JPS57118095A - Manufacturing apparatus for beltlike silicon crystal - Google Patents
Manufacturing apparatus for beltlike silicon crystalInfo
- Publication number
- JPS57118095A JPS57118095A JP17781A JP17781A JPS57118095A JP S57118095 A JPS57118095 A JP S57118095A JP 17781 A JP17781 A JP 17781A JP 17781 A JP17781 A JP 17781A JP S57118095 A JPS57118095 A JP S57118095A
- Authority
- JP
- Japan
- Prior art keywords
- die
- beltlike
- silicon crystal
- crystal
- positions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To control the width of a beltlike silicon crystal stably and accurately without requiring a large-scale apparatus by making notches in the tip of a capillary die at positions at a prescribed distance from both ends of the die in the longitudinal direction.
CONSTITUTION: A capillary die 31, 32 having a slit is put in a crucible 2 holding molten silicon 1, and a seed crystal is brought into contact with molten silicon 1 rising through the slit to pull up a beltlike silicon crystal 4. In this apparatus notches 51, 52 are made in the tip of the die 31, 32 at positions at a prescribed distance from both ends of the die in the longitudinal direction. When the crystal reaches points C, D corresponding to the positions of the notches 5 of the die 3, it does not grow wide from the points C, D. Thus, the width of a beltlike silicon crystal can be controlled automatically and accurately using such an inexpensive apparatus having a simple structure without requiring special operation for controlling the width.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17781A JPS5914433B2 (en) | 1981-01-06 | 1981-01-06 | Manufacturing equipment for band-shaped silicon crystals |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17781A JPS5914433B2 (en) | 1981-01-06 | 1981-01-06 | Manufacturing equipment for band-shaped silicon crystals |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57118095A true JPS57118095A (en) | 1982-07-22 |
JPS5914433B2 JPS5914433B2 (en) | 1984-04-04 |
Family
ID=11466719
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17781A Expired JPS5914433B2 (en) | 1981-01-06 | 1981-01-06 | Manufacturing equipment for band-shaped silicon crystals |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5914433B2 (en) |
-
1981
- 1981-01-06 JP JP17781A patent/JPS5914433B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5914433B2 (en) | 1984-04-04 |
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