FR2399654A1 - METHOD OF MEASURING THE HARDNESS OF THIN LAYERS - Google Patents

METHOD OF MEASURING THE HARDNESS OF THIN LAYERS

Info

Publication number
FR2399654A1
FR2399654A1 FR7823176A FR7823176A FR2399654A1 FR 2399654 A1 FR2399654 A1 FR 2399654A1 FR 7823176 A FR7823176 A FR 7823176A FR 7823176 A FR7823176 A FR 7823176A FR 2399654 A1 FR2399654 A1 FR 2399654A1
Authority
FR
France
Prior art keywords
hardness
measuring
thin layers
substrates
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7823176A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WC Heraus GmbH and Co KG
Original Assignee
WC Heraus GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WC Heraus GmbH and Co KG filed Critical WC Heraus GmbH and Co KG
Publication of FR2399654A1 publication Critical patent/FR2399654A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40—Investigating hardness or rebound hardness
    • G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Laminated Bodies (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

Procédé de mesure de la dureté Vickers, Knoop ou Rockwell de couches minces déposées sur des substrats. Une couche mince de l'épaisseur voulue est déposée sur des substrats de dureté connue, la dureté est mesurée à l'aide d'un poinçon, puis la dureté connue du substrat est comparée à la dureté composite mesurée.Method for measuring the Vickers, Knoop or Rockwell hardness of thin layers deposited on substrates. A thin film of the desired thickness is deposited on substrates of known hardness, the hardness is measured using a punch, and then the known hardness of the substrate is compared to the measured composite hardness.

FR7823176A 1977-08-05 1978-08-04 METHOD OF MEASURING THE HARDNESS OF THIN LAYERS Withdrawn FR2399654A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19772735340 DE2735340C2 (en) 1977-08-05 1977-08-05 Method for measuring the hardness (mixed hardness) of thin layers

Publications (1)

Publication Number Publication Date
FR2399654A1 true FR2399654A1 (en) 1979-03-02

Family

ID=6015716

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7823176A Withdrawn FR2399654A1 (en) 1977-08-05 1978-08-04 METHOD OF MEASURING THE HARDNESS OF THIN LAYERS

Country Status (4)

Country Link
DE (1) DE2735340C2 (en)
FR (1) FR2399654A1 (en)
GB (1) GB2004375B (en)
NL (1) NL7808139A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2672197B2 (en) * 1991-04-24 1997-11-05 シャープ株式会社 Metal wiring film performance evaluation method
DE19502936C2 (en) * 1995-01-31 1998-04-09 Horst Toberer Hardness measuring method and device for determining the hardness of a test specimen
US6445537B1 (en) * 1999-12-02 2002-09-03 Storage Technology Corporation Protective film for minimization of shield and pole tip recession in thin film shielded read heads and write heads

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE448600C (en) * 1925-05-26 1927-08-23 Hermann Steinrueck Device for testing the hardness of workpieces or the like.
GB1148114A (en) * 1965-12-02 1969-04-10 Uniroyal Inc Durometer
DE1904520A1 (en) * 1969-01-30 1970-08-06 Licentia Gmbh Determination of hardness of elastic - materials

Also Published As

Publication number Publication date
DE2735340C2 (en) 1982-06-03
GB2004375B (en) 1982-07-21
NL7808139A (en) 1979-02-07
GB2004375A (en) 1979-03-28
DE2735340A1 (en) 1979-02-08

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Legal Events

Date Code Title Description
RE Withdrawal of published application