JPS5618709A - Method of measuring minute angle - Google Patents
Method of measuring minute angleInfo
- Publication number
- JPS5618709A JPS5618709A JP9366379A JP9366379A JPS5618709A JP S5618709 A JPS5618709 A JP S5618709A JP 9366379 A JP9366379 A JP 9366379A JP 9366379 A JP9366379 A JP 9366379A JP S5618709 A JPS5618709 A JP S5618709A
- Authority
- JP
- Japan
- Prior art keywords
- light
- rays
- reflector
- grating
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To easily measure an angle in a wide range with sensitivity more accurate than 0.1", by detecting the change in the phase of light caused by the rotation of a reflector.
CONSTITUTION: Light flux emitted from a light source 1 is converted into parallel rays of light with an appropriate diameter by a collimator 2. The parallel rays of light are entered into a diffraction grating 4 so that the rays of light proceed in several different directions while keeping a coherent phase relationship. Since the grating 4 is located on the focal plane of a lens 5, the rays of light are transmitted through the lens and proceed in such a direction that the rays are condensed to the focal plane of the lens and reflected by a reflector 6. Only the first-order and the zero-order diffracted rays of light among those divided by the grating 4 are picked out through slits 9 and reflected by the reflector 6 and returned to the grating 4 so that the returned rays of light are diffracted again. Both the rediffracted rays of light proceed in the same direction and interfere with each other. The phase relationship between each pair of two rays of light changes depending on the rotation of the reflector 6. The change in the phase relationship is detected to measure a displacement of minute angle.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9366379A JPS6041287B2 (en) | 1979-07-25 | 1979-07-25 | Small angle measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9366379A JPS6041287B2 (en) | 1979-07-25 | 1979-07-25 | Small angle measurement method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5618709A true JPS5618709A (en) | 1981-02-21 |
| JPS6041287B2 JPS6041287B2 (en) | 1985-09-14 |
Family
ID=14088626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9366379A Expired JPS6041287B2 (en) | 1979-07-25 | 1979-07-25 | Small angle measurement method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6041287B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4921941A (en) * | 1987-07-01 | 1990-05-01 | Schering Corporation | Orally active antiandrogens |
| DE112006001713B4 (en) * | 2005-09-21 | 2011-11-24 | Panasonic Corporation | Angle measuring device and method |
| DE102011050030A1 (en) * | 2011-05-02 | 2012-11-08 | Scanlab Ag | Position detector and light deflection device |
| JP2020523590A (en) * | 2017-06-13 | 2020-08-06 | レイセオン カンパニー | Calibration method and system for a fast steering mirror |
-
1979
- 1979-07-25 JP JP9366379A patent/JPS6041287B2/en not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4921941A (en) * | 1987-07-01 | 1990-05-01 | Schering Corporation | Orally active antiandrogens |
| DE112006001713B4 (en) * | 2005-09-21 | 2011-11-24 | Panasonic Corporation | Angle measuring device and method |
| DE102011050030A1 (en) * | 2011-05-02 | 2012-11-08 | Scanlab Ag | Position detector and light deflection device |
| DE102011050030B4 (en) * | 2011-05-02 | 2013-03-28 | Scanlab Ag | Position detector and light deflection device with position detector |
| US9285214B2 (en) | 2011-05-02 | 2016-03-15 | Scanlab Ag | Position detector and light deflection apparatus |
| JP2020523590A (en) * | 2017-06-13 | 2020-08-06 | レイセオン カンパニー | Calibration method and system for a fast steering mirror |
| EP3638983B1 (en) * | 2017-06-13 | 2022-03-30 | Raytheon Company | Calibration method and system for fast steering mirror |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6041287B2 (en) | 1985-09-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4218615A (en) | Incremental digital shaft encoder | |
| JPS57157118A (en) | Photoelectric type displacement detecting device | |
| EP0311144A3 (en) | Optical instrument for measuring displacement | |
| JPS626119A (en) | Rotary encoder | |
| US4969744A (en) | Optical angle-measuring device | |
| JPH06229781A (en) | Displacement measuring equipment | |
| JPS5618709A (en) | Method of measuring minute angle | |
| JPS62200225A (en) | Rotary encoder | |
| DE59105415D1 (en) | Angle measuring device. | |
| JPS55135813A (en) | Laser beam scanner | |
| JPS6165116A (en) | Rotary encoder | |
| SU1364866A1 (en) | Interference device for measuring angular displacements | |
| JPS56130603A (en) | Noncontacting displacement meter | |
| JPH0462003B2 (en) | ||
| SU565208A1 (en) | Optical-electronic device for measuring object angular deflections | |
| JPS61130816A (en) | Linear encoder | |
| JPS556239A (en) | Rotation detector for tachometer | |
| JPS6165165A (en) | Tachometer | |
| JPS64417A (en) | Optical encoder | |
| JPS6165115A (en) | Rotary encoder | |
| SU1060938A1 (en) | Device for measuring object turn angle | |
| SU1126812A1 (en) | Device for measuring deformations of diffuse-reflective objects | |
| JPS5636014A (en) | Detection method | |
| SU1073734A1 (en) | Device for registering gravimeter sensing element position | |
| SU502213A1 (en) | The method of measuring the angular displacements of a flat object |