JPS5735343A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5735343A
JPS5735343A JP855780A JP855780A JPS5735343A JP S5735343 A JPS5735343 A JP S5735343A JP 855780 A JP855780 A JP 855780A JP 855780 A JP855780 A JP 855780A JP S5735343 A JPS5735343 A JP S5735343A
Authority
JP
Japan
Prior art keywords
type
layer
substrate
si3n4
impurity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP855780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS623583B2 (enrdf_load_stackoverflow
Inventor
Masanori Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP855780A priority Critical patent/JPS5735343A/ja
Publication of JPS5735343A publication Critical patent/JPS5735343A/ja
Publication of JPS623583B2 publication Critical patent/JPS623583B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP855780A 1980-01-28 1980-01-28 Manufacture of semiconductor device Granted JPS5735343A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP855780A JPS5735343A (en) 1980-01-28 1980-01-28 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP855780A JPS5735343A (en) 1980-01-28 1980-01-28 Manufacture of semiconductor device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP654177A Division JPS5284989A (en) 1977-01-24 1977-01-24 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5735343A true JPS5735343A (en) 1982-02-25
JPS623583B2 JPS623583B2 (enrdf_load_stackoverflow) 1987-01-26

Family

ID=11696403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP855780A Granted JPS5735343A (en) 1980-01-28 1980-01-28 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5735343A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS623583B2 (enrdf_load_stackoverflow) 1987-01-26

Similar Documents

Publication Publication Date Title
JPS56164578A (en) Manufacture of mos type semiconductor device
JPS5735343A (en) Manufacture of semiconductor device
JPS5688358A (en) Manufacture of semiconductor device
JPS55157241A (en) Manufacture of semiconductor device
JPS572519A (en) Manufacture of semiconductor device
JPS56111264A (en) Manufacture of semiconductor device
JPS5766671A (en) Semiconductor device
JPS56147434A (en) Manufacture of semiconductor device
JPS55120170A (en) Mos type semiconductor device
JPS5662367A (en) Manufacturing of semiconductor device
JPS56158482A (en) Semiconductor device
JPS54117690A (en) Production of semiconductor device
JPS6484643A (en) Manufacture of semiconductor device
JPS56165320A (en) Formation of multilayer electrodes of semiconductor device
JPS5718362A (en) Semiconductor device and manufacture thereof
JPS5759378A (en) Manufacture of semiconductor device
JPS5754347A (en) Selective oxidation
JPS57114274A (en) Electrode for semiconductor device and manufacture thereof
JPS57106076A (en) Manufacture of semiconductor integrated circuit device
JPS6480076A (en) Manufacture of semiconductor device
JPS5618442A (en) Semiconductor ic
JPS5627946A (en) Manufacture of semiconductor device
JPS5766670A (en) Manufacture of semiconductor integrated circuit device
JPS5797643A (en) Manufacture of semiconductor device
JPS6453573A (en) Semiconductor device and its manufacture