JPS56118321A - Forming method for preliminary protecting film - Google Patents
Forming method for preliminary protecting filmInfo
- Publication number
- JPS56118321A JPS56118321A JP2041980A JP2041980A JPS56118321A JP S56118321 A JPS56118321 A JP S56118321A JP 2041980 A JP2041980 A JP 2041980A JP 2041980 A JP2041980 A JP 2041980A JP S56118321 A JPS56118321 A JP S56118321A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film
- protecting film
- preliminary
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Abstract
PURPOSE:To form a preliminary protecting film on a thin film while minimizing oxidization of said thin film by a method wherein after the first thin film is formed on a substrate, the second thin film made of the same material as said thin film and having a higher density than it is attached thereon as a preliminary protecting film. CONSTITUTION:A thin film 1 of amorphous magnetic film to be a recording medium made of a combination of a rare earth metal and an iron group metal, such as GdCo, GdFe or the like, is attached onto a glass substrate 2 under optimum sputtering conditions in a vacuum chamber. The same amorphous magnetic material as the thin film 1 is attached thereon in the vacuum chamber under sputtering conditions by which density is made higher, to form a preliminary protecting film 3. Then, the substrate 2 is drawn out of the vacuum chamber and coated with an ordinary oxide protecting film 4 such as SiO2, TiO2 or the like. Thereby, oxidization of the thin film 1 in forming the protecting film 4 in the air is minimized.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2041980A JPS56118321A (en) | 1980-02-22 | 1980-02-22 | Forming method for preliminary protecting film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2041980A JPS56118321A (en) | 1980-02-22 | 1980-02-22 | Forming method for preliminary protecting film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56118321A true JPS56118321A (en) | 1981-09-17 |
JPH0125216B2 JPH0125216B2 (en) | 1989-05-16 |
Family
ID=12026506
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2041980A Granted JPS56118321A (en) | 1980-02-22 | 1980-02-22 | Forming method for preliminary protecting film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56118321A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59139616A (en) * | 1983-01-31 | 1984-08-10 | Hitachi Ltd | Manufacture of magnetic thin film |
US4594296A (en) * | 1982-12-25 | 1986-06-10 | Tdk Corporation | Magnetic recording medium |
-
1980
- 1980-02-22 JP JP2041980A patent/JPS56118321A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4594296A (en) * | 1982-12-25 | 1986-06-10 | Tdk Corporation | Magnetic recording medium |
JPS59139616A (en) * | 1983-01-31 | 1984-08-10 | Hitachi Ltd | Manufacture of magnetic thin film |
JPH035642B2 (en) * | 1983-01-31 | 1991-01-28 | Hitachi Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPH0125216B2 (en) | 1989-05-16 |
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