AU6324094A - A method and apparatus for measuring the surface temperature of a semiconductor - Google Patents

A method and apparatus for measuring the surface temperature of a semiconductor

Info

Publication number
AU6324094A
AU6324094A AU63240/94A AU6324094A AU6324094A AU 6324094 A AU6324094 A AU 6324094A AU 63240/94 A AU63240/94 A AU 63240/94A AU 6324094 A AU6324094 A AU 6324094A AU 6324094 A AU6324094 A AU 6324094A
Authority
AU
Australia
Prior art keywords
semiconductor
measuring
surface temperature
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU63240/94A
Other versions
AU665714B2 (en
Inventor
Atsushi Miki
Masanori Nishiguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2247946A external-priority patent/JPH04125433A/en
Priority claimed from JP2401629A external-priority patent/JPH04214651A/en
Priority claimed from JP3000970A external-priority patent/JPH04251952A/en
Priority claimed from JP97491A external-priority patent/JPH04251953A/en
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of AU6324094A publication Critical patent/AU6324094A/en
Application granted granted Critical
Publication of AU665714B2 publication Critical patent/AU665714B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G01J5/0007—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0074—Radiation pyrometry, e.g. infrared or optical thermometry having separate detection of emissivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0077—Imaging

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
AU63240/94A 1990-09-18 1994-05-23 A method and apparatus for measuring the surface temperature of a semiconductor Ceased AU665714B2 (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2-247946 1990-09-18
JP2247946A JPH04125433A (en) 1990-09-18 1990-09-18 Method for measuring temperature by means of infrared rays
JP2-401629 1990-12-12
JP2401629A JPH04214651A (en) 1990-12-12 1990-12-12 Temperature measuring method by means of infrared rays
JP3000970A JPH04251952A (en) 1991-01-09 1991-01-09 Thermometry with infrared ray
JP3-974 1991-01-09
JP3-970 1991-01-09
JP97491A JPH04251953A (en) 1991-01-09 1991-01-09 Thermometry with infrared ray

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
AU84543/91A Division AU650674B2 (en) 1990-09-18 1991-09-18 Method for measuring temperature based on infrared light and apparatus for measuring temperature based on infrared light

Publications (2)

Publication Number Publication Date
AU6324094A true AU6324094A (en) 1994-07-21
AU665714B2 AU665714B2 (en) 1996-01-11

Family

ID=27453292

Family Applications (2)

Application Number Title Priority Date Filing Date
AU84543/91A Ceased AU650674B2 (en) 1990-09-18 1991-09-18 Method for measuring temperature based on infrared light and apparatus for measuring temperature based on infrared light
AU63240/94A Ceased AU665714B2 (en) 1990-09-18 1994-05-23 A method and apparatus for measuring the surface temperature of a semiconductor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AU84543/91A Ceased AU650674B2 (en) 1990-09-18 1991-09-18 Method for measuring temperature based on infrared light and apparatus for measuring temperature based on infrared light

Country Status (4)

Country Link
US (1) US5165791A (en)
EP (1) EP0476611A3 (en)
AU (2) AU650674B2 (en)
CA (1) CA2051530A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4238084A1 (en) 1991-11-15 1993-05-19 Hewlett Packard Co Analogue measurement value converter for real=time transformation into engineering unit - uses high value binary number bits to address stored coefficients, and lower value bits to perform correction using coefficients
US5864776A (en) * 1997-08-27 1999-01-26 Mitsubishi Electric America, Inc. Apparatus and method for detecting an error in the placement of a lead frame on a surface of a die mold
IL134908A (en) * 1999-03-08 2003-12-10 C I Systems Ltd Active pyrometry with emissivity extrapolation and compensation
US20050276308A1 (en) * 2004-06-10 2005-12-15 Pint Charles S Method and apparatus for measuring temperature and emissivity
US7186978B2 (en) * 2004-10-15 2007-03-06 Millennium Enginerring And Integration Company Compact emissivity and temperature measuring infrared detector
US20070132898A1 (en) * 2005-11-04 2007-06-14 Union College Light transmission based liquid crystal temperature sensor
DE102012024418A1 (en) * 2012-12-14 2014-06-18 Sikora Ag A method and apparatus for non-contact temperature determination of a moving article of unknown emissivity
US10823618B2 (en) * 2018-01-25 2020-11-03 General Electric Company Methods and systems for temperature measurement with machine learning algorithm
JP7370763B2 (en) 2019-08-22 2023-10-30 株式会社Ｓｃｒｅｅｎホールディングス Heat treatment method and heat treatment equipment
CN111623879B (en) * 2020-04-28 2022-03-25 北京遥感设备研究所 Test method for refrigeration type infrared detector of infrared body temperature screening system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE786649T1 (en) * 1985-04-17 1998-05-14 Thermoscan Inc Electronic infrared thermometer and method for temperature measurement
US4890245A (en) * 1986-09-22 1989-12-26 Nikon Corporation Method for measuring temperature of semiconductor substrate and apparatus therefor
US4881823A (en) * 1988-03-29 1989-11-21 Purdue Research Foundation Radiation thermometry
US4919542A (en) * 1988-04-27 1990-04-24 Ag Processing Technologies, Inc. Emissivity correction apparatus and method
KR960013995B1 (en) * 1988-07-15 1996-10-11 도오교오 에레구토론 가부시끼가이샤 Method for measuring surface temperature of semiconductor wafer substrate and heat-treating apparatus
US4926364A (en) * 1988-07-25 1990-05-15 Westinghouse Electric Corp. Method and apparatus for determining weighted average of process variable

Also Published As

Publication number Publication date
AU665714B2 (en) 1996-01-11
AU8454391A (en) 1992-03-26
AU650674B2 (en) 1994-06-30
EP0476611A2 (en) 1992-03-25
CA2051530A1 (en) 1992-03-19
US5165791A (en) 1992-11-24
EP0476611A3 (en) 1992-09-30

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