JPS5735937A - Purazumakagakuhannoho - Google Patents
PurazumakagakuhannohoInfo
- Publication number
- JPS5735937A JPS5735937A JP10996080A JP10996080A JPS5735937A JP S5735937 A JPS5735937 A JP S5735937A JP 10996080 A JP10996080 A JP 10996080A JP 10996080 A JP10996080 A JP 10996080A JP S5735937 A JPS5735937 A JP S5735937A
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- gas
- reactions
- plasma chemical
- gases
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10996080A JPS5735937A (ja) | 1980-08-08 | 1980-08-08 | Purazumakagakuhannoho |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10996080A JPS5735937A (ja) | 1980-08-08 | 1980-08-08 | Purazumakagakuhannoho |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5735937A true JPS5735937A (ja) | 1982-02-26 |
Family
ID=14523495
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10996080A Pending JPS5735937A (ja) | 1980-08-08 | 1980-08-08 | Purazumakagakuhannoho |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5735937A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58199857A (ja) * | 1982-05-04 | 1983-11-21 | マイクル・ポ−ル・ニアリ− | 化学的方法 |
JPS59104120A (ja) * | 1982-12-07 | 1984-06-15 | Fujitsu Ltd | プラズマ処理方法 |
JPS6027767A (ja) * | 1983-07-27 | 1985-02-12 | Suzuki Motor Co Ltd | 気化器の燃料調節装置 |
JPS6027122A (ja) * | 1983-07-22 | 1985-02-12 | Semiconductor Energy Lab Co Ltd | 光プラズマ気相反応法 |
-
1980
- 1980-08-08 JP JP10996080A patent/JPS5735937A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58199857A (ja) * | 1982-05-04 | 1983-11-21 | マイクル・ポ−ル・ニアリ− | 化学的方法 |
JPS59104120A (ja) * | 1982-12-07 | 1984-06-15 | Fujitsu Ltd | プラズマ処理方法 |
JPS6027122A (ja) * | 1983-07-22 | 1985-02-12 | Semiconductor Energy Lab Co Ltd | 光プラズマ気相反応法 |
JPS6027767A (ja) * | 1983-07-27 | 1985-02-12 | Suzuki Motor Co Ltd | 気化器の燃料調節装置 |
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