JPS5763841A - Preparation of semiconductor device - Google Patents

Preparation of semiconductor device

Info

Publication number
JPS5763841A
JPS5763841A JP55139590A JP13959080A JPS5763841A JP S5763841 A JPS5763841 A JP S5763841A JP 55139590 A JP55139590 A JP 55139590A JP 13959080 A JP13959080 A JP 13959080A JP S5763841 A JPS5763841 A JP S5763841A
Authority
JP
Japan
Prior art keywords
layer
region
film
silicon
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55139590A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6155250B2 (index.php
Inventor
Kenichiro Ryono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55139590A priority Critical patent/JPS5763841A/ja
Publication of JPS5763841A publication Critical patent/JPS5763841A/ja
Publication of JPS6155250B2 publication Critical patent/JPS6155250B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P90/1906—
    • H10W10/061—
    • H10W10/181—
    • H10P90/1908—
    • H10W10/012—
    • H10W10/13—

Landscapes

  • Element Separation (AREA)
  • Recrystallisation Techniques (AREA)
JP55139590A 1980-10-06 1980-10-06 Preparation of semiconductor device Granted JPS5763841A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55139590A JPS5763841A (en) 1980-10-06 1980-10-06 Preparation of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55139590A JPS5763841A (en) 1980-10-06 1980-10-06 Preparation of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5763841A true JPS5763841A (en) 1982-04-17
JPS6155250B2 JPS6155250B2 (index.php) 1986-11-27

Family

ID=15248804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55139590A Granted JPS5763841A (en) 1980-10-06 1980-10-06 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5763841A (index.php)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58199537A (ja) * 1982-05-14 1983-11-19 Matsushita Electric Ind Co Ltd 高抵抗半導体層の製造方法
US4583282A (en) * 1984-09-14 1986-04-22 Motorola, Inc. Process for self-aligned buried layer, field guard, and isolation
US4948742A (en) * 1987-09-08 1990-08-14 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing a semiconductor device
US4997786A (en) * 1986-06-13 1991-03-05 Matsushita Electric Industrial Co., Ltd. Method of fabricating a semiconductor device having buried insulation layer separated by ditches
US5372952A (en) * 1992-04-03 1994-12-13 National Semiconductor Corporation Method for forming isolated semiconductor structures

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58199537A (ja) * 1982-05-14 1983-11-19 Matsushita Electric Ind Co Ltd 高抵抗半導体層の製造方法
US4583282A (en) * 1984-09-14 1986-04-22 Motorola, Inc. Process for self-aligned buried layer, field guard, and isolation
US4997786A (en) * 1986-06-13 1991-03-05 Matsushita Electric Industrial Co., Ltd. Method of fabricating a semiconductor device having buried insulation layer separated by ditches
US4948742A (en) * 1987-09-08 1990-08-14 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing a semiconductor device
US5372952A (en) * 1992-04-03 1994-12-13 National Semiconductor Corporation Method for forming isolated semiconductor structures
US5376560A (en) * 1992-04-03 1994-12-27 National Semiconductor Corporation Method for forming isolated semiconductor structures

Also Published As

Publication number Publication date
JPS6155250B2 (index.php) 1986-11-27

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