JPS5750423A - Vapor phase growth device - Google Patents

Vapor phase growth device

Info

Publication number
JPS5750423A
JPS5750423A JP12669680A JP12669680A JPS5750423A JP S5750423 A JPS5750423 A JP S5750423A JP 12669680 A JP12669680 A JP 12669680A JP 12669680 A JP12669680 A JP 12669680A JP S5750423 A JPS5750423 A JP S5750423A
Authority
JP
Japan
Prior art keywords
bell jar
temperature
vapor phase
phase growth
bell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12669680A
Other languages
English (en)
Japanese (ja)
Other versions
JPS627685B2 (enrdf_load_html_response
Inventor
Teruo Kozai
Shigeki Hayase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12669680A priority Critical patent/JPS5750423A/ja
Publication of JPS5750423A publication Critical patent/JPS5750423A/ja
Publication of JPS627685B2 publication Critical patent/JPS627685B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP12669680A 1980-09-12 1980-09-12 Vapor phase growth device Granted JPS5750423A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12669680A JPS5750423A (en) 1980-09-12 1980-09-12 Vapor phase growth device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12669680A JPS5750423A (en) 1980-09-12 1980-09-12 Vapor phase growth device

Publications (2)

Publication Number Publication Date
JPS5750423A true JPS5750423A (en) 1982-03-24
JPS627685B2 JPS627685B2 (enrdf_load_html_response) 1987-02-18

Family

ID=14941577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12669680A Granted JPS5750423A (en) 1980-09-12 1980-09-12 Vapor phase growth device

Country Status (1)

Country Link
JP (1) JPS5750423A (enrdf_load_html_response)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200424A (ja) * 1983-04-28 1984-11-13 Hitachi Electronics Eng Co Ltd Ｃｖｄ装置
JPS6024377A (ja) * 1983-07-21 1985-02-07 Canon Inc 堆積膜の製造方法と製造装置
JPS61246370A (ja) * 1985-04-23 1986-11-01 Sakaguchi Dennetsu Kk 気相化学反応炉
JPS61250170A (ja) * 1985-04-30 1986-11-07 Sakaguchi Dennetsu Kk 気相化学反応炉
JPS62296413A (ja) * 1986-06-16 1987-12-23 Toshiba Ceramics Co Ltd エピタキシヤル装置用保護ベルジヤ−
JPS63140082A (ja) * 1986-12-01 1988-06-11 Hitachi Ltd 金属薄膜選択成長方法
WO2011128729A1 (en) * 2010-04-12 2011-10-20 Memc Electronic Materials, S.P.A. Bell jar for siemens reactor including thermal radiation shield

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5275176A (en) * 1975-12-18 1977-06-23 Matsushita Electric Ind Co Ltd Method for vapor phase epitaxial growth

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5275176A (en) * 1975-12-18 1977-06-23 Matsushita Electric Ind Co Ltd Method for vapor phase epitaxial growth

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200424A (ja) * 1983-04-28 1984-11-13 Hitachi Electronics Eng Co Ltd Ｃｖｄ装置
JPS6024377A (ja) * 1983-07-21 1985-02-07 Canon Inc 堆積膜の製造方法と製造装置
JPS61246370A (ja) * 1985-04-23 1986-11-01 Sakaguchi Dennetsu Kk 気相化学反応炉
JPS61250170A (ja) * 1985-04-30 1986-11-07 Sakaguchi Dennetsu Kk 気相化学反応炉
JPS62296413A (ja) * 1986-06-16 1987-12-23 Toshiba Ceramics Co Ltd エピタキシヤル装置用保護ベルジヤ−
JPS63140082A (ja) * 1986-12-01 1988-06-11 Hitachi Ltd 金属薄膜選択成長方法
WO2011128729A1 (en) * 2010-04-12 2011-10-20 Memc Electronic Materials, S.P.A. Bell jar for siemens reactor including thermal radiation shield

Also Published As

Publication number Publication date
JPS627685B2 (enrdf_load_html_response) 1987-02-18

Similar Documents

Publication Publication Date Title
US4981815A (en) Method for rapidly thermally processing a semiconductor wafer by irradiation using semicircular or parabolic reflectors
JPS5750423A (en) Vapor phase growth device
ES492355A0 (es) Dispositivo de caldeo para una unidad de cocina en particu- lar una unidad de caldeo por radiacion para superficies de coccion de ceramica vitrea
JPS6071935A (ja) 被検液の加熱特性測定装置
JP2625108B2 (ja) プラズマ増強化学蒸着のためのプラズマ装置
JPS63216283A (ja) 加熱装置
JPH11354526A (ja) 板体加熱装置
JPH0338029A (ja) 気相成長装置
JP2000150136A (ja) マイクロ波加熱方法およびその装置
JPS5691436A (en) Method for heating semiconductor substrate
JPS5726433A (en) Bake of photoresist or the like and apparatus therefor
JPS55122870A (en) Vacuum vapor deposition method
JPS57102327A (en) Heater for barrel of injection molding machine
ATE26057T1 (de) Elektrische heizeinrichtung fuer herde oder kochplatten.
JPS6429815A (en) Optical switching element
KR960005388Y1 (ko) 웨이퍼 기판의 온도 측정이 가능한 히터 블럭 장치
JPS6333275B2 (enrdf_load_html_response)
JPS57178316A (en) Manufacture of semiconductor element and device therefor
JPS6217484Y2 (enrdf_load_html_response)
JP2509817B2 (ja) 処理装置
JPS61117279A (ja) 基板加熱装置
JPS5460931A (en) Heat fixing device
JP2612191B2 (ja) 塗布方法
JPS54134555A (en) Heat treatment unit
JPS646953A (en) Thermal development method