JPS57166399A - Preparation of quartz vibrator - Google Patents
Preparation of quartz vibratorInfo
- Publication number
- JPS57166399A JPS57166399A JP4752081A JP4752081A JPS57166399A JP S57166399 A JPS57166399 A JP S57166399A JP 4752081 A JP4752081 A JP 4752081A JP 4752081 A JP4752081 A JP 4752081A JP S57166399 A JPS57166399 A JP S57166399A
- Authority
- JP
- Japan
- Prior art keywords
- quartz vibrator
- mask
- quartz
- dry
- outer shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 title abstract 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title abstract 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 2
- 238000001312 dry etching Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000003631 wet chemical etching Methods 0.000 abstract 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4752081A JPS57166399A (en) | 1981-03-31 | 1981-03-31 | Preparation of quartz vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4752081A JPS57166399A (en) | 1981-03-31 | 1981-03-31 | Preparation of quartz vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57166399A true JPS57166399A (en) | 1982-10-13 |
Family
ID=12777384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4752081A Pending JPS57166399A (en) | 1981-03-31 | 1981-03-31 | Preparation of quartz vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57166399A (ja) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007122786A1 (ja) * | 2006-03-23 | 2007-11-01 | Epson Toyocom Corporation | 圧電振動片の製造方法 |
| JP2007294751A (ja) * | 2006-04-26 | 2007-11-08 | Kyocera Kinseki Corp | 圧電素子形成方法 |
| JP2008131062A (ja) * | 2006-11-16 | 2008-06-05 | Nippon Dempa Kogyo Co Ltd | 圧電振動片の製造方法、圧電振動片および圧電デバイス |
| JP2008167171A (ja) * | 2006-12-28 | 2008-07-17 | Nippon Dempa Kogyo Co Ltd | 圧電振動片の製造方法、圧電振動片および圧電デバイス |
| JP2010206322A (ja) * | 2009-02-27 | 2010-09-16 | Daishinku Corp | パッケージ部材および該パッケージ部材の製造方法および該パッケージ部材を用いた圧電振動デバイス |
-
1981
- 1981-03-31 JP JP4752081A patent/JPS57166399A/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007122786A1 (ja) * | 2006-03-23 | 2007-11-01 | Epson Toyocom Corporation | 圧電振動片の製造方法 |
| US7861387B2 (en) | 2006-03-23 | 2011-01-04 | Epson Toyocom Corporation | Method for manufacturing piezoelectric resonator element |
| JP2007294751A (ja) * | 2006-04-26 | 2007-11-08 | Kyocera Kinseki Corp | 圧電素子形成方法 |
| JP2008131062A (ja) * | 2006-11-16 | 2008-06-05 | Nippon Dempa Kogyo Co Ltd | 圧電振動片の製造方法、圧電振動片および圧電デバイス |
| JP2008167171A (ja) * | 2006-12-28 | 2008-07-17 | Nippon Dempa Kogyo Co Ltd | 圧電振動片の製造方法、圧電振動片および圧電デバイス |
| US8156621B2 (en) | 2006-12-28 | 2012-04-17 | Nihon Dempa Kogyo, Ltd. | Methods of producing piezoelectric vibrating devices |
| JP2010206322A (ja) * | 2009-02-27 | 2010-09-16 | Daishinku Corp | パッケージ部材および該パッケージ部材の製造方法および該パッケージ部材を用いた圧電振動デバイス |
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