JPS55140796A - Automatic crystal growing method - Google Patents
Automatic crystal growing methodInfo
- Publication number
- JPS55140796A JPS55140796A JP4892679A JP4892679A JPS55140796A JP S55140796 A JPS55140796 A JP S55140796A JP 4892679 A JP4892679 A JP 4892679A JP 4892679 A JP4892679 A JP 4892679A JP S55140796 A JPS55140796 A JP S55140796A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- electric power
- crystal growing
- section
- growing state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To minimize a crystal form change and quality unevenness due to accumulation of control errors by automatically controlling crystal growth corresponding to the length of a grown single crystal on the basis of a heating electric power program or a temp. program.
CONSTITUTION: Crystal growing state detecting section 12 is set to detect a crystal growing state such as the length and diameter of a grown crystal or the amount of a residual melt in crystal growing system 11 with accuracy. Electric power control section 9 is controlled with electric power control programmer 8 so that a preprogramed optimum heating electric power state is obtd. corresponding to the detected value of section 12, and the temp. of system 11 is maintained at an optimum crystal growing state with heating section 10.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4892679A JPS55140796A (en) | 1979-04-21 | 1979-04-21 | Automatic crystal growing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4892679A JPS55140796A (en) | 1979-04-21 | 1979-04-21 | Automatic crystal growing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55140796A true JPS55140796A (en) | 1980-11-04 |
Family
ID=12816856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4892679A Pending JPS55140796A (en) | 1979-04-21 | 1979-04-21 | Automatic crystal growing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55140796A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5926996A (en) * | 1982-08-03 | 1984-02-13 | Toshiba Corp | Preparation of single crystal |
JPS59203795A (en) * | 1983-05-07 | 1984-11-17 | Agency Of Ind Science & Technol | Apparatus provided with magnetic field generating apparatus for preparing semiconductor single crystal |
JPH01282186A (en) * | 1988-05-06 | 1989-11-14 | Kokusai Electric Co Ltd | Method for setting controlled variable in automatic drive of crystal producing device |
JP2016044083A (en) * | 2014-08-20 | 2016-04-04 | 三菱マテリアルテクノ株式会社 | Single crystal silicon pull-up device and single crystal silicon pull-up method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4848392A (en) * | 1971-12-29 | 1973-07-09 | ||
JPS4853927A (en) * | 1971-11-08 | 1973-07-28 |
-
1979
- 1979-04-21 JP JP4892679A patent/JPS55140796A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4853927A (en) * | 1971-11-08 | 1973-07-28 | ||
JPS4848392A (en) * | 1971-12-29 | 1973-07-09 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5926996A (en) * | 1982-08-03 | 1984-02-13 | Toshiba Corp | Preparation of single crystal |
JPS59203795A (en) * | 1983-05-07 | 1984-11-17 | Agency Of Ind Science & Technol | Apparatus provided with magnetic field generating apparatus for preparing semiconductor single crystal |
JPS638079B2 (en) * | 1983-05-07 | 1988-02-19 | Kogyo Gijutsuin | |
JPH01282186A (en) * | 1988-05-06 | 1989-11-14 | Kokusai Electric Co Ltd | Method for setting controlled variable in automatic drive of crystal producing device |
JP2016044083A (en) * | 2014-08-20 | 2016-04-04 | 三菱マテリアルテクノ株式会社 | Single crystal silicon pull-up device and single crystal silicon pull-up method |
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