JPS5564350A - Radioactive-ray receiving face - Google Patents
Radioactive-ray receiving faceInfo
- Publication number
- JPS5564350A JPS5564350A JP13680578A JP13680578A JPS5564350A JP S5564350 A JPS5564350 A JP S5564350A JP 13680578 A JP13680578 A JP 13680578A JP 13680578 A JP13680578 A JP 13680578A JP S5564350 A JPS5564350 A JP S5564350A
- Authority
- JP
- Japan
- Prior art keywords
- crystal silicon
- hydrogen
- silicon substrate
- receiving face
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE: To obtain a light receiving face applicable to light receiving element of storage made having high resolution, by providing a non-crystal silicon film containing hydrogen at the opposite of incident side of crystal silicon substrate.
CONSTITUTION: Ohmic electrode 21 is provided at a portion of single or poly- crystal silicon substrate 20, while non-crystal silicon layer 22 containing hydrogen is formed at the opposite of incident side of silicon substrate and landing layer 23 is provided as required. Non-crystal silicon layer 22 is formed through silicon spattering, electron beam vacuum deposition, etc. under environment containing decomposed hydrogen of silane due to glow discharging. The depth of non-crystal silicon layer 22 is set to 1W20μm and the amount of contained hydrogen is preferable to be 5W40atomic%.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13680578A JPS5564350A (en) | 1978-11-08 | 1978-11-08 | Radioactive-ray receiving face |
FR7927300A FR2441264A1 (en) | 1978-11-08 | 1979-11-06 | RADIATION SENSITIVE SCREEN |
GB7938506A GB2036426B (en) | 1978-11-08 | 1979-11-07 | Radiation sensitive screen |
US06/092,021 US4249106A (en) | 1978-11-08 | 1979-11-07 | Radiation sensitive screen |
NLAANVRAGE7908196,A NL179770C (en) | 1978-11-08 | 1979-11-08 | RADIATION-SENSITIVE SCREEN OF THE LOAD STORAGE TYPE. |
DE19792945156 DE2945156A1 (en) | 1978-11-08 | 1979-11-08 | RADIATION-SENSITIVE SCREEN |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13680578A JPS5564350A (en) | 1978-11-08 | 1978-11-08 | Radioactive-ray receiving face |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5564350A true JPS5564350A (en) | 1980-05-15 |
JPH025017B2 JPH025017B2 (en) | 1990-01-31 |
Family
ID=15183918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13680578A Granted JPS5564350A (en) | 1978-11-08 | 1978-11-08 | Radioactive-ray receiving face |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5564350A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57136940A (en) * | 1981-02-17 | 1982-08-24 | Fuji Electric Corp Res & Dev Ltd | Ozone decomposing catalyst |
JPS5888977A (en) * | 1981-11-20 | 1983-05-27 | Matsushita Electric Ind Co Ltd | Solid-state image pickup device |
JPS6047471A (en) * | 1983-08-26 | 1985-03-14 | Fuji Electric Corp Res & Dev Ltd | Semiconductor radioactive ray detector |
-
1978
- 1978-11-08 JP JP13680578A patent/JPS5564350A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57136940A (en) * | 1981-02-17 | 1982-08-24 | Fuji Electric Corp Res & Dev Ltd | Ozone decomposing catalyst |
JPS6117545B2 (en) * | 1981-02-17 | 1986-05-08 | Fuji Denki Sogo Kenkyusho Kk | |
JPS5888977A (en) * | 1981-11-20 | 1983-05-27 | Matsushita Electric Ind Co Ltd | Solid-state image pickup device |
JPS6350912B2 (en) * | 1981-11-20 | 1988-10-12 | Matsushita Electric Ind Co Ltd | |
JPS6047471A (en) * | 1983-08-26 | 1985-03-14 | Fuji Electric Corp Res & Dev Ltd | Semiconductor radioactive ray detector |
Also Published As
Publication number | Publication date |
---|---|
JPH025017B2 (en) | 1990-01-31 |
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