JPS56118321A - Forming method for preliminary protecting film - Google Patents

Forming method for preliminary protecting film

Info

Publication number
JPS56118321A
JPS56118321A JP2041980A JP2041980A JPS56118321A JP S56118321 A JPS56118321 A JP S56118321A JP 2041980 A JP2041980 A JP 2041980A JP 2041980 A JP2041980 A JP 2041980A JP S56118321 A JPS56118321 A JP S56118321A
Authority
JP
Japan
Prior art keywords
thin film
film
protecting film
preliminary
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2041980A
Other languages
Japanese (ja)
Other versions
JPH0125216B2 (en
Inventor
Yuji Togami
Kikuo Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Broadcasting Corp
Original Assignee
Nippon Hoso Kyokai NHK
Japan Broadcasting Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Hoso Kyokai NHK, Japan Broadcasting Corp filed Critical Nippon Hoso Kyokai NHK
Priority to JP2041980A priority Critical patent/JPS56118321A/en
Publication of JPS56118321A publication Critical patent/JPS56118321A/en
Publication of JPH0125216B2 publication Critical patent/JPH0125216B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To form a preliminary protecting film on a thin film while minimizing oxidization of said thin film by a method wherein after the first thin film is formed on a substrate, the second thin film made of the same material as said thin film and having a higher density than it is attached thereon as a preliminary protecting film. CONSTITUTION:A thin film 1 of amorphous magnetic film to be a recording medium made of a combination of a rare earth metal and an iron group metal, such as GdCo, GdFe or the like, is attached onto a glass substrate 2 under optimum sputtering conditions in a vacuum chamber. The same amorphous magnetic material as the thin film 1 is attached thereon in the vacuum chamber under sputtering conditions by which density is made higher, to form a preliminary protecting film 3. Then, the substrate 2 is drawn out of the vacuum chamber and coated with an ordinary oxide protecting film 4 such as SiO2, TiO2 or the like. Thereby, oxidization of the thin film 1 in forming the protecting film 4 in the air is minimized.
JP2041980A 1980-02-22 1980-02-22 Forming method for preliminary protecting film Granted JPS56118321A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2041980A JPS56118321A (en) 1980-02-22 1980-02-22 Forming method for preliminary protecting film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2041980A JPS56118321A (en) 1980-02-22 1980-02-22 Forming method for preliminary protecting film

Publications (2)

Publication Number Publication Date
JPS56118321A true JPS56118321A (en) 1981-09-17
JPH0125216B2 JPH0125216B2 (en) 1989-05-16

Family

ID=12026506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2041980A Granted JPS56118321A (en) 1980-02-22 1980-02-22 Forming method for preliminary protecting film

Country Status (1)

Country Link
JP (1) JPS56118321A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59139616A (en) * 1983-01-31 1984-08-10 Hitachi Ltd Manufacture of magnetic thin film
US4594296A (en) * 1982-12-25 1986-06-10 Tdk Corporation Magnetic recording medium

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4594296A (en) * 1982-12-25 1986-06-10 Tdk Corporation Magnetic recording medium
JPS59139616A (en) * 1983-01-31 1984-08-10 Hitachi Ltd Manufacture of magnetic thin film
JPH035642B2 (en) * 1983-01-31 1991-01-28 Hitachi Ltd

Also Published As

Publication number Publication date
JPH0125216B2 (en) 1989-05-16

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