JPS57193063A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS57193063A
JPS57193063A JP56077651A JP7765181A JPS57193063A JP S57193063 A JPS57193063 A JP S57193063A JP 56077651 A JP56077651 A JP 56077651A JP 7765181 A JP7765181 A JP 7765181A JP S57193063 A JPS57193063 A JP S57193063A
Authority
JP
Japan
Prior art keywords
film
layer
gate electrode
electrode
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56077651A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217930B2 (enrdf_load_stackoverflow
Inventor
Noriaki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56077651A priority Critical patent/JPS57193063A/ja
Publication of JPS57193063A publication Critical patent/JPS57193063A/ja
Publication of JPH0217930B2 publication Critical patent/JPH0217930B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
JP56077651A 1981-05-22 1981-05-22 Manufacture of semiconductor device Granted JPS57193063A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56077651A JPS57193063A (en) 1981-05-22 1981-05-22 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56077651A JPS57193063A (en) 1981-05-22 1981-05-22 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57193063A true JPS57193063A (en) 1982-11-27
JPH0217930B2 JPH0217930B2 (enrdf_load_stackoverflow) 1990-04-24

Family

ID=13639789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56077651A Granted JPS57193063A (en) 1981-05-22 1981-05-22 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57193063A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010059735A (ko) * 1999-12-30 2001-07-06 박종섭 금속 게이트전극을 갖는 모스트랜지스터 제조방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0434827U (enrdf_load_stackoverflow) * 1990-07-16 1992-03-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010059735A (ko) * 1999-12-30 2001-07-06 박종섭 금속 게이트전극을 갖는 모스트랜지스터 제조방법

Also Published As

Publication number Publication date
JPH0217930B2 (enrdf_load_stackoverflow) 1990-04-24

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