JPS61207911A - Sample for calibrating x-ray type magnetic film measuring instrument - Google Patents

Sample for calibrating x-ray type magnetic film measuring instrument

Info

Publication number
JPS61207911A
JPS61207911A JP4875985A JP4875985A JPS61207911A JP S61207911 A JPS61207911 A JP S61207911A JP 4875985 A JP4875985 A JP 4875985A JP 4875985 A JP4875985 A JP 4875985A JP S61207911 A JPS61207911 A JP S61207911A
Authority
JP
Japan
Prior art keywords
ray
sample
fluorescent
base material
magnetic film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4875985A
Other languages
Japanese (ja)
Inventor
Kazuo Sasaki
和男 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP4875985A priority Critical patent/JPS61207911A/en
Publication of JPS61207911A publication Critical patent/JPS61207911A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

Abstract

PURPOSE:To prepare easily a sample with good accuracy and to prevent the failure thereof by the constitution consisting in using a material which emits the fluorescent X-ray to be measured in the components of a magnetic film as a plate-shaped base material and adhering aluminum as a filter material for adjusting the intensity of the fluorescent X-ray to be detected onto such base material. CONSTITUTION:The primary X-ray 3 emitted from an X-ray generator 1 arrives at iron 6 which is the base material. The fluorescent X-ray generated from the iron enters a detector 2 after the X-ray is attenuated by the aluminum 5 which is the filter material. Iron is used as the base material of the sample for calibration in the case in which the magnetic film is iron oxide. The intensity of the fluorescent X-ray is made approximately the same as heretofore by selecting suitably the thickness of the aluminum 5 and such material is usable as the sample for calibration.

Description

【発明の詳細な説明】 A〔産業上の利用分野〕 この発明はケイ光X線を用いて磁気ディスク、磁気テー
プ等の磁性被膜の厚みを測定する装置の精度維持に関す
る。
DETAILED DESCRIPTION OF THE INVENTION A [Field of Industrial Application] This invention relates to maintaining the accuracy of an apparatus that uses fluorescent X-rays to measure the thickness of magnetic coatings on magnetic disks, magnetic tapes, etc.

B(発明の概要〕 本発明はケイ光X線を用いて磁気ディスク、磁気テープ
等の磁性被膜の厚みを測定する装置に於て、温度変化等
の環境変化による測定値の変化を補償する几めの校正用
サンプルとして、測定の対象となる被膜材料の主成分を
母材とし、この上にアルミニウム箔を貼り付けたものを
用いることにより、製作の容易さ、安定性、使用時の装
置の精度向上ができるようにし友ものである。
B (Summary of the Invention) The present invention provides a method for compensating for changes in measured values due to environmental changes such as temperature changes in an apparatus that uses fluorescent X-rays to measure the thickness of magnetic coatings on magnetic disks, magnetic tapes, etc. By using the main component of the coating material to be measured as the base material and aluminum foil pasted on top of it as a calibration sample, it is easy to manufacture, stable, and easy to use when using the device. It is a companion that allows you to improve accuracy.

C〔従来の技術〕 従来、校正用サンプルとしては、対象となる材料そのも
の又はほぼ同様のものを製作する等して使用されている
C [Prior Art] Conventionally, as a sample for calibration, the target material itself or a substantially similar material has been manufactured and used.

D(発明が解決しようとする問題点〕 従来のサンプルには、対象となる磁性被膜の厚みが一般
に極めて薄い(a、2〜5μm)7tめキズ付き易い、
経年変化を起こし易い、厚みの均一なものを得るのが難
しい等の欠点が6つ比ゆ装置精度維持の几めの校正用サ
ンプルとしては測定対象と同じエネルギーで、かつ強度
が全測定範囲をカバーできるケイ光X線が検出器に得る
ことができればよい。
D (Problem to be solved by the invention) In conventional samples, the thickness of the target magnetic coating is generally extremely thin (a, 2 to 5 μm), and is easily scratched.
There are six disadvantages, such as the tendency to change over time and the difficulty of obtaining a sample with a uniform thickness.As a sample for careful calibration to maintain the accuracy of the device, it is recommended to use a sample that has the same energy as the measurement target and whose intensity covers the entire measurement range. It is sufficient if the detector can obtain fluorescent X-rays that can be covered.

そこで本発明ではこのようなサンプルを得ることを目的
としている。
Therefore, the present invention aims to obtain such a sample.

EC問題点を解決する次めの手段〕 上記間電点を解決するため、磁性被膜の成分中の測定対
象となるケイ光X線を出す材料を板状の憬材とし、この
上に検出されるケイ光X線の強度を調節するためのフィ
ルター材としてアルミニウムを貼り付けるt#成としt
o F(作用〕 上記のように前底され九校正用サンプルでは、アルミニ
ウムの厚みが厚い(100〜500μm)ため、キズ、
経年変化等の影響を受けにくく、又圧延材料を使用でき
る丸め厚みの均一なものが得られる。
[Next means to solve the EC problem] In order to solve the above-mentioned voltage point, the material that emits fluorescent X-rays, which is the measurement target in the components of the magnetic coating, is made into a plate-like material, and the detected Aluminum is attached as a filter material to adjust the intensity of fluorescent X-rays.
o F (Function) As mentioned above, in the front-bottomed nine calibration samples, the aluminum is thick (100 to 500 μm), so scratches,
It is possible to obtain a rolled material with uniform thickness that is not easily affected by aging, etc., and allows the use of rolled material.

G〔実施例〕 以下図面に基いて本発明の詳細な説明する。G [Example] The present invention will be described in detail below based on the drawings.

第1図において、xM発生器1より出され土1次X線3
は、母材である鉄6に到達する。鉄工〕発生し之ケイ光
X線4は、フィルター材であるアルミニウム5により減
衰させられ検出器2に入る。
In Figure 1, the primary X-ray 3 emitted from the xM generator 1
reaches the base material iron 6. [Ironwork] The generated fluorescent X-rays 4 are attenuated by the filter material aluminum 5 and enter the detector 2.

本実施例は、磁性被膜が酸化鉄である場合で、校正用サ
ンプルの母材として鉄を使用している。第二図は通常の
測定かつ従来の実施例で、xsg生器7より出された1
次X線9は磁性被膜11を照射し、ここより発生するケ
イ光X線10は検出器′8に入る。
In this example, the magnetic coating is made of iron oxide, and iron is used as the base material of the calibration sample. Figure 2 shows a normal measurement and conventional example, in which 1 is output from the xsg generator 7.
The X-rays 9 then irradiate the magnetic coating 11, and the fluorescent X-rays 10 generated therefrom enter the detector '8.

第1図のアルミニウム5の厚みを適当に選ぶことにより
、ケイ光X線4の強度は、第二図のケイ光X線10とほ
ぼ同じとなり、校正用サンプルとして使用できる。
By appropriately selecting the thickness of the aluminum 5 shown in FIG. 1, the intensity of the fluorescent X-rays 4 becomes almost the same as that of the fluorescent X-rays 10 shown in FIG. 2, and can be used as a calibration sample.

H〔本発明の効果〕 本発明にかかる校正用サンプルは裏作が容易であり、精
度が良く、破損しにくいという効果がある。
H [Effects of the Present Invention] The calibration sample according to the present invention has the advantage of being easy to prepare, having good accuracy, and being less likely to be damaged.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明にかかる校正用サンプルの断面図、第2
図は従来の校正用サンプルの断面図である。
Figure 1 is a sectional view of a calibration sample according to the present invention, Figure 2 is a cross-sectional view of a calibration sample according to the present invention;
The figure is a cross-sectional view of a conventional calibration sample.

Claims (2)

【特許請求の範囲】[Claims] (1)測定の対象となる被膜材料中の成分を母材とし、
この上にアルミニウム板を貼り付けたX線式磁性被膜測
定装置校正用サンプル。
(1) The components in the coating material to be measured are used as the base material,
A sample for calibrating an X-ray magnetic film measuring device with an aluminum plate pasted on top.
(2)上記母材を鉄又はコバルト又はクロームとするこ
とを特徴とする特許請求の範囲第1項記載のX線式磁性
被膜測定装置校正用サンプル。
(2) A sample for calibrating an X-ray magnetic coating measuring device according to claim 1, wherein the base material is iron, cobalt, or chromium.
JP4875985A 1985-03-12 1985-03-12 Sample for calibrating x-ray type magnetic film measuring instrument Pending JPS61207911A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4875985A JPS61207911A (en) 1985-03-12 1985-03-12 Sample for calibrating x-ray type magnetic film measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4875985A JPS61207911A (en) 1985-03-12 1985-03-12 Sample for calibrating x-ray type magnetic film measuring instrument

Publications (1)

Publication Number Publication Date
JPS61207911A true JPS61207911A (en) 1986-09-16

Family

ID=12812206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4875985A Pending JPS61207911A (en) 1985-03-12 1985-03-12 Sample for calibrating x-ray type magnetic film measuring instrument

Country Status (1)

Country Link
JP (1) JPS61207911A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0543009U (en) * 1991-11-15 1993-06-11 横河電機株式会社 Coating amount meter
US5461700A (en) * 1987-10-23 1995-10-24 Mitsubishi Jukogyo Kabushiki Kaisha Robot control system with a record switch for recording only useful instruction/positional data of a teaching-playback robot

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5461700A (en) * 1987-10-23 1995-10-24 Mitsubishi Jukogyo Kabushiki Kaisha Robot control system with a record switch for recording only useful instruction/positional data of a teaching-playback robot
JPH0543009U (en) * 1991-11-15 1993-06-11 横河電機株式会社 Coating amount meter

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