JPS5440542A - Manufacture of elastic surface-wave device - Google Patents
Manufacture of elastic surface-wave deviceInfo
- Publication number
- JPS5440542A JPS5440542A JP10662977A JP10662977A JPS5440542A JP S5440542 A JPS5440542 A JP S5440542A JP 10662977 A JP10662977 A JP 10662977A JP 10662977 A JP10662977 A JP 10662977A JP S5440542 A JPS5440542 A JP S5440542A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- wave device
- elastic surface
- etching
- percussion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To improve center-frequency precision by etching a conductor thin film by a chemical method, and by etching the remaining film by a physical method through ion percussion.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52106629A JPS6050077B2 (en) | 1977-09-07 | 1977-09-07 | Method for manufacturing surface acoustic wave devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52106629A JPS6050077B2 (en) | 1977-09-07 | 1977-09-07 | Method for manufacturing surface acoustic wave devices |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5440542A true JPS5440542A (en) | 1979-03-30 |
JPS6050077B2 JPS6050077B2 (en) | 1985-11-06 |
Family
ID=14438395
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52106629A Expired JPS6050077B2 (en) | 1977-09-07 | 1977-09-07 | Method for manufacturing surface acoustic wave devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6050077B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56149811A (en) * | 1980-04-23 | 1981-11-19 | Hitachi Ltd | Elastic surface wave device and its preparation |
JPS57137472A (en) * | 1981-02-17 | 1982-08-25 | Nec Corp | Etching method for polycrystalline silicon |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60102171U (en) * | 1983-12-16 | 1985-07-12 | ヤンマーディーゼル株式会社 | Agricultural tractor steering device |
JPS60226356A (en) * | 1984-04-21 | 1985-11-11 | Daihatsu Motor Co Ltd | Steering structure for cab-over-engine type car |
-
1977
- 1977-09-07 JP JP52106629A patent/JPS6050077B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56149811A (en) * | 1980-04-23 | 1981-11-19 | Hitachi Ltd | Elastic surface wave device and its preparation |
JPS57137472A (en) * | 1981-02-17 | 1982-08-25 | Nec Corp | Etching method for polycrystalline silicon |
Also Published As
Publication number | Publication date |
---|---|
JPS6050077B2 (en) | 1985-11-06 |
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