JPS5720452A - Forming method for multilayer wiring - Google Patents
Forming method for multilayer wiringInfo
- Publication number
- JPS5720452A JPS5720452A JP9539580A JP9539580A JPS5720452A JP S5720452 A JPS5720452 A JP S5720452A JP 9539580 A JP9539580 A JP 9539580A JP 9539580 A JP9539580 A JP 9539580A JP S5720452 A JPS5720452 A JP S5720452A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- ito
- film
- coated
- ito7
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 abstract 3
- 239000007788 liquid Substances 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 1
- 239000002253 acid Substances 0.000 abstract 1
- 239000007853 buffer solution Substances 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000007423 decrease Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229960002050 hydrofluoric acid Drugs 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 235000006408 oxalic acid Nutrition 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 239000000243 solution Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9539580A JPS5720452A (en) | 1980-07-11 | 1980-07-11 | Forming method for multilayer wiring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9539580A JPS5720452A (en) | 1980-07-11 | 1980-07-11 | Forming method for multilayer wiring |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5720452A true JPS5720452A (en) | 1982-02-02 |
| JPS6262055B2 JPS6262055B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-12-24 |
Family
ID=14136456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9539580A Granted JPS5720452A (en) | 1980-07-11 | 1980-07-11 | Forming method for multilayer wiring |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5720452A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5013156A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1973-06-06 | 1975-02-12 | ||
| JPS5258491A (en) * | 1975-11-10 | 1977-05-13 | Hitachi Ltd | Semiconductor device |
| JPS5365088A (en) * | 1976-11-22 | 1978-06-10 | Nec Corp | Semiconductor device |
-
1980
- 1980-07-11 JP JP9539580A patent/JPS5720452A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5013156A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1973-06-06 | 1975-02-12 | ||
| JPS5258491A (en) * | 1975-11-10 | 1977-05-13 | Hitachi Ltd | Semiconductor device |
| JPS5365088A (en) * | 1976-11-22 | 1978-06-10 | Nec Corp | Semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6262055B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-12-24 |
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