JPS5715279A - Manufacture of contiguous disk bubble element - Google Patents

Manufacture of contiguous disk bubble element

Info

Publication number
JPS5715279A
JPS5715279A JP8742080A JP8742080A JPS5715279A JP S5715279 A JPS5715279 A JP S5715279A JP 8742080 A JP8742080 A JP 8742080A JP 8742080 A JP8742080 A JP 8742080A JP S5715279 A JPS5715279 A JP S5715279A
Authority
JP
Japan
Prior art keywords
film
surface layer
layer
transfer pattern
uniaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8742080A
Other languages
Japanese (ja)
Inventor
Hiroshi Makino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8742080A priority Critical patent/JPS5715279A/en
Publication of JPS5715279A publication Critical patent/JPS5715279A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
    • H01F10/20—Ferrites
    • H01F10/24—Garnets

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Power Engineering (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To form an element suitable to minute bubbles in a single-layer film system by reducing the uniaxial anisotropic energy of a surface layer of a single-layer magnetic garnet film through thermally treating the surface layer at a specific temperature before a transfer pattern is formed. CONSTITUTION:Before the formation of a transfer pattern, the surface layer of a single-layer mangetic garnet film is thermally treated at a temperature higher than 750 deg.C to reduce the uniaxial magnetic anisotropic energy of the surface layer. On a Gd3Ga5O12 substrate, for example, a magnetic garnet film (composition; Sm0.75 Lu1.75Ca0.5Fe4.5Ge0.5O12) having 1.47mum film thickness is formed by liquid- phaseepitaxial growth at 909 deg.C growing temperature to obtain a bubble holding film, thereafter, is thermally treated in oxygen atmosphere at 850 deg.C for 7min. On this film, a contiguous disk pattern of 4mum bit cycle consisting of 1,000Angstrom SiO2, 100Angstrom Cr and 4,000Angstrom Au is formed and then He<+> ion implantation is executed under 100KeV acceleration voltage and 3X10<15>/cm<2> dose amount conditions to obtain a bubble element.
JP8742080A 1980-06-27 1980-06-27 Manufacture of contiguous disk bubble element Pending JPS5715279A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8742080A JPS5715279A (en) 1980-06-27 1980-06-27 Manufacture of contiguous disk bubble element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8742080A JPS5715279A (en) 1980-06-27 1980-06-27 Manufacture of contiguous disk bubble element

Publications (1)

Publication Number Publication Date
JPS5715279A true JPS5715279A (en) 1982-01-26

Family

ID=13914379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8742080A Pending JPS5715279A (en) 1980-06-27 1980-06-27 Manufacture of contiguous disk bubble element

Country Status (1)

Country Link
JP (1) JPS5715279A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142510A (en) * 1982-02-19 1983-08-24 Hitachi Ltd Manufacture of magnetic bubble element
JPS62103894U (en) * 1985-12-17 1987-07-02
JPS63107692A (en) * 1986-10-21 1988-05-12 鉄建建設株式会社 Speed measuring device for propulsion jack in shielding machine

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512790A (en) * 1978-07-14 1980-01-29 Nec Corp Producing method of cylindrical magnetic domain element
JPS5518095A (en) * 1978-07-27 1980-02-07 Nec Corp Cilindrical magnetic domain element
JPS5651817A (en) * 1979-10-05 1981-05-09 Nec Corp Preparation of magnetic bubble element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512790A (en) * 1978-07-14 1980-01-29 Nec Corp Producing method of cylindrical magnetic domain element
JPS5518095A (en) * 1978-07-27 1980-02-07 Nec Corp Cilindrical magnetic domain element
JPS5651817A (en) * 1979-10-05 1981-05-09 Nec Corp Preparation of magnetic bubble element

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142510A (en) * 1982-02-19 1983-08-24 Hitachi Ltd Manufacture of magnetic bubble element
JPH0572090B2 (en) * 1982-02-19 1993-10-08 Hitachi Ltd
JPS62103894U (en) * 1985-12-17 1987-07-02
JPS63107692A (en) * 1986-10-21 1988-05-12 鉄建建設株式会社 Speed measuring device for propulsion jack in shielding machine
JPH0426679B2 (en) * 1986-10-21 1992-05-07 Tekken Constr Co

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