JPS5482971A - Heat diffusion furnace of semiconductor producing device - Google Patents
Heat diffusion furnace of semiconductor producing deviceInfo
- Publication number
- JPS5482971A JPS5482971A JP15084377A JP15084377A JPS5482971A JP S5482971 A JPS5482971 A JP S5482971A JP 15084377 A JP15084377 A JP 15084377A JP 15084377 A JP15084377 A JP 15084377A JP S5482971 A JPS5482971 A JP S5482971A
- Authority
- JP
- Japan
- Prior art keywords
- heat diffusion
- wafer
- producing device
- diffusion furnace
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To secure the automatic heat diffusion by flowing the dopant gas or the like to the perpendicular direction to the axis from the middle part of the furnace core tube and shifting the wafer from one end of the furnace core tube to the other end.
CONSTITUTION: A tube is distributed at the upper and lower middle part of furnace core tube 1 to flow in (32) and out (33) dopant gas 31 or the like with formation of process part 14. Thus, the gas is supplied vertically to the furnace axis. Boat 4 holding wafer 5 is fed in (12) and out (13) via loader 7 which receives a high- speed control. In this way, the dust sticking and contamination can be prevented for the wafer.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15084377A JPS5482971A (en) | 1977-12-14 | 1977-12-14 | Heat diffusion furnace of semiconductor producing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15084377A JPS5482971A (en) | 1977-12-14 | 1977-12-14 | Heat diffusion furnace of semiconductor producing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5482971A true JPS5482971A (en) | 1979-07-02 |
Family
ID=15505581
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15084377A Pending JPS5482971A (en) | 1977-12-14 | 1977-12-14 | Heat diffusion furnace of semiconductor producing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5482971A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6027143A (en) * | 1983-07-25 | 1985-02-12 | Mitsubishi Electric Corp | Device for continuous heat treatment |
-
1977
- 1977-12-14 JP JP15084377A patent/JPS5482971A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6027143A (en) * | 1983-07-25 | 1985-02-12 | Mitsubishi Electric Corp | Device for continuous heat treatment |
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