JPS57178380A - Manufacture of mis type photoelectric transducer - Google Patents

Manufacture of mis type photoelectric transducer

Info

Publication number
JPS57178380A
JPS57178380A JP56064485A JP6448581A JPS57178380A JP S57178380 A JPS57178380 A JP S57178380A JP 56064485 A JP56064485 A JP 56064485A JP 6448581 A JP6448581 A JP 6448581A JP S57178380 A JPS57178380 A JP S57178380A
Authority
JP
Japan
Prior art keywords
film
silicon nitride
nitride film
electrode
onto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56064485A
Other languages
English (en)
Japanese (ja)
Other versions
JPS622468B2 (enrdf_load_stackoverflow
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP56064485A priority Critical patent/JPS57178380A/ja
Publication of JPS57178380A publication Critical patent/JPS57178380A/ja
Publication of JPS622468B2 publication Critical patent/JPS622468B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/121—The active layers comprising only Group IV materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)
JP56064485A 1981-04-27 1981-04-27 Manufacture of mis type photoelectric transducer Granted JPS57178380A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56064485A JPS57178380A (en) 1981-04-27 1981-04-27 Manufacture of mis type photoelectric transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56064485A JPS57178380A (en) 1981-04-27 1981-04-27 Manufacture of mis type photoelectric transducer

Publications (2)

Publication Number Publication Date
JPS57178380A true JPS57178380A (en) 1982-11-02
JPS622468B2 JPS622468B2 (enrdf_load_stackoverflow) 1987-01-20

Family

ID=13259559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56064485A Granted JPS57178380A (en) 1981-04-27 1981-04-27 Manufacture of mis type photoelectric transducer

Country Status (1)

Country Link
JP (1) JPS57178380A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63501668A (ja) * 1985-10-11 1988-06-23 ヌ−ケン・ゲ−・エム・ベ−・ハ− 太陽電池

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63501668A (ja) * 1985-10-11 1988-06-23 ヌ−ケン・ゲ−・エム・ベ−・ハ− 太陽電池

Also Published As

Publication number Publication date
JPS622468B2 (enrdf_load_stackoverflow) 1987-01-20

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