JPS5747797A - Manufacturing apparatus for semiconductor single crystal - Google Patents
Manufacturing apparatus for semiconductor single crystalInfo
- Publication number
- JPS5747797A JPS5747797A JP12240980A JP12240980A JPS5747797A JP S5747797 A JPS5747797 A JP S5747797A JP 12240980 A JP12240980 A JP 12240980A JP 12240980 A JP12240980 A JP 12240980A JP S5747797 A JPS5747797 A JP S5747797A
- Authority
- JP
- Japan
- Prior art keywords
- container
- slit
- pin
- crucible
- cut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To enable the long-term use of the body of a melting container only by the exchange of part of a specified slit width maintaining mechanism by setting the mechanism to both side walls of a slit cut in the container in the longitudinal direction.
CONSTITUTION: A melting container (a graphite crucible) used to hold a quartz crucible for melting a polycrystalline silicon ingot is composed of a bowl-shaped lower container 10 and a cylindrical upper container 12, and a slit 14 is cut in the side wall of the container 12 in the longitudinal direction. An almost U-shaped groove 16 is then cut in the inner wall of the container 12 at both sides of the slit 14 in the lateral direction, and a U-shaped breakable binding pin 18 made of graphite is inserted in the groove 16 from the arrow A direction to construct a slit width maintaining mechanism 20. When the slit width of the container 12 is made larger by repeating use, by inserting a pin 18 in the groove 16, the width can be adjusted to the predetermined value. When the pin 18 is broken during cooling the crucible, only by exchanging the pin 18 for a new one, the crucible can be used repeatedly.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12240980A JPS5747797A (en) | 1980-09-05 | 1980-09-05 | Manufacturing apparatus for semiconductor single crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12240980A JPS5747797A (en) | 1980-09-05 | 1980-09-05 | Manufacturing apparatus for semiconductor single crystal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5747797A true JPS5747797A (en) | 1982-03-18 |
Family
ID=14835084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12240980A Pending JPS5747797A (en) | 1980-09-05 | 1980-09-05 | Manufacturing apparatus for semiconductor single crystal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5747797A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59103767U (en) * | 1982-12-28 | 1984-07-12 | 富士通株式会社 | carbon crucible |
| JPS6175891A (en) * | 1984-09-17 | 1986-04-18 | シユンドス・デフイブラトール・アクテイエボラーグ | Apparatus for liquid treatment of pulp |
| JPH0345793A (en) * | 1989-07-03 | 1991-02-27 | Mas Fab Andritz Ag | Method and apparatus for treating fiber material slurry |
-
1980
- 1980-09-05 JP JP12240980A patent/JPS5747797A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59103767U (en) * | 1982-12-28 | 1984-07-12 | 富士通株式会社 | carbon crucible |
| JPS6217496Y2 (en) * | 1982-12-28 | 1987-05-06 | ||
| JPS6175891A (en) * | 1984-09-17 | 1986-04-18 | シユンドス・デフイブラトール・アクテイエボラーグ | Apparatus for liquid treatment of pulp |
| JPH0345793A (en) * | 1989-07-03 | 1991-02-27 | Mas Fab Andritz Ag | Method and apparatus for treating fiber material slurry |
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