JPS57169244A - Temperature controller for mask and wafer - Google Patents

Temperature controller for mask and wafer

Info

Publication number
JPS57169244A
JPS57169244A JP56055199A JP5519981A JPS57169244A JP S57169244 A JPS57169244 A JP S57169244A JP 56055199 A JP56055199 A JP 56055199A JP 5519981 A JP5519981 A JP 5519981A JP S57169244 A JPS57169244 A JP S57169244A
Authority
JP
Japan
Prior art keywords
temperature distribution
mask
wafer
temperature
photo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56055199A
Other languages
English (en)
Inventor
Kazuo Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP56055199A priority Critical patent/JPS57169244A/ja
Priority to US06/366,070 priority patent/US4503335A/en
Priority to DE19823213239 priority patent/DE3213239A1/de
Publication of JPS57169244A publication Critical patent/JPS57169244A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • G03F7/70875—Temperature, e.g. temperature control of masks or workpieces via control of stage temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Toxicology (AREA)
  • Atmospheric Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Public Health (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP56055199A 1981-04-13 1981-04-13 Temperature controller for mask and wafer Pending JPS57169244A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP56055199A JPS57169244A (en) 1981-04-13 1981-04-13 Temperature controller for mask and wafer
US06/366,070 US4503335A (en) 1981-04-13 1982-04-06 Semiconductor printing apparatus with multiple independent temperature control
DE19823213239 DE3213239A1 (de) 1981-04-13 1982-04-08 Halbleiterdruckeinrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56055199A JPS57169244A (en) 1981-04-13 1981-04-13 Temperature controller for mask and wafer

Publications (1)

Publication Number Publication Date
JPS57169244A true JPS57169244A (en) 1982-10-18

Family

ID=12992007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56055199A Pending JPS57169244A (en) 1981-04-13 1981-04-13 Temperature controller for mask and wafer

Country Status (3)

Country Link
US (1) US4503335A (ja)
JP (1) JPS57169244A (ja)
DE (1) DE3213239A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020062074A (ko) * 2001-01-19 2002-07-25 주식회사 템네스트 전열기를 이용한 정전척의 표면 온도 제어 시스템
JP2014130908A (ja) * 2012-12-28 2014-07-10 Ngk Spark Plug Co Ltd 静電チャック
JP2016507763A (ja) * 2012-12-17 2016-03-10 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置のための基板サポート及びリソグラフィ装置
JP2020074481A (ja) * 2020-02-06 2020-05-14 エーファウ・グループ・エー・タルナー・ゲーエムベーハー ウェハの装着用受け取り手段

Families Citing this family (92)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5999722A (ja) * 1982-11-29 1984-06-08 Canon Inc 半導体焼付露光制御方法
KR860002082B1 (ko) * 1983-01-19 1986-11-24 가부시기가이샤 도시바 레지스트 패턴의 형성 방법 및 장치
US4564284A (en) * 1983-09-12 1986-01-14 Canon Kabushiki Kaisha Semiconductor exposure apparatus
US4669842A (en) * 1983-12-08 1987-06-02 Canon Kabushiki Kaisha Projection optical device
JPS60158626A (ja) * 1984-01-30 1985-08-20 Canon Inc 半導体露光装置
DE3447488A1 (de) * 1984-10-19 1986-05-07 Canon K.K., Tokio/Tokyo Projektionseinrichtung
JPS61160934A (ja) * 1985-01-10 1986-07-21 Canon Inc 投影光学装置
JPS61183928A (ja) * 1985-02-12 1986-08-16 Nippon Kogaku Kk <Nikon> 投影光学装置
ATA331185A (de) * 1985-11-13 1994-05-15 Ims Ionen Mikrofab Syst Verfahren zum stabilisieren von masken
JPS6381820A (ja) * 1986-09-25 1988-04-12 Toshiba Corp レジストパタ−ン形成方法
JPH0785112B2 (ja) * 1987-02-16 1995-09-13 キヤノン株式会社 ステージ装置
US5084671A (en) * 1987-09-02 1992-01-28 Tokyo Electron Limited Electric probing-test machine having a cooling system
US4989991A (en) * 1987-10-26 1991-02-05 Ag Processing Technologies, Inc. Emissivity calibration apparatus and method
JPH01152639A (ja) * 1987-12-10 1989-06-15 Canon Inc 吸着保持装置
EP0357423B1 (en) * 1988-09-02 1995-03-15 Canon Kabushiki Kaisha An exposure apparatus
DE3911357A1 (de) * 1989-04-07 1990-10-18 Nokia Unterhaltungselektronik Verfahren zum gegenseitigen justieren zweier bauteile einer anzeigeeinrichtung
JP2731950B2 (ja) * 1989-07-13 1998-03-25 キヤノン株式会社 露光方法
US5222999A (en) * 1989-07-14 1993-06-29 Brymill Corporation Liquified nitrogen thermal checking of electronic circuitry
JP2737010B2 (ja) * 1989-08-01 1998-04-08 キヤノン株式会社 露光装置
US5231291A (en) * 1989-08-01 1993-07-27 Canon Kabushiki Kaisha Wafer table and exposure apparatus with the same
US5047711A (en) * 1989-08-23 1991-09-10 Silicon Connections Corporation Wafer-level burn-in testing of integrated circuits
DE69033002T2 (de) * 1989-10-02 1999-09-02 Canon K.K. Belichtungsvorrichtung
US5077523A (en) * 1989-11-03 1991-12-31 John H. Blanz Company, Inc. Cryogenic probe station having movable chuck accomodating variable thickness probe cards
US5160883A (en) * 1989-11-03 1992-11-03 John H. Blanz Company, Inc. Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support
US5166606A (en) * 1989-11-03 1992-11-24 John H. Blanz Company, Inc. High efficiency cryogenic test station
US5001423A (en) * 1990-01-24 1991-03-19 International Business Machines Corporation Dry interface thermal chuck temperature control system for semiconductor wafer testing
JPH03252507A (ja) * 1990-03-02 1991-11-11 Hitachi Ltd レーザ干渉測長装置およびそれを用いた位置決め方法
US6023068A (en) * 1991-05-30 2000-02-08 Canon Kabushiki Kaisha Semiconductor device manufacturing apparatus
US5164661A (en) * 1991-05-31 1992-11-17 Ej Systems, Inc. Thermal control system for a semi-conductor burn-in
US5126656A (en) * 1991-05-31 1992-06-30 Ej Systems, Inc. Burn-in tower
JP3102076B2 (ja) * 1991-08-09 2000-10-23 キヤノン株式会社 照明装置及びそれを用いた投影露光装置
US5541524A (en) * 1991-08-23 1996-07-30 Nchip, Inc. Burn-in technologies for unpackaged integrated circuits
WO1993004375A1 (en) * 1991-08-23 1993-03-04 Nchip, Inc. Burn-in technologies for unpackaged integrated circuits
JPH0636993A (ja) * 1992-05-21 1994-02-10 Canon Inc 露光装置及び半導体素子の製造方法
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5581324A (en) * 1993-06-10 1996-12-03 Nikon Corporation Thermal distortion compensated projection exposure method and apparatus for manufacturing semiconductors
JP3210145B2 (ja) 1993-07-14 2001-09-17 キヤノン株式会社 走査型露光装置及び該装置を用いてデバイスを製造する方法
JP3101473B2 (ja) * 1993-11-05 2000-10-23 キヤノン株式会社 露光方法及び該露光方法を用いるデバイス製造方法
US6577148B1 (en) * 1994-08-31 2003-06-10 Motorola, Inc. Apparatus, method, and wafer used for testing integrated circuits formed on a product wafer
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US5610529A (en) * 1995-04-28 1997-03-11 Cascade Microtech, Inc. Probe station having conductive coating added to thermal chuck insulator
AU7438296A (en) * 1995-10-12 1997-04-30 Magapanel Corporation Magnification control and thermal substrate chuck for photolithography
US6645701B1 (en) * 1995-11-22 2003-11-11 Nikon Corporation Exposure method and exposure apparatus
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
JP3027551B2 (ja) * 1997-07-03 2000-04-04 キヤノン株式会社 基板保持装置ならびに該基板保持装置を用いた研磨方法および研磨装置
US6617868B1 (en) * 1997-12-18 2003-09-09 Intel Corporation Method and apparatus for controlling the power and heat output in a device testing system
DE19822000C2 (de) 1998-05-15 2002-04-18 Infineon Technologies Ag Prüfverfahren für integrierte Schaltungen auf einem Wafer
JP2000277237A (ja) * 1999-03-24 2000-10-06 Komatsu Ltd 基板温度制御プレート及びそれを備える基板温度制御装置
US6592673B2 (en) * 1999-05-27 2003-07-15 Applied Materials, Inc. Apparatus and method for detecting a presence or position of a substrate
US6445202B1 (en) * 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
JP2001332609A (ja) * 2000-03-13 2001-11-30 Nikon Corp 基板保持装置及び露光装置
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6836135B2 (en) * 2001-08-31 2004-12-28 Cascade Microtech, Inc. Optical testing device
US6777964B2 (en) 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US7250779B2 (en) * 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
JP2004228456A (ja) * 2003-01-27 2004-08-12 Canon Inc 露光装置
US7221172B2 (en) * 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
KR20060009956A (ko) * 2003-05-28 2006-02-01 가부시키가이샤 니콘 노광 방법, 노광 장치, 및 디바이스 제조 방법
SG109000A1 (en) * 2003-07-16 2005-02-28 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
EP1524558A1 (en) 2003-10-15 2005-04-20 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
US7187188B2 (en) * 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
WO2005076324A1 (ja) 2004-02-04 2005-08-18 Nikon Corporation 露光装置、露光方法及びデバイス製造方法
JP2008502167A (ja) 2004-06-07 2008-01-24 カスケード マイクロテック インコーポレイテッド 熱光学チャック
US7330041B2 (en) * 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
US7304715B2 (en) 2004-08-13 2007-12-04 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US9025126B2 (en) * 2007-07-31 2015-05-05 Nikon Corporation Exposure apparatus adjusting method, exposure apparatus, and device fabricating method
US20090153812A1 (en) * 2007-12-17 2009-06-18 Canon Kabushiki Kaisha Positioning apparatus, exposure apparatus, and device manufacturing method
NL1036835A1 (nl) * 2008-05-08 2009-11-11 Asml Netherlands Bv Lithographic Apparatus and Method.
NL2003039A1 (nl) * 2008-07-22 2010-01-25 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
US7927976B2 (en) * 2008-07-23 2011-04-19 Semprius, Inc. Reinforced composite stamp for dry transfer printing of semiconductor elements
WO2010059781A1 (en) * 2008-11-19 2010-05-27 Semprius, Inc. Printing semiconductor elements by shear-assisted elastomeric stamp transfer
US8319503B2 (en) * 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
US8261660B2 (en) * 2009-07-22 2012-09-11 Semprius, Inc. Vacuum coupled tool apparatus for dry transfer printing semiconductor elements
JP2011192991A (ja) 2010-03-12 2011-09-29 Asml Netherlands Bv リソグラフィ装置および方法
KR101866719B1 (ko) * 2010-12-20 2018-06-11 에베 그룹 에. 탈너 게엠베하 웨이퍼의 장착을 위한 수용 수단
SG188036A1 (en) 2011-08-18 2013-03-28 Asml Netherlands Bv Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
CN104520770B (zh) * 2012-04-23 2017-01-18 Asml荷兰有限公司 静电夹持装置、光刻设备和方法
JP2016522568A (ja) * 2013-04-09 2016-07-28 エーエスエムエル ネザーランズ ビー．ブイ． 支持構造、その温度を制御する方法、及びそれを含む装置
US10763142B2 (en) 2015-06-22 2020-09-01 Lam Research Corporation System and method for determining field non-uniformities of a wafer processing chamber using a wafer processing parameter
US10386821B2 (en) * 2015-06-22 2019-08-20 Lam Research Corporation Systems and methods for calibrating scalar field contribution values for a limited number of sensors including a temperature value of an electrostatic chuck and estimating temperature distribution profiles based on calibrated values
US10381248B2 (en) 2015-06-22 2019-08-13 Lam Research Corporation Auto-correction of electrostatic chuck temperature non-uniformity
KR102494914B1 (ko) 2016-02-16 2023-02-01 에베 그룹 에. 탈너 게엠베하 기판을 접합하기 위한 방법 및 장치
CN108885406B (zh) 2016-03-24 2020-09-11 Asml荷兰有限公司 图案化设备冷却系统以及热调节图案化设备的方法
US20230095108A1 (en) * 2020-03-31 2023-03-30 Asml Netherlands B.V. Method for preparing a substrate and lithographic apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5593224A (en) * 1979-01-08 1980-07-15 Perkin Elmer Corp Device for matching temperature compensating position
JPS5626437A (en) * 1979-08-13 1981-03-14 Chiyou Lsi Gijutsu Kenkyu Kumiai Wafer supporting base

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3937579A (en) * 1972-11-20 1976-02-10 Karl Suss Kg Process for the double-sided exposure of a semiconductor or substrate plates, especially wafers, as well as apparatus for the purpose of parallel and rotational alignment of such a plate
US3963985A (en) * 1974-12-12 1976-06-15 International Business Machines Corporation Probe device having probe heads and method of adjusting distances between probe heads
DD127137B1 (de) * 1976-08-17 1979-11-28 Elektromat Veb Vorrichtung zum kompensieren der waermeeinwirkung an justier- und belichtungseinrichtungen
US4139051A (en) * 1976-09-07 1979-02-13 Rockwell International Corporation Method and apparatus for thermally stabilizing workpieces

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5593224A (en) * 1979-01-08 1980-07-15 Perkin Elmer Corp Device for matching temperature compensating position
JPS5626437A (en) * 1979-08-13 1981-03-14 Chiyou Lsi Gijutsu Kenkyu Kumiai Wafer supporting base

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020062074A (ko) * 2001-01-19 2002-07-25 주식회사 템네스트 전열기를 이용한 정전척의 표면 온도 제어 시스템
JP2016507763A (ja) * 2012-12-17 2016-03-10 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置のための基板サポート及びリソグラフィ装置
JP2014130908A (ja) * 2012-12-28 2014-07-10 Ngk Spark Plug Co Ltd 静電チャック
JP2020074481A (ja) * 2020-02-06 2020-05-14 エーファウ・グループ・エー・タルナー・ゲーエムベーハー ウェハの装着用受け取り手段

Also Published As

Publication number Publication date
DE3213239A1 (de) 1982-11-04
US4503335A (en) 1985-03-05
DE3213239C2 (ja) 1992-12-24

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