JPS5440542A - Manufacture of elastic surface-wave device - Google Patents

Manufacture of elastic surface-wave device

Info

Publication number
JPS5440542A
JPS5440542A JP10662977A JP10662977A JPS5440542A JP S5440542 A JPS5440542 A JP S5440542A JP 10662977 A JP10662977 A JP 10662977A JP 10662977 A JP10662977 A JP 10662977A JP S5440542 A JPS5440542 A JP S5440542A
Authority
JP
Japan
Prior art keywords
manufacture
wave device
elastic surface
etching
percussion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10662977A
Other languages
Japanese (ja)
Other versions
JPS6050077B2 (en
Inventor
Masaharu Ishigaki
Hideo Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52106629A priority Critical patent/JPS6050077B2/en
Publication of JPS5440542A publication Critical patent/JPS5440542A/en
Publication of JPS6050077B2 publication Critical patent/JPS6050077B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To improve center-frequency precision by etching a conductor thin film by a chemical method, and by etching the remaining film by a physical method through ion percussion.
COPYRIGHT: (C)1979,JPO&Japio
JP52106629A 1977-09-07 1977-09-07 Method for manufacturing surface acoustic wave devices Expired JPS6050077B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52106629A JPS6050077B2 (en) 1977-09-07 1977-09-07 Method for manufacturing surface acoustic wave devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52106629A JPS6050077B2 (en) 1977-09-07 1977-09-07 Method for manufacturing surface acoustic wave devices

Publications (2)

Publication Number Publication Date
JPS5440542A true JPS5440542A (en) 1979-03-30
JPS6050077B2 JPS6050077B2 (en) 1985-11-06

Family

ID=14438395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52106629A Expired JPS6050077B2 (en) 1977-09-07 1977-09-07 Method for manufacturing surface acoustic wave devices

Country Status (1)

Country Link
JP (1) JPS6050077B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56149811A (en) * 1980-04-23 1981-11-19 Hitachi Ltd Elastic surface wave device and its preparation
JPS57137472A (en) * 1981-02-17 1982-08-25 Nec Corp Etching method for polycrystalline silicon

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60102171U (en) * 1983-12-16 1985-07-12 ヤンマーディーゼル株式会社 Agricultural tractor steering device
JPS60226356A (en) * 1984-04-21 1985-11-11 Daihatsu Motor Co Ltd Steering structure for cab-over-engine type car

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56149811A (en) * 1980-04-23 1981-11-19 Hitachi Ltd Elastic surface wave device and its preparation
JPS57137472A (en) * 1981-02-17 1982-08-25 Nec Corp Etching method for polycrystalline silicon

Also Published As

Publication number Publication date
JPS6050077B2 (en) 1985-11-06

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