JPS5750407A - Coating material for thermally treating magnetic garnet epitaxial film - Google Patents

Coating material for thermally treating magnetic garnet epitaxial film

Info

Publication number
JPS5750407A
JPS5750407A JP12623880A JP12623880A JPS5750407A JP S5750407 A JPS5750407 A JP S5750407A JP 12623880 A JP12623880 A JP 12623880A JP 12623880 A JP12623880 A JP 12623880A JP S5750407 A JPS5750407 A JP S5750407A
Authority
JP
Japan
Prior art keywords
layer
substance
heat treatment
thermally treated
magnetic garnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12623880A
Other languages
Japanese (ja)
Inventor
Masao Mikami
Sotaro Edokoro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12623880A priority Critical patent/JPS5750407A/en
Publication of JPS5750407A publication Critical patent/JPS5750407A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To obtain a material having the small speed of decrease of Ku due to heat treatment Ku by using a substance, which does not deteriorate the crystallinity of the film when the surface is coated selectively and thermally treated, as the first layer and employing a substance shielding the atmosphere during the heat treatment as the second layer or more. CONSTITUTION:When the surface of the magnetic garnet epitaxial film, which is expressed by a general formula R3M5O12 (R is Y, a rare-earth element, etc. and M is Fe, Ga, A, etc.), is coated selectively and thermally treated, the substance, which does not deteriorate the crystallinity of the epitaxial films on a coated section and an uncoated section, is used as the first layer, and the substance shielding the atmosphere of heat treatment is empolyed as the second layer or more. A bubble holding layer 2 and a drive layer 3 are formed onto a GGG substrate wafer 1 through an LPE, a transfer pattern consisting of an SiO2 layer 4 and an Si3N4 layer 5 is formed on the layer 3 through a sputtering method, the whole is thermally treated for 120min. under 1 atm. partial pressure of oxygen at 850 deg.C; a CD device is thus prepared.
JP12623880A 1980-09-11 1980-09-11 Coating material for thermally treating magnetic garnet epitaxial film Pending JPS5750407A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12623880A JPS5750407A (en) 1980-09-11 1980-09-11 Coating material for thermally treating magnetic garnet epitaxial film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12623880A JPS5750407A (en) 1980-09-11 1980-09-11 Coating material for thermally treating magnetic garnet epitaxial film

Publications (1)

Publication Number Publication Date
JPS5750407A true JPS5750407A (en) 1982-03-24

Family

ID=14930204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12623880A Pending JPS5750407A (en) 1980-09-11 1980-09-11 Coating material for thermally treating magnetic garnet epitaxial film

Country Status (1)

Country Link
JP (1) JPS5750407A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ302966B6 (en) * 1999-03-18 2012-01-25 Ppg Industries Ohio, Inc. Coating on a substrate and coated article

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ302966B6 (en) * 1999-03-18 2012-01-25 Ppg Industries Ohio, Inc. Coating on a substrate and coated article

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