in the placement of a lead frame on a surface of a die mold |
IL134908A (en) * | 1999-03-08 | 2003-12-10 | C I Systems Ltd | Active pyrometry with emissivity extrapolation and compensation |
US20050276308A1 (en) * | 2004-06-10 | 2005-12-15 | Pint Charles S | Method and apparatus for measuring temperature and emissivity |
US7186978B2 (en) * | 2004-10-15 | 2007-03-06 | Millennium Enginerring And Integration Company | Compact emissivity and temperature measuring infrared detector |
US20070132898A1 (en) * | 2005-11-04 | 2007-06-14 | Union College | Light transmission based liquid crystal temperature sensor |
DE102012024418A1 (en) * | 2012-12-14 | 2014-06-18 | Sikora Ag | A method and apparatus for non-contact temperature determination of a moving article of unknown emissivity |
US10823618B2 (en) * | 2018-01-25 | 2020-11-03 | General Electric Company | Methods and systems for temperature measurement with machine learning algorithm |
JP7370763B2 (en) | 2019-08-22 | 2023-10-30 | 株式会社Screenホールディングス | Heat treatment method and heat treatment equipment |
CN111623879B (en) * | 2020-04-28 | 2022-03-25 | 北京遥感设备研究所 | Test method for refrigeration type infrared detector of infrared body temperature screening system |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE786649T1 (en) * | 1985-04-17 | 1998-05-14 | Thermoscan Inc | Electronic infrared thermometer and method for temperature measurement |
US4890245A (en) * | 1986-09-22 | 1989-12-26 | Nikon Corporation | Method for measuring temperature of semiconductor substrate and apparatus therefor |
US4881823A (en) * | 1988-03-29 | 1989-11-21 | Purdue Research Foundation | Radiation thermometry |
US4919542A (en) * | 1988-04-27 | 1990-04-24 | Ag Processing Technologies, Inc. | Emissivity correction apparatus and method |
KR960013995B1 (en) * | 1988-07-15 | 1996-10-11 | 도오교오 에레구토론 가부시끼가이샤 | Method for measuring surface temperature of semiconductor wafer substrate and heat-treating apparatus |
US4926364A (en) * | 1988-07-25 | 1990-05-15 | Westinghouse Electric Corp. | Method and apparatus for determining weighted average of process variable |
-
1991
- 1991-09-13 US US07/759,552 patent/US5165791A/en not_active Expired - Fee Related
- 1991-09-17 CA CA002051530A patent/CA2051530A1/en not_active Abandoned
- 1991-09-18 AU AU84543/91A patent/AU650674B2/en not_active Ceased
- 1991-09-18 EP EP19910115833 patent/EP0476611A3/en not_active Withdrawn
-
1994
- 1994-05-23 AU AU63240/94A patent/AU665714B2/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
AU665714B2 (en) | 1996-01-11 |
AU8454391A (en) | 1992-03-26 |
AU650674B2 (en) | 1994-06-30 |
EP0476611A2 (en) | 1992-03-25 |
CA2051530A1 (en) | 1992-03-19 |
US5165791A (en) | 1992-11-24 |
EP0476611A3 (en) | 1992-09-30 |
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