JPS57180143A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS57180143A
JPS57180143A JP56065029A JP6502981A JPS57180143A JP S57180143 A JPS57180143 A JP S57180143A JP 56065029 A JP56065029 A JP 56065029A JP 6502981 A JP6502981 A JP 6502981A JP S57180143 A JPS57180143 A JP S57180143A
Authority
JP
Japan
Prior art keywords
film
mask
films
layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56065029A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0318342B2 (enrdf_load_stackoverflow
Inventor
Satoru Maeda
Hiroshi Iwai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56065029A priority Critical patent/JPS57180143A/ja
Priority to US06/307,877 priority patent/US4560421A/en
Publication of JPS57180143A publication Critical patent/JPS57180143A/ja
Publication of JPH0318342B2 publication Critical patent/JPH0318342B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
    • B62D—MOTOR VEHICLES; TRAILERS
    • B62D1/00—Steering controls, i.e. means for initiating a change of direction of the vehicle
    • B62D1/02—Steering controls, i.e. means for initiating a change of direction of the vehicle vehicle-mounted
    • B62D1/16—Steering columns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Transportation (AREA)
  • Mechanical Engineering (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Drying Of Semiconductors (AREA)
  • Element Separation (AREA)
JP56065029A 1980-10-02 1981-04-28 Manufacture of semiconductor device Granted JPS57180143A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP56065029A JPS57180143A (en) 1981-04-28 1981-04-28 Manufacture of semiconductor device
US06/307,877 US4560421A (en) 1980-10-02 1981-10-02 Semiconductor device and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56065029A JPS57180143A (en) 1981-04-28 1981-04-28 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57180143A true JPS57180143A (en) 1982-11-06
JPH0318342B2 JPH0318342B2 (enrdf_load_stackoverflow) 1991-03-12

Family

ID=13275135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56065029A Granted JPS57180143A (en) 1980-10-02 1981-04-28 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57180143A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59201440A (ja) * 1983-04-30 1984-11-15 Toshiba Corp 半導体装置及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59201440A (ja) * 1983-04-30 1984-11-15 Toshiba Corp 半導体装置及びその製造方法

Also Published As

Publication number Publication date
JPH0318342B2 (enrdf_load_stackoverflow) 1991-03-12

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