JPS5795647A - Integrated circuit device and its manufacture - Google Patents
Integrated circuit device and its manufactureInfo
- Publication number
- JPS5795647A JPS5795647A JP17225680A JP17225680A JPS5795647A JP S5795647 A JPS5795647 A JP S5795647A JP 17225680 A JP17225680 A JP 17225680A JP 17225680 A JP17225680 A JP 17225680A JP S5795647 A JPS5795647 A JP S5795647A
- Authority
- JP
- Japan
- Prior art keywords
- film
- flattened
- wiring layer
- wiring
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To prevent the breaking of a stage in multilayer wiring structure, and to enable fining by a method wherein an insulating film is coated and formed onto a substrate to which the first wiring layer with difference in stages is formed, and flattened, and the second wiring layer is shaped to the upper section. CONSTITUTION:The first Al wiring layers 4 are formed to the Si substrate 1, to which a desired circuit element 2 consisting of a diffusion layer, etc. is shaped, through a SiO2 film 3, the CVDSiO2 film 5 is coated, and a resist film 9 is applied rotatively so that the surface is flattened. The whole surface of the resist film 9 is exposed, and developed so that resist films 9A remain in the thick concave sections of the film 9. An exposed section of the SiO2 film 5 is etched and flattened, a contact hole 7 is formed to the film 5, and the second wiring layer such as an Al wiring layer 6 is shaped. Accordingly, disconnection due to the difference in stages of the upper layer wiring layers can be prevented, and yield and reliability can be improved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17225680A JPS5795647A (en) | 1980-12-05 | 1980-12-05 | Integrated circuit device and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17225680A JPS5795647A (en) | 1980-12-05 | 1980-12-05 | Integrated circuit device and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5795647A true JPS5795647A (en) | 1982-06-14 |
Family
ID=15938514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17225680A Pending JPS5795647A (en) | 1980-12-05 | 1980-12-05 | Integrated circuit device and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5795647A (en) |
-
1980
- 1980-12-05 JP JP17225680A patent/JPS5795647A/en active Pending
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