JPS577150A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS577150A
JPS577150A JP8122480A JP8122480A JPS577150A JP S577150 A JPS577150 A JP S577150A JP 8122480 A JP8122480 A JP 8122480A JP 8122480 A JP8122480 A JP 8122480A JP S577150 A JPS577150 A JP S577150A
Authority
JP
Japan
Prior art keywords
layer
film
resistor
poly
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8122480A
Other languages
English (en)
Inventor
Tadashi Kirisako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8122480A priority Critical patent/JPS577150A/ja
Publication of JPS577150A publication Critical patent/JPS577150A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP8122480A 1980-06-16 1980-06-16 Manufacture of semiconductor device Pending JPS577150A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8122480A JPS577150A (en) 1980-06-16 1980-06-16 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8122480A JPS577150A (en) 1980-06-16 1980-06-16 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS577150A true JPS577150A (en) 1982-01-14

Family

ID=13740502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8122480A Pending JPS577150A (en) 1980-06-16 1980-06-16 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS577150A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59210658A (ja) * 1983-05-16 1984-11-29 Nec Corp 半導体装置の製造方法
US5903033A (en) * 1996-11-29 1999-05-11 Mitsubishi Denki Kabushiki Kaisha Semiconductor device including resistance element with superior noise immunity

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50134389A (ja) * 1974-04-10 1975-10-24
JPS54107279A (en) * 1978-02-10 1979-08-22 Nec Corp Semiconductor device
JPS5544715A (en) * 1978-09-26 1980-03-29 Oki Electric Ind Co Ltd Manufacturing semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50134389A (ja) * 1974-04-10 1975-10-24
JPS54107279A (en) * 1978-02-10 1979-08-22 Nec Corp Semiconductor device
JPS5544715A (en) * 1978-09-26 1980-03-29 Oki Electric Ind Co Ltd Manufacturing semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59210658A (ja) * 1983-05-16 1984-11-29 Nec Corp 半導体装置の製造方法
US5903033A (en) * 1996-11-29 1999-05-11 Mitsubishi Denki Kabushiki Kaisha Semiconductor device including resistance element with superior noise immunity

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