JPS5453961A - Heat treatment method of wafer and wafer fastening tool used for it - Google Patents
Heat treatment method of wafer and wafer fastening tool used for itInfo
- Publication number
- JPS5453961A JPS5453961A JP12009577A JP12009577A JPS5453961A JP S5453961 A JPS5453961 A JP S5453961A JP 12009577 A JP12009577 A JP 12009577A JP 12009577 A JP12009577 A JP 12009577A JP S5453961 A JPS5453961 A JP S5453961A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- heat treatment
- treatment method
- tool used
- fastening tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make uniform the amount of impurity deposition and the diffusion speed, by locating the wafer with an angle to the direction of gas flow.
CONSTITUTION: In the diffusion furnace 10 in which gas G flows, the wafer 14 is held 12 with an angle from the normal line to the gas flow. Each wafer is approximately parallel and the gas smoothly flows between them and no turbulent flow is caused. Thus, the dispersion in the amount of impurity deposition in the wafer and between wafers and in the growing speed of SiO2 can be reduced. The angle tilted is recommended as 45 to 60°
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12009577A JPS5453961A (en) | 1977-10-07 | 1977-10-07 | Heat treatment method of wafer and wafer fastening tool used for it |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12009577A JPS5453961A (en) | 1977-10-07 | 1977-10-07 | Heat treatment method of wafer and wafer fastening tool used for it |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5453961A true JPS5453961A (en) | 1979-04-27 |
Family
ID=14777778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12009577A Pending JPS5453961A (en) | 1977-10-07 | 1977-10-07 | Heat treatment method of wafer and wafer fastening tool used for it |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5453961A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62162835U (en) * | 1986-04-03 | 1987-10-16 |
-
1977
- 1977-10-07 JP JP12009577A patent/JPS5453961A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62162835U (en) * | 1986-04-03 | 1987-10-16 |
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