JPS57184232A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS57184232A JPS57184232A JP6900181A JP6900181A JPS57184232A JP S57184232 A JPS57184232 A JP S57184232A JP 6900181 A JP6900181 A JP 6900181A JP 6900181 A JP6900181 A JP 6900181A JP S57184232 A JPS57184232 A JP S57184232A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- layer
- conductor
- resist
- photo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6900181A JPS57184232A (en) | 1981-05-08 | 1981-05-08 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6900181A JPS57184232A (en) | 1981-05-08 | 1981-05-08 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57184232A true JPS57184232A (en) | 1982-11-12 |
Family
ID=13389918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6900181A Pending JPS57184232A (en) | 1981-05-08 | 1981-05-08 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57184232A (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5495185A (en) * | 1978-01-13 | 1979-07-27 | Hitachi Ltd | Production of semiconductor device |
-
1981
- 1981-05-08 JP JP6900181A patent/JPS57184232A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5495185A (en) * | 1978-01-13 | 1979-07-27 | Hitachi Ltd | Production of semiconductor device |
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