JPS57157118A - Photoelectric type displacement detecting device - Google Patents
Photoelectric type displacement detecting deviceInfo
- Publication number
- JPS57157118A JPS57157118A JP4375381A JP4375381A JPS57157118A JP S57157118 A JPS57157118 A JP S57157118A JP 4375381 A JP4375381 A JP 4375381A JP 4375381 A JP4375381 A JP 4375381A JP S57157118 A JPS57157118 A JP S57157118A
- Authority
- JP
- Japan
- Prior art keywords
- scales
- scale
- glasses
- type displacement
- photoelectric type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title abstract 2
- 239000011521 glass Substances 0.000 abstract 3
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4375381A JPS57157118A (en) | 1981-03-24 | 1981-03-24 | Photoelectric type displacement detecting device |
DE19823210614 DE3210614A1 (de) | 1981-03-24 | 1982-03-23 | Fotoelektrische verschiebungsmessvorrichtung |
GB8208682A GB2095399B (en) | 1981-03-24 | 1982-03-24 | Photoelectrical displacement-measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4375381A JPS57157118A (en) | 1981-03-24 | 1981-03-24 | Photoelectric type displacement detecting device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57157118A true JPS57157118A (en) | 1982-09-28 |
JPS6127690B2 JPS6127690B2 (ja) | 1986-06-26 |
Family
ID=12672520
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4375381A Granted JPS57157118A (en) | 1981-03-24 | 1981-03-24 | Photoelectric type displacement detecting device |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS57157118A (ja) |
DE (1) | DE3210614A1 (ja) |
GB (1) | GB2095399B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5987318A (ja) * | 1982-11-10 | 1984-05-19 | Matsushita Electric Ind Co Ltd | 光電式位置検出器 |
US4606620A (en) * | 1985-10-10 | 1986-08-19 | Shibuya Kogyo Co., Ltd. | Device for cooling reflecting mirror |
US4606642A (en) * | 1983-07-16 | 1986-08-19 | Dr. Johannes Heidenhain Gmbh | Measuring arrangement for the clear scanning of at least one reference mark allocated to a graduation |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4478290A (en) * | 1981-08-26 | 1984-10-23 | Orthwein William G | Anti-buckling device for mine-roof bolting machines |
JPS60161523A (ja) * | 1984-02-02 | 1985-08-23 | Mitsutoyo Mfg Co Ltd | 三次元測定機 |
US4684257A (en) * | 1984-02-02 | 1987-08-04 | Mitutoyo Mfg. | Measuring instrument |
GB8413955D0 (en) * | 1984-05-31 | 1984-07-04 | Pa Consulting Services | Displacement measuring apparatus |
GB2161262A (en) * | 1984-07-05 | 1986-01-08 | Co Operative Technology Ltd | Digital instrumentation apparatus for the linear air-track |
GB8432574D0 (en) * | 1984-12-22 | 1985-02-06 | Renishaw Plc | Opto-electronic scale-reading apparatus |
GB8615196D0 (en) * | 1986-06-21 | 1986-07-23 | Renishaw Plc | Opto-electronic scale reading apparatus |
US4912322A (en) * | 1986-08-15 | 1990-03-27 | Mitutoyo Mfg. Co., Ltd. | Optical type displacement detecting device |
US4943716A (en) * | 1988-01-22 | 1990-07-24 | Mitutoyo Corporation | Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations |
JPH07888Y2 (ja) * | 1988-02-22 | 1995-01-11 | 株式会社ミツトヨ | 光学式変位検出器 |
DE3823314A1 (de) * | 1988-07-09 | 1990-01-11 | Heidenhain Gmbh Dr Johannes | Lichtelektrische positionsmesseinrichtung |
US5021649A (en) * | 1989-03-28 | 1991-06-04 | Canon Kabushiki Kaisha | Relief diffraction grating encoder |
DE4132941C2 (de) * | 1990-10-20 | 1994-02-24 | Heidenhain Gmbh Dr Johannes | Interferentielle Meßeinrichtung für wenigstens eine Meßrichtung |
DE59204951D1 (de) * | 1992-09-21 | 1996-02-15 | Heidenhain Gmbh Dr Johannes | Längen- oder Winkelmesseinrichtung |
US5424833A (en) * | 1992-09-21 | 1995-06-13 | Dr. Johannes Heidenhain Gmbh | Interferential linear and angular displacement apparatus having scanning and scale grating respectively greater than and less than the source wavelength |
EP0590163B1 (de) * | 1992-09-21 | 1996-01-03 | Dr. Johannes Heidenhain GmbH | Längen- oder Winkelmesseinrichtung |
JPH0719965A (ja) * | 1993-06-30 | 1995-01-20 | Ando Electric Co Ltd | 光波長計 |
ES2357016T3 (es) * | 2009-03-02 | 2011-04-15 | Fagor, S. Coop. | Cabeza lectora para un dispositivo de lectura. |
US9018578B2 (en) * | 2011-12-23 | 2015-04-28 | Mitutoyo Corporation | Adaptable resolution optical encoder having structured illumination and spatial filtering |
US9029757B2 (en) | 2011-12-23 | 2015-05-12 | Mitutoyo Corporation | Illumination portion for an adaptable resolution optical encoder |
US9080899B2 (en) | 2011-12-23 | 2015-07-14 | Mitutoyo Corporation | Optical displacement encoder having plural scale grating portions with spatial phase offset of scale pitch |
DE102017201257A1 (de) | 2017-01-26 | 2018-07-26 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1474049A (en) * | 1974-01-12 | 1977-05-18 | Leitz Ernst Gmbh | Arrangement for the modulation of light |
GB1504691A (en) * | 1974-03-15 | 1978-03-22 | Nat Res Dev | Measurement apparatus |
CH626169A5 (ja) * | 1976-11-25 | 1981-10-30 | Leitz Ernst Gmbh |
-
1981
- 1981-03-24 JP JP4375381A patent/JPS57157118A/ja active Granted
-
1982
- 1982-03-23 DE DE19823210614 patent/DE3210614A1/de active Granted
- 1982-03-24 GB GB8208682A patent/GB2095399B/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5987318A (ja) * | 1982-11-10 | 1984-05-19 | Matsushita Electric Ind Co Ltd | 光電式位置検出器 |
US4606642A (en) * | 1983-07-16 | 1986-08-19 | Dr. Johannes Heidenhain Gmbh | Measuring arrangement for the clear scanning of at least one reference mark allocated to a graduation |
US4606620A (en) * | 1985-10-10 | 1986-08-19 | Shibuya Kogyo Co., Ltd. | Device for cooling reflecting mirror |
Also Published As
Publication number | Publication date |
---|---|
GB2095399B (en) | 1985-02-13 |
JPS6127690B2 (ja) | 1986-06-26 |
DE3210614A1 (de) | 1982-10-14 |
DE3210614C2 (ja) | 1987-08-13 |
GB2095399A (en) | 1982-09-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS57157118A (en) | Photoelectric type displacement detecting device | |
JPS53110823A (en) | Optical information processor | |
FR2434367A1 (fr) | Dispositif photoelectrique incremental de mesure des longueurs et des angles | |
JPS5295221A (en) | Detector for focusing | |
ES8100945A1 (es) | Perfeccionamientos en transductores de desplazamiento | |
ES2033600T1 (es) | Sensor optoelectronico de medicion de magnitudes lineales. | |
JPS55106361A (en) | Optical contactless-type speed measuring device | |
JPS55119006A (en) | Displacement measuring instrument | |
JPS5342762A (en) | Radiation measuring apparatus | |
JPS6454207A (en) | Optical measuring apparatus of film thickness | |
JPS57120808A (en) | Detector for angle of parallel rays | |
JPS5436755A (en) | Photoelectric type angle and position detector | |
JPS5618709A (en) | Method of measuring minute angle | |
JPS5636014A (en) | Detection method | |
DE3679606D1 (de) | Positionsmessvorrichtung mit optischen gittern. | |
JPS5764105A (en) | Location detector | |
JPS5328336A (en) | Optical scanning device | |
JPS5342881A (en) | Measuring apparatus of leaked flowing amount | |
JPS5550105A (en) | Moving distance meter for movable body | |
JPS5269653A (en) | Detector for displacement of scanning beam | |
JPS53143317A (en) | System for processing optical information | |
JPS5337454A (en) | Distance measuring device | |
JPS52109931A (en) | Finder with dual image coincidence type distance meter | |
JPS542104A (en) | Face run-out detector of rotating bodies | |
JPS5361356A (en) | Minute angle measuring device |