JPS5715280A - Manufacture of contiguous disk bubble element - Google Patents

Manufacture of contiguous disk bubble element

Info

Publication number
JPS5715280A
JPS5715280A JP8742180A JP8742180A JPS5715280A JP S5715280 A JPS5715280 A JP S5715280A JP 8742180 A JP8742180 A JP 8742180A JP 8742180 A JP8742180 A JP 8742180A JP S5715280 A JPS5715280 A JP S5715280A
Authority
JP
Japan
Prior art keywords
film
transfer pattern
ion implantation
surface layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8742180A
Other languages
Japanese (ja)
Inventor
Hiroshi Makino
Masao Mikami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8742180A priority Critical patent/JPS5715280A/en
Publication of JPS5715280A publication Critical patent/JPS5715280A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To obtain an element suitable to minute bubbles in a single-layer film system by reducing the axial anisotropic energy of the surface layer of a garnet film except right under a transfer pattern by thermally treating the surface layer at a specific temperature after the formation of the transfer pattern and before ion implantation. CONSTITUTION:A transfer pattern is formed on a single-layer magnetic garnet film and then before ion implantation, a heat treatment is carried out at a temperature higher than 750 deg.C to reduce the uniaxial magnetic anisotropic energy of the surface layer of the garnet film except right under the transfer pattern. For example, on a Gd3Ga5O12 substrate, a magnetic narnet film (composition; Sm0.75Lu1.75Ca0.5 Fe4.5 Ge0.5O12) having 1.39mum film thickness is formed by liquid-phase epitaxial growth and on it, a 4,000Angstrom Au film is formed to obtain a continuous disk pattern by ion milling. Then, a heat treatment is carried out for eight minutes in oxygen atmosphere at 870 deg.C and He<+> ion implantation is executed under 100KeV acceleration voltage and 3X10<15>/cm<2> does amount conditions to obtain a bubble element.
JP8742180A 1980-06-27 1980-06-27 Manufacture of contiguous disk bubble element Pending JPS5715280A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8742180A JPS5715280A (en) 1980-06-27 1980-06-27 Manufacture of contiguous disk bubble element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8742180A JPS5715280A (en) 1980-06-27 1980-06-27 Manufacture of contiguous disk bubble element

Publications (1)

Publication Number Publication Date
JPS5715280A true JPS5715280A (en) 1982-01-26

Family

ID=13914406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8742180A Pending JPS5715280A (en) 1980-06-27 1980-06-27 Manufacture of contiguous disk bubble element

Country Status (1)

Country Link
JP (1) JPS5715280A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60152000U (en) * 1984-03-19 1985-10-09 東光産業株式会社 Water intrusion prevention devices such as ventilation holes

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512790A (en) * 1978-07-14 1980-01-29 Nec Corp Producing method of cylindrical magnetic domain element
JPS5518095A (en) * 1978-07-27 1980-02-07 Nec Corp Cilindrical magnetic domain element
JPS5651817A (en) * 1979-10-05 1981-05-09 Nec Corp Preparation of magnetic bubble element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512790A (en) * 1978-07-14 1980-01-29 Nec Corp Producing method of cylindrical magnetic domain element
JPS5518095A (en) * 1978-07-27 1980-02-07 Nec Corp Cilindrical magnetic domain element
JPS5651817A (en) * 1979-10-05 1981-05-09 Nec Corp Preparation of magnetic bubble element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60152000U (en) * 1984-03-19 1985-10-09 東光産業株式会社 Water intrusion prevention devices such as ventilation holes
JPH0352320Y2 (en) * 1984-03-19 1991-11-12

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