JPS5749239A - Manufacture of gaas device - Google Patents

Manufacture of gaas device

Info

Publication number
JPS5749239A
JPS5749239A JP55125149A JP12514980A JPS5749239A JP S5749239 A JPS5749239 A JP S5749239A JP 55125149 A JP55125149 A JP 55125149A JP 12514980 A JP12514980 A JP 12514980A JP S5749239 A JPS5749239 A JP S5749239A
Authority
JP
Japan
Prior art keywords
film
sio2 film
ions
opened
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55125149A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0245332B2 (enrdf_load_stackoverflow
Inventor
Yasuo Igawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55125149A priority Critical patent/JPS5749239A/ja
Publication of JPS5749239A publication Critical patent/JPS5749239A/ja
Publication of JPH0245332B2 publication Critical patent/JPH0245332B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP55125149A 1980-09-09 1980-09-09 Manufacture of gaas device Granted JPS5749239A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55125149A JPS5749239A (en) 1980-09-09 1980-09-09 Manufacture of gaas device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55125149A JPS5749239A (en) 1980-09-09 1980-09-09 Manufacture of gaas device

Publications (2)

Publication Number Publication Date
JPS5749239A true JPS5749239A (en) 1982-03-23
JPH0245332B2 JPH0245332B2 (enrdf_load_stackoverflow) 1990-10-09

Family

ID=14903074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55125149A Granted JPS5749239A (en) 1980-09-09 1980-09-09 Manufacture of gaas device

Country Status (1)

Country Link
JP (1) JPS5749239A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59121833A (ja) * 1982-12-27 1984-07-14 Toshiba Corp 半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5247675A (en) * 1975-10-14 1977-04-15 Matsushita Electric Ind Co Ltd Process for production of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5247675A (en) * 1975-10-14 1977-04-15 Matsushita Electric Ind Co Ltd Process for production of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59121833A (ja) * 1982-12-27 1984-07-14 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0245332B2 (enrdf_load_stackoverflow) 1990-10-09

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