JPS57188408A - Manufacture of high density silicon nitride - Google Patents
Manufacture of high density silicon nitrideInfo
- Publication number
- JPS57188408A JPS57188408A JP56070478A JP7047881A JPS57188408A JP S57188408 A JPS57188408 A JP S57188408A JP 56070478 A JP56070478 A JP 56070478A JP 7047881 A JP7047881 A JP 7047881A JP S57188408 A JPS57188408 A JP S57188408A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- silicon nitride
- film
- carbon
- specific gravity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56070478A JPS57188408A (en) | 1981-05-11 | 1981-05-11 | Manufacture of high density silicon nitride |
US06/368,440 US4515755A (en) | 1981-05-11 | 1982-04-14 | Apparatus for producing a silicon single crystal from a silicon melt |
DE8282103457T DE3280107D1 (de) | 1981-05-11 | 1982-04-23 | Vorrichtungsteil aus siliziumnitrid zum ziehen von einkristallinem silizium und verfahren zu seiner herstellung. |
EP82103457A EP0065122B1 (en) | 1981-05-11 | 1982-04-23 | Device made of silicon nitride for pulling single crystal of silicon and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56070478A JPS57188408A (en) | 1981-05-11 | 1981-05-11 | Manufacture of high density silicon nitride |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57188408A true JPS57188408A (en) | 1982-11-19 |
JPH0154432B2 JPH0154432B2 (ja) | 1989-11-17 |
Family
ID=13432664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56070478A Granted JPS57188408A (en) | 1981-05-11 | 1981-05-11 | Manufacture of high density silicon nitride |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57188408A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5187147A (en) * | 1991-05-31 | 1993-02-16 | Florida State University | Method for producing freestanding high Tc superconducting thin films |
WO2004016835A1 (en) * | 2002-08-15 | 2004-02-26 | Crusin As | Mould parts of silicon nitride and method for producing such mould parts |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5490214A (en) * | 1977-12-27 | 1979-07-17 | Toshiba Ceramics Co | Method of making silicon nitride formed body |
-
1981
- 1981-05-11 JP JP56070478A patent/JPS57188408A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5490214A (en) * | 1977-12-27 | 1979-07-17 | Toshiba Ceramics Co | Method of making silicon nitride formed body |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5187147A (en) * | 1991-05-31 | 1993-02-16 | Florida State University | Method for producing freestanding high Tc superconducting thin films |
WO2004016835A1 (en) * | 2002-08-15 | 2004-02-26 | Crusin As | Mould parts of silicon nitride and method for producing such mould parts |
JP2005535552A (ja) * | 2002-08-15 | 2005-11-24 | クルジン アクシエル スカプ | 窒化ケイ素の成形部品及び該成形部品の製造方法 |
CN1302158C (zh) * | 2002-08-15 | 2007-02-28 | 克鲁辛股份公司 | 氮化硅的模型配件和制造这种模型配件的方法 |
JP4724419B2 (ja) * | 2002-08-15 | 2011-07-13 | クルジン アクシエル スカプ | 窒化ケイ素の成形部品及び該成形部品の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0154432B2 (ja) | 1989-11-17 |
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