JPS5745946A - Relative position detecting pattern - Google Patents

Relative position detecting pattern

Info

Publication number
JPS5745946A
JPS5745946A JP55121512A JP12151280A JPS5745946A JP S5745946 A JPS5745946 A JP S5745946A JP 55121512 A JP55121512 A JP 55121512A JP 12151280 A JP12151280 A JP 12151280A JP S5745946 A JPS5745946 A JP S5745946A
Authority
JP
Japan
Prior art keywords
patterns
layer
pattern
relative position
absence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55121512A
Other languages
English (en)
Japanese (ja)
Other versions
JPS622458B2 (enrdf_load_stackoverflow
Inventor
Shinichi Kunieda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55121512A priority Critical patent/JPS5745946A/ja
Publication of JPS5745946A publication Critical patent/JPS5745946A/ja
Publication of JPS622458B2 publication Critical patent/JPS622458B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Position Or Direction (AREA)
JP55121512A 1980-09-02 1980-09-02 Relative position detecting pattern Granted JPS5745946A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55121512A JPS5745946A (en) 1980-09-02 1980-09-02 Relative position detecting pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55121512A JPS5745946A (en) 1980-09-02 1980-09-02 Relative position detecting pattern

Publications (2)

Publication Number Publication Date
JPS5745946A true JPS5745946A (en) 1982-03-16
JPS622458B2 JPS622458B2 (enrdf_load_stackoverflow) 1987-01-20

Family

ID=14813029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55121512A Granted JPS5745946A (en) 1980-09-02 1980-09-02 Relative position detecting pattern

Country Status (1)

Country Link
JP (1) JPS5745946A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63112657U (enrdf_load_stackoverflow) * 1987-01-17 1988-07-20
US5504999A (en) * 1992-12-07 1996-04-09 Read-Rite Corporation Method and apparatus for compensating for process variations in an automatic positioning system
US5627083A (en) * 1993-08-03 1997-05-06 Nec Corporation Method of fabricating semiconductor device including step of forming superposition error measuring patterns
WO2002082531A3 (en) * 2001-04-05 2003-02-27 Infineon Technologies Corp Structure and method for determining edges of regions in a semiconductor wafer
JP2004532677A (ja) * 2001-04-13 2004-10-28 ベクトン・ディキンソン・アンド・カンパニー 皮内針
WO2011040188A1 (ja) * 2009-09-30 2011-04-07 テルモ株式会社 注射補助具及び薬剤注射装置
US9381310B2 (en) 2010-03-10 2016-07-05 Terumo Kabushiki Kaisha Injection needle assembly and drug injection apparatus

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63112657U (enrdf_load_stackoverflow) * 1987-01-17 1988-07-20
US5504999A (en) * 1992-12-07 1996-04-09 Read-Rite Corporation Method and apparatus for compensating for process variations in an automatic positioning system
US5627083A (en) * 1993-08-03 1997-05-06 Nec Corporation Method of fabricating semiconductor device including step of forming superposition error measuring patterns
WO2002082531A3 (en) * 2001-04-05 2003-02-27 Infineon Technologies Corp Structure and method for determining edges of regions in a semiconductor wafer
US6828647B2 (en) 2001-04-05 2004-12-07 Infineon Technologies Ag Structure for determining edges of regions in a semiconductor wafer
JP2004532677A (ja) * 2001-04-13 2004-10-28 ベクトン・ディキンソン・アンド・カンパニー 皮内針
JP4883877B2 (ja) * 2001-04-13 2012-02-22 ベクトン・ディキンソン・アンド・カンパニー 皮内針
WO2011040188A1 (ja) * 2009-09-30 2011-04-07 テルモ株式会社 注射補助具及び薬剤注射装置
US9381310B2 (en) 2010-03-10 2016-07-05 Terumo Kabushiki Kaisha Injection needle assembly and drug injection apparatus

Also Published As

Publication number Publication date
JPS622458B2 (enrdf_load_stackoverflow) 1987-01-20

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