JPS57196796A - Growing apparatus for beltlike silicon crystal - Google Patents
Growing apparatus for beltlike silicon crystalInfo
- Publication number
- JPS57196796A JPS57196796A JP8013281A JP8013281A JPS57196796A JP S57196796 A JPS57196796 A JP S57196796A JP 8013281 A JP8013281 A JP 8013281A JP 8013281 A JP8013281 A JP 8013281A JP S57196796 A JPS57196796 A JP S57196796A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- beltlike
- rollers
- thickness
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To manufacture a beltlike Si crystal with slight changes in the thickness and width by passing a beltlike Si crystal pulled up with a capillary die through rollers for regulating changes in the thickness and width of the crystal at a place right above the die.
CONSTITUTION: A high purity Si melt 2 is charged into a crucible 1 made of quartz glass, a capillary die 3 made of artificial graphite is immersed in the melt 2, and a beltlike Si crystal 4 is pulled up with a seed crystal. At this time, rollers 11a, 11b made of high purity graphite are rotated at a place right above the die 3 to pull up the crystal 4 through the slot 12 having desired width and thickness for the crystal, and the crystal 4 is further pulled up with upper rollers 5aW5d. By passing through the slot 12 between the rollers 11a, 11b the crystal 4 is provided with a uniform width without weaving in the lateral direction, and it is also provided with a uniform thickness.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8013281A JPS5932432B2 (en) | 1981-05-28 | 1981-05-28 | Band-shaped silicon crystal growth device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8013281A JPS5932432B2 (en) | 1981-05-28 | 1981-05-28 | Band-shaped silicon crystal growth device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57196796A true JPS57196796A (en) | 1982-12-02 |
JPS5932432B2 JPS5932432B2 (en) | 1984-08-08 |
Family
ID=13709702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8013281A Expired JPS5932432B2 (en) | 1981-05-28 | 1981-05-28 | Band-shaped silicon crystal growth device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5932432B2 (en) |
-
1981
- 1981-05-28 JP JP8013281A patent/JPS5932432B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5932432B2 (en) | 1984-08-08 |
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