JPS57113312A - Film thickness gauge - Google Patents

Film thickness gauge

Info

Publication number
JPS57113312A
JPS57113312A JP55188162A JP18816280A JPS57113312A JP S57113312 A JPS57113312 A JP S57113312A JP 55188162 A JP55188162 A JP 55188162A JP 18816280 A JP18816280 A JP 18816280A JP S57113312 A JPS57113312 A JP S57113312A
Authority
JP
Japan
Prior art keywords
electron beam
film thickness
film
thickness gauge
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55188162A
Other languages
Japanese (ja)
Other versions
JPH0211842B2 (en
Inventor
Kenjiro Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP55188162A priority Critical patent/JPS57113312A/en
Publication of JPS57113312A publication Critical patent/JPS57113312A/en
Publication of JPH0211842B2 publication Critical patent/JPH0211842B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To perform a measurement of thickness without the damage of a sample, by a method wherein an acceleration voltage of an electron beam is caused to change automatically, and fluorescent X-rays, radiated from a substrate and a film, are self-measured. CONSTITUTION:A film thickness gauge consists of an electron generating source, an electron beam accelerator, and an X-ray detector. An acceleration voltage of an electron beam is caused to change automatically, and fluorescent X-rays, radiated from a substrate and a film, are self-measured to compute thickness from the measurements.
JP55188162A 1980-12-30 1980-12-30 Film thickness gauge Granted JPS57113312A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55188162A JPS57113312A (en) 1980-12-30 1980-12-30 Film thickness gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55188162A JPS57113312A (en) 1980-12-30 1980-12-30 Film thickness gauge

Publications (2)

Publication Number Publication Date
JPS57113312A true JPS57113312A (en) 1982-07-14
JPH0211842B2 JPH0211842B2 (en) 1990-03-16

Family

ID=16218831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55188162A Granted JPS57113312A (en) 1980-12-30 1980-12-30 Film thickness gauge

Country Status (1)

Country Link
JP (1) JPS57113312A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02266208A (en) * 1989-04-07 1990-10-31 Fujitsu Ltd Film thickness measuring method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02266208A (en) * 1989-04-07 1990-10-31 Fujitsu Ltd Film thickness measuring method

Also Published As

Publication number Publication date
JPH0211842B2 (en) 1990-03-16

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