JPS57160154A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS57160154A JPS57160154A JP4687381A JP4687381A JPS57160154A JP S57160154 A JPS57160154 A JP S57160154A JP 4687381 A JP4687381 A JP 4687381A JP 4687381 A JP4687381 A JP 4687381A JP S57160154 A JPS57160154 A JP S57160154A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- film
- layer
- holes
- metal layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 239000010410 layer Substances 0.000 abstract 8
- 238000000034 method Methods 0.000 abstract 6
- 239000002184 metal Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 239000011229 interlayer Substances 0.000 abstract 2
- 238000002955 isolation Methods 0.000 abstract 2
- 229910021645 metal ion Inorganic materials 0.000 abstract 2
- 239000004642 Polyimide Substances 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
- 229920001721 polyimide Polymers 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0688—Integrated circuits having a three-dimensional layout
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Recrystallisation Techniques (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4687381A JPS57160154A (en) | 1981-03-27 | 1981-03-27 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4687381A JPS57160154A (en) | 1981-03-27 | 1981-03-27 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57160154A true JPS57160154A (en) | 1982-10-02 |
JPS6248896B2 JPS6248896B2 (ja) | 1987-10-16 |
Family
ID=12759459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4687381A Granted JPS57160154A (en) | 1981-03-27 | 1981-03-27 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57160154A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62130542A (ja) * | 1985-12-03 | 1987-06-12 | Oki Electric Ind Co Ltd | 多層配線の形成方法 |
-
1981
- 1981-03-27 JP JP4687381A patent/JPS57160154A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62130542A (ja) * | 1985-12-03 | 1987-06-12 | Oki Electric Ind Co Ltd | 多層配線の形成方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6248896B2 (ja) | 1987-10-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0288052A3 (en) | Semiconductor device comprising a substrate, and production method thereof | |
JPS5643749A (en) | Semiconductor device and its manufacture | |
ATE19712T1 (de) | Verfahren zum herstellen einer isolierschicht zwischen metallisierungsebenen von integrierten halbleiterschaltungen. | |
JPS57160154A (en) | Manufacture of semiconductor device | |
JPS57145340A (en) | Manufacture of semiconductor device | |
JPS5669843A (en) | Manufacture of semiconductor device | |
JPS5688358A (en) | Manufacture of semiconductor device | |
KR880014690A (ko) | 상부측 기판 접촉부를 갖고 있는 cmos 집적회로 및 이의 제조방법 | |
JPS6484722A (en) | Manufacture of semiconductor device | |
JPS60111450A (ja) | 半導体集積回路装置 | |
JPS5789239A (en) | Semiconductor integrated circuit | |
JPS56125856A (en) | Manufacture of semiconductor device | |
JPS5789242A (en) | Fabrication of semiconductor device | |
JPS6484735A (en) | Manufacture of semiconductor device | |
JPS6457671A (en) | Semiconductor device and manufacture thereof | |
JPS5461490A (en) | Multi-layer wiring forming method in semiconductor device | |
JPS5795647A (en) | Integrated circuit device and its manufacture | |
JPS57181142A (en) | Manufacture of semiconductor device | |
JPS57184232A (en) | Manufacture of semiconductor device | |
JPS6476771A (en) | Manufacture of vertical field-effect transistor | |
JPS572545A (en) | Manufacture of semiconductor device | |
JPS56165339A (en) | Semiconductor device | |
JPS6421944A (en) | Manufacture of semiconductor device | |
JPS56138942A (en) | Manufacture of semiconductor device | |
JPS57181141A (en) | Semiconductor device |